Oxford-100-Manual.pdf - 第231页
System Manual 5. Nitrogen Oxford Instruments Plasma Technology OIPT Systems Nitrogen is required to vent and purge process chambers, load locks and pumps. il====::::r- " \ I \ I \ " 1/4" SWAGELOK CONNECTOR…
OIPT
Systems
Oxford
Instruments
Plasma
Technology
System Manual
4.1
Mandatory
Specifications
for
compressed
air
supplies
•
Inlet
pressure
to
filter/mist
6
bar
(90
psig)
minimum.
separator/re~ulator
unit:
OUTLET
TO
SYSTEM:
•
Oil
content:
Less
than
10
ppm
•
Maximum
Moisture
Content:
·3°C (25°F)
•
Filtration:
Maximum
particle
size
of
0.3
microns
•
Regulator
outlet
pressure:
Adjustable
from
3
bar
to
6
bar
(45
psig
to
90
psig).
6
bar
must
be
the
maximum
provided.
•
Maximum
flow
rate:
135
litres/minute
(5
scfm).
•
Pressure
monitoring:
o
to
10
bar
(0
to
150
psi)
pressure
gauge.
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16:
April
05
Services Specifications
Page 12
of
22 Printed: 6-Jan-06. 8:44
System
Manual
5.
Nitrogen
Oxford
Instruments
Plasma
Technology
OIPT Systems
Nitrogen
is
required
to
vent
and
purge
process chambers, load locks and pumps.
il====::::r-
"
\
I
\
I
\
"
1/4"
SWAGELOK
CONNECTOR
REGULATOR
OT01SLM
FLOW CONTROL
ROTAMETER
(IF REQUIRED)
TO
PLASMALAB
t
ORIONFAB
I SYSTEM
1
TOPUMP
PURGE
CONNECTOR
Fig 5.1: Recommendednitrogen supply installation
Semiconductor
grade
fittings
and pressure regulators,
together
with
electropolished stainless
steel
tube
must
be used
to
ensure
that
gas
quality
is
not
degraded. Purges
to
turbo
pumps are
supplied
by
DIPT
as
part
of
the
system. The customer
will
usually need
to
fit
a
purge
to
the
rotary
pump.
See
below.
5.1
Mandatory
specifications
for
Nitrogen
supplies
•
Pipework
fittings
and
Semiconductor
grade
pressure reQulators:
•
Gas
handling
tubing:
Electropolished stainless steel
•
Purity:
At
least
99.99%
or
higher
to
satisfy process
reQuirements.
•
Filtration:
2
micron
filter
mounted
adjacent
to
the
system.
•
ReQulation:
0.5
to
5
bar
(7.5
to
75
psig)
•
Minimum
pressure
at
input
3
bar
(45
psig).
Certain
pumps,
for
example
to
system:
Edwards
Drystar
pumps,
may
need
up
to
5
bar
(75psig)
to
ensure
satisfactory
purging.
Check
with
the
vendor's
instructions.
•
Rotary
pump
purging
It
is
the
customer's
responsibility
to
ensure
that
a
rotary
pump
purge
connection
is
fitted
and
used correctly. This is
needed
to
ensure
the
protection
of
the
pumping
system
from
the
customer's
process,
and
may
also
be
required
by
local
safety
regulations.
Because customers'
requirements
vary,
components
are
not
supplied
automatically
by
OIPT. Kits
of
parts
are
available
if
required.
Contact
OIPT
for
further
information.
It
may
be
safe
to
omit
this
feature
on
certain
systems, such
as
lonfab
machines
running
inert
gas processes.
However,
unless
the
customer
has
written
agreement
on
this
point
from
OIPT,
any
damage
caused
by
the
omission
cannot
be
covered
by
the
system
warranty.
Printed: 6-Jan-06. 8:44
Services Specifications
Page
13
of
22
Issue
16:
April
05
OIPT
Systems
Oxford
Instruments
Plasma
Technology
System
Manual
6.
Process
gases
I====+-....
REGULATOR 0.5
BAR
TO 5
BAR
.......
(7
TO 75 PSIG) LOCATED
.......
ADJACENT TO THE SYSTEM
'
............
,
"-
'---~
/
SUPPLY
TO
GAS POD
OR INTERNAL
GAS LINE
MINIMUM PRESSURE
3
BAR
(45 PSIG)
-
NOTES:
ALL
TUBING TO BE
ELECTROPOLISHED
STAINLESS STEEL
ALL
FITTINGS,
REGULATOR AND
FILTER TO BE
SEMICONDUCTOR
GRADE
6.1
6.1.1
Fig 6.1: Recommendedprocessgas supply installation
Semiconductor
grade
fittings
and pressure regulators,
together
with
electropolished stainless
steel
tube
must be used
to
ensure
that
gas
quality
is
not
degraded.
Mandatory
specifications
for
process
gas
supplies
•
Pipework
fittings
and
pressure
Semiconductor
grade
re~ulators:
•
Gas
handlin~
tubin~:
Electropolished
stainless
steel
•
Purity:
At
least
99.99%
or
higher
to
satisfy
process
requirements.
•
Filtration:
A
2-micron
filter
is
fitted
to
each
gas
line
supplied
as
part
of
the
system.
For
other
grades
of
filter,
please
consult
OIPT.
•
Regulation:
0.5
to
5
bar
(7.5
to
75
psig)
•
Minimum
pressure
at
input
to
system:
2
bar
(30
psi~)
Systems
using
Helium
wafer
cooling
The specifications
for
the
Helium gas supply are
as
for
those
of
the
process gases given in sub-
sections 6 and
6.1
with
the
exception
that
the
maximum
pressure
at
the
inlet
to
the
pressure
controller
must
not
exceed
3.5
bar
(43
psig).
The design
of
the
Helium
pressure
controller
is
such
that
it
can
be
destroyed
by
higher
pressures.
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16:
April
05
Services Specifications
Page 14
of
22
Printed: 6-Jan-06, 8:44