Oxford-100-Manual.pdf - 第339页

Plasmalab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue Item No. OIPT Part No. Qty Description 1 MA81D15070 1 MANIFOLD GAS OUT PIPE 2 MA81D14783 1 GAS CONNECTION LINE 3 81-9-31 1 C…

100%1 / 362
Plasmalab System 100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
9.1
6-line
gas
pod
(81-9-51)
CD
I
Gas
Handling
Section 9 Page 2
of
10
Issue
2:
November 02
Printed:
16-Jan-06, 15:55
Plasmalab System 100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
Item
No.
OIPT
Part
No.
Qty
Description
1
MA81D15070
1
MANIFOLD
GAS
OUT
PIPE
2
MA81D14783
1
GAS CONNECTION LINE
3
81-9-31 1 CLEAN GAS LINE
(SEE
SUB-SECTION 9.5)
4
MA81Z16003
1 GAS POD CHAMBER A
OR
B INTERFACE
PCB
5
G/AIRIVLV/506 1
6
WAY
SMC
ASSY.
SPASBR06
6
ESZ9102
1 DOOR INTERLOCK MICRO-SW
SPDT
7
G/AIRIVLV/501
1
SINGLE
SMC
ASSY.
SPASBR01
8
81-9-11
1 NON-TOXIC GAS LINE
(SEE
SUB-SECTION 9.3)
9
81-9-21
1 TOXIC GAS LINE
(SEE
SUB-SECTION 9.4)
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Section 9 Page 3
of
10
Gas
Handling
Plasmalab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
9.2
12-line
gas
pod
(81-9-61)
7
PCB1 PCB2 PCB3
Gas Lines Gas Lines Gas Lines
1-4 5-8 9-12
Gas
Handling
Section 9 Page 4
of
10
0)
I
Programmable Logic
Controller
See Sub-section 0.4
Issue
2:
November
02
Printed: 16-Jan-06.15:55