Oxford-100-Manual.pdf - 第208页

PlasmalabSystem 100 Oxford Instruments Plasma Technology Installation Data Optional stand ~ 480 ----- _-_._-- 1300 Issue 5: June 05 Fig 7: 6-line gas pod mounted on optional free-standing frame Installation Data OCP 180)…

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Installation Data
Oxford
Instruments
Plasma
Technology
PlasmalabSystem100
4. Gas
handling
IMPORTANT OIPT gas pods
typically
weigh
>40kg.
If
you
intend
fixing
your
gas
pod
to
a
wall,
ensure
the
wall
and
gas
pod
fixings
are
sturdy
enough
to
bear
at
least
four
times
the
weight
of
the
gas
pod.
Periodically,
e.g.
annually,
check
the
gas
pod
and
its
fixings
are
secure.
NOTES:
1) MAXIMUM DISTANCE OF
GAS
POD FROM MAIN UNIT IS
3 METRES
2)
ALL
GAS
LINES
ARE
1/4"
STAINLESS
STEEL
TUBE,
PROTRUDING
160
mm
FROM POD FOR WELDING
3)
CLEAN
GAS
LINE
CAN
BE
MFC CONTROLLED (THIS
WILL
OCCUpy
ONE
GAS
LINE
POSITION)
CONTROL
CABLE
TO
MAIN UNIT
(3 METRES LONG)
9mm
Diameter
L.--_f_o".r
M",-S
-,sc;;:,r...,ew".-s
--,
75
'1'
sol~(----:-:C~--J>I
440
Location
of
fixing
holes
Printed: 22-Mar-06. 6:57
600
Fig 6: 6-line gas
pod
Installation Data
(ICP
180)
Page11of18
EXTRACTION
COLLAR
GAS
OUT
TO SYSTEM
GAS
LINE 1
(SEE NOTE 2)
<0
IN
<0
OUT
'\
COMPRESSED
AIR
(4mm
PUSH-FIT)
Issue
5:
June
05
PlasmalabSystem
100
Oxford
Instruments
Plasma Technology
Installation Data
Optional
stand
~
480
-----
_-_._--
1300
Issue
5:
June 05
Fig
7:
6-line gas
pod
mountedon optionalfree-standing
frame
Installation Data
OCP
180)
Page 12
of
18 Printed: 22-Mar-06. 6:57
Installation Data
Oxford
Instruments
Plasma
Technology
PlasmalabSystem100
T"
GAS INLET
LINES
20
-SECONDARY GAS OUTLET
LINE
TO
SYSTEM (ONLY
USED IF A SPLIT MANIFOLD
ISFITIED)
LOCATION OF FIXING HOLES,
EACH 6.6
mm
DIAMETER
o
PRIMARY GAS
OUTLET LINE TO
SYSTEM
/
I iY."
--
..
'r-
-
-----.-.--
----.--..
,
I i
I
1 i
~1~~W~~1
~~s
rt---------
....
---+
1246
STAINLESS STEEL '
i 1
TUBE FOR WELDING 623 i i
~~X~:::ER'S"lJ
L--1
..
CONTROLLED t
~......
606
-c>I
(THIS
WILL
OCCUpy
ONE GAS LINE
POSITION)
100
100
mm
DIAMETER
EXTRACTION COLLAR
~
t===~
EARTH (GROUND)
TERMINAL BLOCK
1286
ENTRY GLANDS FOR
COMPRESSED AIR PIPE
AND ELECTRICAL CABLES
(CONTROL
CABLE
TO MAIN
UNIT IS 3 METRES LONG)
Fig 8: I2-line gas
pod
Printed: 22-Mar-06. 6:57
Installation
Data
(ICP
180)
Page 13
of
18
Issue
5:
June
05