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Plasma lab System 100 (ICP 180) NOTES: Wafer Handling Oxford Instruments Plasma Technology Section 10 Page 6 of 6 Illustrated Parts Catalogue Issue 2: November 02 Printed: 16-Jan-06, 15:55

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Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
10.2
Wafer
handling
option
spares
OIPT Part No. Qty Description
COMMON
SPARES, SINGLE WAFER AUTOMATIC INSERTION LOAD
LOCK
FOR
USE
WITH ISOLATED
PROCESS
CHAMBER, INCLUDING
SUPPORT
FRAME
AND
ACTIVE
PIRANI GAUGE
(100·10·5xxx)
G/SUN/BEU012 1
SIS
BELT
6.35W
x 0.075THK x 641LG
ESZ9107
1 MICRO SWITCH 331-405
G/VAC/FIT/927
1
ROTARY FEEDTHROUGH (8
mm
SHAFT)
G/SUN/GER/009 1
SERVO
MOTOR
24 VDC
EMM0025
1
PRECISION
DC
MIG
EAR
MAOOZ17834
1 LOADLOCK
MOTOR
CONTROLLER
PCB
G/SUN/BEU013 1
SIS
BELT
6.35W
x 0.075THK x 731LG
EIQ055 1 OPTO
SENSOR
SLOTTED
G/V
AC/GGE/005
1 ACTIVE
PI
RANI GAUGE APG
G/SUN/BRG/050 1 4 PNT CONT'T
BRG
1"
lID x
1.375"
OlD
AS ABOVE WITH LARGE MESC VALVE (100·10·05C)
GIISUN/BRG/903 1 MINIATURE
LM
GUIDE BEARING
TYPE
HRW12
GIISUN/BRG/904 1 MINIATURE
LM
GUIDE BEARING
TYPE
HRW14
G/SEUO-V/269 1 3.5 x 221.85
mm
VITON
'0'
RING 200-269
PM
KIT LOADLOCK
HANDLER·
STANDARD QUARTZ CLAMP TOOLING (100·10·05CS)
MD91B22328SP 1
4"
DIA
WAFER CLAMP QUARTZ
MD91B22277SP 1
3"
DIA
WAFER CLAMP QUARTZ
MD91B22327SP 1
2"
DIA
WAFER CLAMP QUARTZ
MD91B24693SP 1
5"
DIA
WAFER CLAMP QUARTZ
MD91B22329SP 1
6"
DIA
WAFER CLAMP QUARTZ
MD91B23036SP 1
8"
DIA
WAFER CLAMP QUARTZ
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Section
10
Page 5
of
6
Wafer
Handling
Plasma
lab
System
100
(ICP
180)
NOTES:
Wafer
Handling
Oxford
Instruments
Plasma
Technology
Section 10 Page 6
of
6
Illustrated Parts Catalogue
Issue
2:
November 02
Printed: 16-Jan-06, 15:55
Plasmalab
System 100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
Section 11 - Spares
Section
11 • Spares 1
11.1 Standard spare parts
kits
2
11.2
Common
system 100 base
unit
standard
spares
kit..
3
11.3 ICP180
additional
parts
kit
3
11.4 Single
wafer
DIPT Loadlock spares
kit
4
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Section
11
Page 1
of
4
Spare Parts Kits