Oxford-100-Manual.pdf - 第15页

Health and Safety Oxford Instruments Plasma Technology Plasma lab and lonfab 1.2 Hazard Categories Hazards and associated warnings relevant to Health and Safety which appear in the text of this manual and in this section…

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Plasmalab
and
lonfab
1.1
Introduction
Oxford
Instruments
Plasma
Technology
Health and Safety
1.1.1
This section must be read and
understood
before
the
system
is
approached
or
operated
and
before
any maintenance
work
is
carried out.
It
is
a
requirement
that
procedures and practices
taught
in
Oxford
Instruments Plasma
Technology
training
courses are
followed.
If
the
equipment
is
used
in
a
manner
not
specified by
Oxford
Instruments Plasma Technology,
the
protection
provided
by
the
equipment
may be impaired.
Please read this section carefully, and
note
that
certain aspects
of
the
system can produce
more
than
one
hazard (e.g. process gases can be a
fire
hazard and a toxic hazard).
Some safety features are
fitted
to
guard
against
more
than
one
hazard. In particular,
note
that
some
view
ports must
guard
against UV
light
emission (sub-section 1.3.3, page 1-6),
RF
energy
emission (sub-section 1.3.2, page 1-5) and must
be
fitted
with
implosion guards.
Note
that
this
document
is
standardised and may contain warnings,
which
are
not
relevant
to
your
particular
system.
Warnings
and
Cautions
Throughout
this manual WARNINGS are inserted in
the
text
to
draw
the
reader's
attention
to
hazards. Failure
to
comply
with
a WARNING could result in
death
or
serious injury. A
typical
warning
is
shown below:
HOW
TO
AVOID
THE HAZARD
:Any
work
rec,ulring
the
removal
of
covers
or
panels
mu
stan
iy
be
performed-by
autiiorised"
I
I
personnel
who
are aware
of
the
hazards involved. :
I
I
Before
removing
any
covers
or
panels,
power
down
the
system
then
carry
out
the
lock
out
I:
: tag
out
procedure
detailed
in
Section
6.
I
~------------------------------\----------------------~
PICTORIAL SHOWING THE \
HAZARD CATEGORY GRAPHICALLY
Throughout
this manual CAUTIONS are inserted in
the
text
to
draw
the
reader's
attention
to
situations and procedures,
which
could cause damage
to
the
equipment.
A typical CAUTION
is
shown
below:
CAUTION
Upper
electrodes
can
become
contaminated
from
finger
marks
etc.
When
working
on
the
upper
electrodes,
ensure
that
powder-free
cleanroom
gloves
are
worn.
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11:
August
2004
Health and Safety
Page 1-2
of
18
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2005, 06:31
Health
and
Safety
Oxford
Instruments
Plasma
Technology
Plasma
lab
and
lonfab
1.2
Hazard
Categories
Hazards
and
associated
warnings
relevant
to
Health
and
Safety
which
appear
in
the
text
of
this
manual
and
in
this
section
will
fall
into
the
following
categories:
a)
Electrical
(sub-section
1.3.1,
page
1.4)
b)
Electromagnetic
Radiation
(sub.section
1.3.2,
page
1.5)
c)
Light
(sub-section
1.3.3,
page
1·6)
d)
High
Temperature
(sub.section1.3.4,
page
1.7)
e)
Low
Temperature
(sub.section
1.3.5,
page
1.7)
f)
Gases
(sub-section
1.3.6,
page
1-8)
g)
Materials
(sub.section
1.3.7,
page1-10)
h)
Process Chemicals
(sub-section
1.3.8,
page
1.12)
The system carries voltages
high
enough
to
cause
death
or
serious
injury. Even
when
the
electrical
power
supply
is
isolated, electrical
energy
at
dangerous levels
is
stored
by
capacitors.
Parts
of
the
system produce electromagnetic
radiation
from
audio
frequencies
to
2.45
GHz.
This
radiation
can have a
field
strength
strong
enough
to
cause
death
or
injury
if
not
properly
shielded.
Ultra
Violet
(UV)
or
Laser
light
may be
emitted
in some systems.
These can cause
permanent
damage
to
the
eyes
or
blindness
if
not
protected
by
the
relevant shields
or
filters.
Some components run
at
a
temperature
high
enough
to
cause severe
burns.
Components and
gases
at
very
low
temperatures can
cause
severe
'burns'
if
allowed
to
contact
the
skin.
Some process gases and cleaning
fluid
vapour
may be toxic, corrosive,
carcinogenic
or
flammable. They may also cause asphyxiation
through
oxygen deprivation.
Gases
under
pressure can,
if
applied
to
the
body,
enter
it
and cause
death
or
serious injury.
Some materials used in
the
system can become toxic
during
use.
If
this happens,
then
great
care must be
taken
during
maintenance
to
prevent
death
or
serious injury.
Some etching and deposition compounds are toxic
during
use,
and
can leave toxic residues in
the
system.
i)
j)
k)
I)
Vacuum
(sub-section
1.3.9,
page
1.12)
Compressed
Air
(sub-section
1.3.10,
page
1-13)
Mechanical
(sub.section
1.3.11,
page
1.13)
General
(sub-section
1.3.12,
page
1-14)
Chambers
or
other
components
under
partial vacuum represent
stored energy,
which
can cause
injury
if
released carelessly.
Compressed
air
can
enter
the
body
through
the
skin and cause
serious injury. Pneumatically
operated
system components can be
actuated suddenly, even
when
the
system
is
not
operating,
causing
serious injury.
Injury
can be caused
by
heavy components, sprung components,
deposition layers
under
stress,
embrittled
wire
and machinery in
motion.
Various procedures must be studied and
followed.
These include
procedures specific
to
the
system in question and also local and
national
Health and Safety standards.
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Health
and
Safety
Page 1-3
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18 Issue 11:
August
2004
Plasma
lab
and
lonfab
Oxford
Instruments
Plasma
Technology
Health and Safety
1.3
1.3.1
Specific Hazards
Electrical
WARNING
HAZARDOUS
VOLTAGE·
CONTACT CAN CAUSE DEATH, SEVERE INJURY
OR
BURNS
Any
work
requiring
the
removal
of
covers
or
panels
must
only
be
performed
by
authorised
personnel
who
are
aware
of
the
hazards
involved.
Before
removing
any
covers
or
panels,
power
down
the
system
then
carry
out
the
lock
out
I
tag
out
procedure
detailed
in
Section
6.
1.3.1.1 Parts
of
the
system carry
high
voltages,
which
are capable
of
causing
injury
or
death.
Take
great
care
when
carrying
out
maintenance tasks.
1.3.1.2 Do
not
operate
the
system
if
any
of
the
doors, panels
or
covers are removed. Parts
of
the
system may still be 'live' even
when
shut
down
by
a switch,
blown
fuse
or
control
function.
Note
that
the
system
POWER
OFF
button
does
not
isolate
the
main
distribution
panel.
1.3.1.3 Ensure
that
all system units are connected
to
electrical
earth
(ground). For details
of
the
required
electrical installation,
refer
to
the
'Services Specifications
for
Plasma
lab
and
lonfab
systems'
document
which
is
included
at
the
rear
of
this
manual's binder.
1.3.1.4
During
troubleshooting
and calibration,
the
power
supplies may need
to
be
connected
with
live components exposed. This
work
must
only
be
carried
out
by
skilled
personnel
who
are
aware
of
the
hazards
involved.
1.3.1.5 Ensure
that
all safety interlocks are tested
before
the
system
is
used
for
the
first
time
and
at
scheduled intervals
thereafter.
These
tests
must
be
carried
out
by
suitably
qualified
personnel.
1.3.1.6 Inspect
the
system
regularly
for
damaged components, e.g. cables, connectors
or
switches.
Any
components
found
damaged must be replaced
before
continuing
to
operate
the
system. Refer
to
the
instructions in
the
maintenance
section
of
this
manual
for
details
of
any
particular
tests
of
the
cables
that
may be required.
1.3.1.7
If
any
water
leaks are detected,
immediately
switch
the
system
off
at
the
main
incoming
circuit
breaker.
1.3.1.8 No servicing
is
to
be carried
out
unless all personnel involved
fully
understand
the
danger
of
stored electrical energy. Refer
to
the
lock
out
I
tag
out
procedure
detailed
in Section
6.
Issue
11:
August
2004
Health and Safety
Page 1-4
of
18
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May
2005. 06:31