Oxford-100-Manual.pdf - 第289页

Plasma lab System 100 (ICP 180) Introduction Oxford Instruments Plasma Technology Illustrated Parts Catalogue This Illustrated Parts Catalogue has been prepared to enable the rapid identification of components of the Oxf…

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Plasma
lab
System
100
(ICP
180)
Contents
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
Contents
ii
Introduction
iii
Location
of
major
components
v
Section
0
System
common
components
0-1
Section 1
Intentionally
left
blank
Section 2
Intentionally
left
blank
Section
3 Process
chambers
3-1
Section 4
Intentionally
left
blank
Section
5
Lower
electrode
5-1
Section
6
RF
plasma
generation,
power
supplies
6-1
Section
7
Vacuum
measurement
7-1
Section
8
Pumping
pipework
8-1
Section
9 Process gas
handling
9-1
Section
10
Wafer
handling
options,
load
locks
and
robotics
10-1
Section
11
Spares 11-1
Section
12
Accessories 12-1
Page ii
of
vi
Issue
2:
November 02
Printed:
16-Jan-06. 15:55
Plasma
lab
System
100
(ICP
180)
Introduction
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
This Illustrated Parts Catalogue has been prepared
to
enable
the
rapid
identification
of
components
of
the
Oxford
Instruments Plasma Technology
Plasma
lab
System
100
(lCP
180) machine.
The catalogue
is
not
a comprehensive list
of
all machine components,
for
details
of
components
not
included,
please
contact
Oxford
Instruments Plasma Technology (OIPT).
Contact
your
local
OIPT
representative
for
prices;
see
the
last page
of
this
catalogue
for
addresses, phone/fax
numbers and e-mail addresses.
Catalogue
organisation
This catalogue
is
organised
to
mimic
the
OIPT
Bill
Of
Materials
and
Price List
numbering
system
for
ease
of
component
location.
Each
major
system
component
is
identified
by
a
number
of
the
form
AAA·BB·CC:
AAA: 100 represents
the
Plasma
lab
System
100 product.
BB:
System sections
as
follows
(note
that
not
all available numbers are used) :
0: Compulsory elements
of
the
basic system, such
as
frame,
power
box, Programmable Logic
Controllers etc.
1:
Not
applicable
to
the
Plasma
lab
System
100
2:
Not
applicable
to
the
Plasma
lab
System
100
3:
Process chambers
and
their
options.
4:
Not
applicable
to
the
Plasmalab
System
100
5:
Lower
electrode
6:
Plasma generation, power supplies.
7:
Vacuum measurement.
8: Pumping
pipework.
9:
Process gas lines
10: Wafer handling options, load locks and robotics
11: Spare series
12: Accessories, cover plates, chillers, end
point
detectors etc.
The sections
in
this
catalogue
are
numbered
to
match these system sections.
So
for
example,
if
you
are
looking
for
a process
chamber
component,
you
will
find
it
in Section
3.
CC:
Sub assembly
numbering.
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Page
iii
of
vi
Plasma
lab
System
100
(ICP
180)
Using
the
Parts
Lists
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
In this catalogue
'item
number'
refers
to
the
reference
number
used
on
an
illustration,
'part
number'
refers
to
the
unique
number
used
to
identify
the
part
in
Dxford Instruments Plasma Technology'.
To
identify
a part:
1)
Locate
the
appropriate
section
from
the
contents list.
2)
Find
the
required
component
on
the
relevant
illustration
and
note
its
item
number
(see
note
(d) below).
4)
Refer
to
the
associated parts list
table
and
find
the
item
number.
5)
Note
the
DPT
part
number
and description.
6)
Telephone
or
fax
the
part
number
and description
to
your
local DIPT sales
office
or
representative
who
can qUickly locate
the
part
on
the
spares database.
See
the
last page
of
this catalogue
for
DIPT locations
world-wide.
NOTES:
(a)
Where
possible,
the
item
number
used
in
the
illustrations
is
the
same
as
that
quoted
on
the
DIPT Bill
of
Materials
for
the
assembly. However, in some
cases
this has
not
been possible
as
more
than
one
assembly
may
be shown
in
an illustration.
(b) Where an
item
number
has
more
than
one
part
associated
with
it
in
a parts list
table,
this
indicates
component
options
which
may vary according
to
the
configuration
of
the
machine:
identify
the
component
from
the
actual machine
before
selecting
the
correct
option.
(c)
Items listed
without
item
numbers in
the
parts list tables are
not
shown
in
the
illustrations,
but
their
DIPT
Part Numbers and descriptions are listed
to
enable
identification.
(d)
Printed Circuit Boards
(PCBs)
illustrated
within
this
catalogue are assembled boards
which
include all
integrated
circuits
and
other
components. To ensure
the
correct assembled
board
is
supplied, read
the
PC
number
stamped
on
the
PCB.
This
will
read PC100xxxxxx. Check
this
with
the
DIPT spares
department
or
include
the
number
with
your
order,
making
sure
to
include any revision
number
printed
on
the
circuit
board.
Page iv
of
vi
Issue
2:
November 02
Printed: 16-Jan-06, 15:55