Oxford-100-Manual.pdf - 第30页

Plasma lab and lonfab ... Continued Oxford Instruments Plasma Technology Health and Safety 1 On (Supply) IEC 417, No.5007 0 Off (Supply) IEC 417, NO.5008 Earth (ground) IEC 417, No.5017 @ Protective earth (ground) IEC 41…

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Health and Safety
Oxford
Instruments
Plasma
Technology
Plasma
lab
and
lonfab
WARNING
System vent gas: Nitrogen
Warns
of
gas
type
and maximum pressure, connected
to
the
system.
Max inlet pressure : 5
Bar
WARNING
Gas type:
Air
(compressed)
Warns
of
gas
type
and maximum pressure, connected
to
the
system.
Max inlet pressure: 9
Bar
WARNING
System process
gas:
Warns
of
gas
type
and maximum pressure, connected
to
the
system.
Max inlet pressure: 5
Bar
WARNING
Fluid type: Water (cooiing)
Warns
of
fluid
type
and maximum pressure, connected
to
the
system
Max inlet pressure: 4.2
Bar
~
Caution,
refer
to
accompanying documents.
ISO
3864,
No.
B.3.1
Continued
...
Printed:29 May 2005. 06:31
Health and Safety
Page 1-17
of
18
Issue
11:
August
2004
Plasma
lab
and
lonfab
...
Continued
Oxford
Instruments
Plasma
Technology
Health and Safety
1
On (Supply)
IEC
417, No.5007
0
Off
(Supply)
IEC
417, NO.5008
Earth
(ground)
IEC
417, No.5017
@
Protective
earth
(ground)
IEC
417, NO.5019
3
..............
Three phase
alternating
Current
IEC
617-2 No. 020206
3N~
Three phase
alternating
Current
with
Neutral wire.
&
WARNING
HAZARDOUS
Warns
of
any
voltage
between
208V and 240V
underneath
the
cover.
VOLTAGE
~
,,=._
.'00"00'
supply before
removing cover
&
When
used
on
its
own,
this label warns
of
any
voltage
between
208V
and 240V.
The labels
below
indicate
the
presence
of
high
voltages
within
the
labelled
equipment.
There
is
a
danger
of
electric shock
or
burns
from
touching
components
within
the
labelled
equipment.
&~~riGER
&fit
ER
~~ANGER
~-~~------~
HAZARDOUS
HAZARDOUS
HAZARDOUS
VOLTAGE
VOLTAGE
VOLTAGE
~
",.~
~
,w_
~
""0,"
50/60 hz
50/60
hz
50/60 hz
3 Phase
3 Phase
3
Phase
&DANGER
~DANGER
&:DANGER
~
""''"'"''''
~
"","00"'
~
~OOO,
VOLTAGE
VOLTAGE
VOLTAGE
240
Volts
220
Volts
115
Volts
50/60 hz
50/60 hz
50/60
hz
Issue
11:
August
2004
Health and Safety
Page 1-18
of
18 Printed:29
May
2005. 06:31
System
Manual
Oxford
Instruments
Plasma
Technology
Plasma
lab
System 100
2. Services (lCP
180
&
automatic
load lock)
2.
Services (ICP
180
&
automatic
load
lock) 2-1
2.1
General
2-2
2.2
Services requirements 2-3
2.3
Distribution
and use
of
Nitrogen
vent
and
turbo
purge
gas 2-3
2.4
Services diagrams 2-4
Fig 2.1: System 100
(ICP
180/380) services
flow
diagram
2-5
Fig 2.2: System 100
pneumatic
circuit
diagram
2-6
Printed
25
May
2005 10:12
Services
OCP
180 and
Automatic
Load Lock)
Page
2-1
of6
Issue
2:
February 02