Oxford-100-Manual.pdf - 第324页

Plasma lab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 6.3 AMU control panel AMU CONTROL PANEL ASSY (1) Sw1 (2) Sw2, 3 (3) LCD1, LCD2 (2) Sw6, 7 (1) Sw5 I (4) Rv1, Rv2 (6) Sw4 (5…

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Plasmalab System 100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
ICP180 FLOAT TOP ASSV.
ALUMINA
(100-6-S6)
OIPT
Part
No.
UGEN/RFG/104
MAOOZ23828
MAOOB23328
Description
AE RFG3001
208V
3ph
(BLACK BOX)
RF
GENERATOR
AUTOMATCH
ASSEMBLY
AMU
CONTROL PANEL ASSY
6.2
Automatch
assembly
-
vac
cap
(MAOOZ23828)
Item
OIPT
Part
No.
Qty
Description
1 ERU0511 2 TRIMPOT
100K
(3006)
SERIES
2
ECCOO01
4
CAPACITIVE
FEED
THRU
10.000
of
3
EPPOO05
1 SOCKET G15007H
RR
N CHAS.
(RF
INLET)
4 MAOOD23738 2
MOTOR
& GEARBOX ASSEMBLY
5
MAOOZ20138 1
AMU
CONTROL
PCB
ASSY
6
EFA0460C
3
FAN
AXIAL
60 x 60 x 25.4 24
Vdc
7 EFA1062 3
FAN FINGER GUARD
60/62
8
UCAPIV
AR/110 1
VACUUM
CAPACITOR
1000pf
9
UCAPIVAR/1
06
1
VACUUM
CAPACITOR
500pf
10
MAOOD23772 1 COOLING RING ASSEMBLY
11
MDOOD21224 1
500pf
VACUUM
CAPACITOR INSULATOR
12 MDOOD19398 1
RF
OUTLET
MOUNT
13
MAOOZ18209 1
AMU
SENSE
PCB
ASSY
14 ELZ0015C 2
FERRITE
CUBE
FX-3854
15 MDOOD21243 1 CONDUCTOR
16
MDOOD21242 1 INSULATOR
17 MDOOD22225 2 MODIFIED GEAR
18
MDOOD21224
1
1000pf
VACUUM
CAPACITOR DRIVE ADAPTOR
19
RITUB/PTF
1030
%"
ODX
x 3/16" ID
PTFE
TUBE
Issue 2:
November
02
Printed: 16-Jan-06.15:55
Section
6 Page 5
of
8
RF
Supplies
and
Automatch
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
6.3
AMU
control
panel
AMU CONTROL PANEL ASSY
(1)
Sw1
(2) Sw2, 3 (3) LCD1, LCD2
(2) Sw6, 7
(1) Sw5
I
(4) Rv1, Rv2 (6) Sw4 (5) Sw8 (4) Rv3, Rv4
Note - AMU control panel PCB
assy
- attached to rear
of
panel
Item
OIPT
Part
No.
Qtv
Description
1 ES13l02C 2 SW1, SW5
2 ESTl122C 4
SW2,SW3,SW6,
SW7
3
EDM0200 2 LCD1, LCD2
4 ERU0417C 4 RV1,RV2, RV3,RV4
5
ESMOlll
1 SW4
6
ES13204 1 SW8
7 MAOOZ23250 1
OPT
AMU
CONTROL PANEL
PCB
ASSY
RF
Supplies
and
Automatch
Section 6 Page 6
of
8
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Plasmalab System 100
(ICP
180)
6.4
RF
generators
Oxford
Instruments
Plasma
Technology
VI
EW
FROM
REAR
Illustrated Parts Catalogue
AE RFX600A 230V (passive panel)
RF
Generator (UGEN/RFG/101)
AE RFG30001 208V 3ph (black box)
RF
Generator (UGEN/RFG/104)
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Section 6 Page 7
of
8
RF
Supplies and
Automatch