Oxford-100-Manual.pdf - 第357页
Plasma lab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue Section 12 - Accessories Section 12 - Accessories 1 12.1 Heaters/chillers 2 12.2 Heater/chiller option spares 2 12.3 End po…
Plasma
lab
System
100
(lep
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
11.4
Single
wafer
OIPT
load
lock spares
kit
The kit
in
the table below applies if a Single Wafer OIPT load lock is attached and consists of the following components:
Spares
kit
Part
Number
100·10·05CS
OIPT
Part
No.
Qtv
Description
MD90D12788 1 WINDOW
GASKET
(Sinqle
wafer
OIPT
loadlock)
G/SEUO-V/280C 1
3.5
mm
x 355.2
mm
VITON
'0'
RING
BS280
(Sinqle
wafer
OIPT
loadlock)
G/SEUO-V/260C 1
3.5
mm
x164.7
mm
VITON
'0'
RING
200-260 (Sinqle
wafer
OIPT
loadlock)
GIV
AC/SEU015C
1 NW16
CENT.
RING
ALI/VITON (Sinqle
wafer
OIPT
loadlock)
G/SEUO-V/015 1 1.8
mm
x13.99
mm
VITON
'0'
RING
BS015
(Sinqle
wafer
OIPT
loadlock)
G/SEUO-V/263C
1 3.5
mm
x 196.4
mm
VITON
'0'
RING
BS263
(Sinqle
wafer
OIPT
loadlock)
G/SELIO-V/269C 1
3.5
mm
x 221.85
mm
VITON
'0'
RING
200-269 (Sinqle
wafer
OIPT
loadlock)
G/SEUO-V/279C
1
3.5
mm
x 329.8
mm
VITON
'0'
RING
BS279
(Sinqle
wafer
OIPT
loadlock)
Spare Parts Kits
Section
11
Page 4
of
4
Issue
2:
November 02
Printed: 16-Jan-06, 15:55
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
Section
12
- Accessories
Section
12
-
Accessories
1
12.1
Heaters/chillers 2
12.2 Heater/chiller
option
spares 2
12.3 End
point
detectors 3
12.3.1
Verity
EP200
end
point
kit
(100-12-72/01) 3
12.3.2
Verity
EP200
optional
spares 3
12.3.3 Sofie
integrated
laser
end
point
kit
(81-12-86) 4
12.3.4 Sofie
integrated
laser
optional
spares 4
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Section 12 Page 1
of
6
Accessories
Plasma
lab
System
100
(ICP180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
12.1
Heaters/chiIlers
Heater
chiller
various
options
OIPT Part No. DescriPtion
81-12-18
CU500 HEATER CHILLER 240V
50Hz
81-12-18/1 CU500 HEATER CHILLER 208V
60Hz
81-12-19 CU500 DIGITAL HEATER/CHILLER 240V 50Hz
81-12-19/1
CU500 DIGITAL HEATER/CHILLER 208V
60Hz
81-3-18/1
CU500 HEATER CHILLER 208V
60Hz
G/WTR/SUN/520
CU500 818S DIGITAL +
FILTER
KIT 240V
50Hz
G/WTR/SUN/521
CU500 818S DIGITAL +
FILTER
KIT 208V
60Hz
GIWTR/SUN/550
CU500 HEATER/CHILLER (+ACU006)
G/WTR/SUN/551
CU500 FAN
MOTOR
PT.
No. 500-5
12.2
Heater/chiller
option
spares
OIPT
Part
No.
Qtv
Description
GIWTR/SUN/502
1 PUMP HEAD
FOR
CU500
GIWTR/SUN/503
1 PUMP
MOTOR
FOR
CU500
GIWTRlSU
N/OO
7
CORROSION INHIBITOR 3 x 5 L
TR
PACK
GIVAC/OIU905
1 VAC
GREASE
SILICONE
GIWTR/SUN/801
1 WATER
FILTER
UNIT MCY4463EG
Accessories
Section
12
Page 2
of
6
Issue
2:
November
02
Printed: 16-Jan-06,15:55