Oxford-100-Manual.pdf - 第349页

Plasma lab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue Item OIPT Part No. Qty Description MAOOA20102 1 LOADLOCK ASSV. 46 x 236 mm VAT VALVE 1 G/SUN/CAB/942 1 HAND KNOB (M6) DIA. …

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Plasma
lab
System 100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
10.1
Automatic
load
lock
(100-10-0SC)
(:'if
+
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Wafer
Handling
Section 10 Page 2
of
6
Issue
2:
November 02
Printed: 16-Jan-06, 15:55
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
Item
OIPT
Part
No.
Qty
Description
MAOOA20102 1 LOADLOCK ASSV.
46
x
236
mm
VAT VALVE
1 G/SUN/CAB/942 1
HAND
KNOB
(M6)
DIA.
30
mm
2
MDOOD20785 1
LOADLOCK PROTECTIVE
WINDOW
3 MDOOC17683 1 VIEW PORT CLAMP PLATE
4
MD90D12788
1
WINDOW
GASKET
5
MD90D12789
1
WINDOW
GLASS
6
MDOOA21658
1
LOADLOCK HINGED LID
7
G/SELIO-V/279C
1 3.5 x 329.8
mm
VITON
'0'
RING BS279C
8
GNAC/FITI/927
1
ROTARY FEEDTHRO. (8
mm
SHAFT)
9
MDOOC17699
1 DRIVE PULLEY
10
G/SUN/BELl013 1
SIS
BELT
6.35W
x 0.075THK x 731LG
11
G/SUN/BRG/904
1 MINIATURE
LM
GUIDE
TYPE
HRW 14
12
MDOOD20183
4 PILLAR
13
MD91C17754
1
SUPPORT
PLATE
14
MDOOD180027
1 LOADLOCK
PCB
MOUNT
15 MDOOA20103
1 LOADLOCK CHAMBER 46 x 236
mm
VAT
VALVE
16
G/SUN/BRG/903
1 MINIATURE
LM
GUIDE
TYPE
HRW
12
17 MDOOB20814
1
LOADLOCKNALVE INTERFACE 2-RINGS
18
G/SELIO-V/263C
1
3.5 x 196.4
mm
VITON
'0'
RING BS263
19
G/SELlO-
V
1269C
1 3.5 x 221.85
mm
VITON
'0'
RING 200-269
20
MDOOD17695
1
LOWER FRONT PULLEY
MOUNT
21
MDOOD20146
1 END
EFFECTOR
PLATE
2.2.
Kq
S/ST
22
MDOOC20145
1 END
EFFECTOR
2.2. Ka
S/ST
RATE
23 MDOOD17698
3
DRIVEN PULLEY
24 MDOOD17744
1 LOWER CARRIAGE
BELT
CLAMP
25 MDOOC20253
1
UPPER
RAIL
SUPPORT
26 MDOOD17693
1
UPPER
REAR
PULLY
MOUNT
27 G/SUN/BELl012
1
SIS
BELT
6.35W
x 0.075THK x 641LG
28
MDOOD17696
3
PULLEY BEARING CLAMP
29 MDOOB21657
1
LOADLOCK TOP COVER
30
MDOOD17701
1 LOWER CARRIAGE END
STOP
31
MDOOD23696
2
HINGE BLOCK
32 MDOOC23711
2
LID - HINGE PIN FIXING
33
G/SELIO-V/260C
1 3.5 x 164.7
mm
VITON
'0'
RING BS260C
*
MAOOZ17834
1 LOADLOCK MOTOR CONTROL ASSEMBLY
*
G/SUN/GERlO09C
1
SERVO
MOTOR 24VDC RS.718-981
*
EMM0025
1
PRECISION
DC
M/GEARBOX 640:1
*
GNAC/GGEI/005 1 ACT. PIRANI
GGE
APG-L-NW16
*
GNAC/GGEI004 1
ACT. INVERT
MAG
GGE
AIM-V-NW25
G/SELlO-
V
1280C
1
3.5 x 355.2
mm
VITON
'0'
RING BS280 - NOT SHOWN -
FITS
BETWEEN ITEMS 15
AND
28
G/SELIO-V/264C
1
3.5. x 190.1
mm
VITON
'0'
RING BS264 - NOT SHOWN -
FITS
BETWEEN ITEMS
15
AND
17
G/SUN/BRG/050
3
4 PNT CONT'T
BRG
1"
'ID x
1.375'
OlD - NOT SHOWN -
FITS
ON EACH ITEM 22
MDOOD17674 1
10
PIN
SEAL BODY - NOT SHOWN
MDOOD17702
1
UPPER
CARRIAGE END
STOP
- NOT SHOWN
MDOOD17745 1
UPPER
CARRIAGE
BELT
CLAMP - NOT SHOWN
ESZ9017 1 MICROSWITCH 331-405 - NOT SHOWN
EIQ0055C 1 OPTO
SENSOR
SLOnED
TRW - NOT SHOWN
MDOOD18027 1 MICROSWITCH PLUNGER - NOT SHOWN
MDOOD18042 1 MICROSWITCH ACTUATOR - NOT SHOWN
MD91D17505
4 LOCATION
PIN
- NOT SHOWN
*
SEE
PHOTOGRAPH ON FOLLOWING
PAGE
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Section
10
Page 3
of
6
Wafer
Handling
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments Plasma Technology
LOAD
LOCK
(underside view)
Illustrated Parts Catalogue
Precision motor gearbox 640:1
(EMM0025)
Act. Pirani GGEAPG-L-NW16
(GNAC/GGEl005)
Servo motor 24VDC RS.718-981
(MAOOZ17834)
II
ATP 80Turbo kit
(ATP80)
Wafer
Handling
Load lock motor control assy
(MAOOZ17834)
Nitrogen purge valves
(GW0012)
Section 10 Page 4
of
6
Act. invert mag GGE AIM-V-NW25
(Penning) (GNAC/GGEl004)
/
/
/
/
Turbo vent valve
(GNACNLV/125)
Issue
2:
November 02
Printed: 16-Jan-06. 15:55