Oxford-100-Manual.pdf - 第28页

Plasma lab and lonfab Oxford Instruments Plasma Technology Health and Safety 1.4 Warning and advisory labels During manufacture, warning and advisory labels are attached to the system to indicate potential hazards and co…

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Health and Safety
Oxford
Instruments
Plasma
Technology
Plasma
lab
and
lonfab
1.3.12.9 Never smoke
or
eat
in
the
'clean
room'
or
where
gases are stored.
In
addition
to
the
fire
risks and
particulate
contamination
presented by smoking, some chemicals
when
burnt
generate
carcinogenic
or
toxic
compounds.
Printed:29
May
2005. 06:31
Health and Safety
Page 1-15
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18
Issue
11:
August
2004
Plasma
lab
and
lonfab
Oxford
Instruments Plasma Technology
Health and Safety
1.4
Warning
and
advisory
labels
During
manufacture,
warning
and advisory labels are
attached
to
the
system
to
indicate
potential
hazards and components,
which
should
not
be
operated
or
maintained
without
first
reading
the
relevant
manual. Typical labels and
their
meanings are
as
follows:
~
DANGER
-----
,-,.----".-
RF
ENERGY
«t
l
-.»
Disconnect
electrical
supply
before
servicing
Danger
of
physical
injury
from
RF
radiation
or
from
touching
components
within
the
labelled
equipment.
~
WARNING
PINCH POINT
....
.
Keep
hands
away
Danger
of
trapping
limbs, fingers etc.
In
the
labelled
equipment.
from
chamber
lid
when
closing.
Lfi\
WARNING
~------
STRONG
MAGNETIC
FIELD
n
Avoid
contact
with
this
area.
Danger
of
physical
injury
from
the
Strong
Magnetic
Field generated by
the
labelled
equipment.
&
WARNI~G
Caution,
hot
surface
IEC
417, No.
5041
( (
('
HOT
SURFACE
) ) )
Do
not
touch
-
~
DANGER
,
~-~---
lOW
TEMPERATURE
Wear
thermal
*
protective
gloves
Danger
of
physical injury,
from
the
labelled
equipment.
WARNING
SERVICE BY
QUALIFIED STAFF
ONLY
Refer
to
manual
Read
the
relevant
manual
before
proceeding
to
operate
or
maintain
the
labelled
equipment.
!AI
WARNING
~-~.~-----
RF
&
UV
RADIATION.
DO
NOT
USE
THIS
PORT
~.~
FOR
VIEWING
WITH
THE
a
WI~~~~~
~:SH
SHIELD
IN
PLACE
&I
~J\RNING
._-,-----
LASER
BEAM
Disconnect
~
electrical
supply
before
servicing
Danger
of
physical
injury
from
RF
and UV
radiation
from
the
labelled
components.
Danger
of
physical
injury
from
Laser Beam
generated
by
the
labelled
components.
Issue
11:
August
2004
Health and Safety
Page 1-16
of
18
Printed:29
May
2005, 06:31
Health and Safety
Oxford
Instruments
Plasma
Technology
Plasma
lab
and
lonfab
WARNING
System vent gas: Nitrogen
Warns
of
gas
type
and maximum pressure, connected
to
the
system.
Max inlet pressure : 5
Bar
WARNING
Gas type:
Air
(compressed)
Warns
of
gas
type
and maximum pressure, connected
to
the
system.
Max inlet pressure: 9
Bar
WARNING
System process
gas:
Warns
of
gas
type
and maximum pressure, connected
to
the
system.
Max inlet pressure: 5
Bar
WARNING
Fluid type: Water (cooiing)
Warns
of
fluid
type
and maximum pressure, connected
to
the
system
Max inlet pressure: 4.2
Bar
~
Caution,
refer
to
accompanying documents.
ISO
3864,
No.
B.3.1
Continued
...
Printed:29 May 2005. 06:31
Health and Safety
Page 1-17
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Issue
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August
2004