Oxford-100-Manual.pdf - 第323页
Plasmalab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue ICP180 FLOAT TOP ASSV. ALUMINA (100-6-S6) OIPT Part No. UGEN/RFG/104 MAOOZ23828 MAOOB23328 Description AE RFG3001 208V 3ph (…
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
(2) Capacitive (3)
RF
inlet
(1)
Trimpots
feed
through
100k
(2
off) (4
off)
(7) Fan Finger Guard
(6) Fan
ICP180 AUTOMATCH ASSEMBLY EXTERNAL VIEW
(4)
DC
motor
and
gearbox
assy
-----
(5) AMU Control PCB
(19) PTFE
tube
(17) Modified
gear
(16)
Insulator
(15)
Conductor
(inside
insulator)
(14) Ferrite
cube
(13) AMU
sense
PCB
(8) 1000pf
vacuum
capacitor
(9) 500pf
vacuum
capacitor
(10)
Cooling
ring
assembly
(11) 500pf
capacitor
insulator
(12)
RF
outlet
mount
ICP180 AUTOMATCH ASSEMBLY INTERNAL VIEW
RF
Supplies
and
Automatch
Section 6 Page 4
of
8
Issue
2:
November 02
Printed: 16-Jan-D6, 15:55
Plasmalab System 100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
ICP180 FLOAT TOP ASSV.
ALUMINA
(100-6-S6)
OIPT
Part
No.
UGEN/RFG/104
MAOOZ23828
MAOOB23328
Description
AE RFG3001
208V
3ph
(BLACK BOX)
RF
GENERATOR
AUTOMATCH
ASSEMBLY
AMU
CONTROL PANEL ASSY
6.2
Automatch
assembly
-
vac
cap
(MAOOZ23828)
Item
OIPT
Part
No.
Qty
Description
1 ERU0511 2 TRIMPOT
100K
(3006)
SERIES
2
ECCOO01
4
CAPACITIVE
FEED
THRU
10.000
of
3
EPPOO05
1 SOCKET G15007H
RR
N CHAS.
(RF
INLET)
4 MAOOD23738 2
MOTOR
& GEARBOX ASSEMBLY
5
MAOOZ20138 1
AMU
CONTROL
PCB
ASSY
6
EFA0460C
3
FAN
AXIAL
60 x 60 x 25.4 24
Vdc
7 EFA1062 3
FAN FINGER GUARD
60/62
8
UCAPIV
AR/110 1
VACUUM
CAPACITOR
1000pf
9
UCAPIVAR/1
06
1
VACUUM
CAPACITOR
500pf
10
MAOOD23772 1 COOLING RING ASSEMBLY
11
MDOOD21224 1
500pf
VACUUM
CAPACITOR INSULATOR
12 MDOOD19398 1
RF
OUTLET
MOUNT
13
MAOOZ18209 1
AMU
SENSE
PCB
ASSY
14 ELZ0015C 2
FERRITE
CUBE
FX-3854
15 MDOOD21243 1 CONDUCTOR
16
MDOOD21242 1 INSULATOR
17 MDOOD22225 2 MODIFIED GEAR
18
MDOOD21224
1
1000pf
VACUUM
CAPACITOR DRIVE ADAPTOR
19
RITUB/PTF
1030
%"
ODX
x 3/16" ID
PTFE
TUBE
Issue 2:
November
02
Printed: 16-Jan-06.15:55
Section
6 Page 5
of
8
RF
Supplies
and
Automatch
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
6.3
AMU
control
panel
AMU CONTROL PANEL ASSY
(1)
Sw1
(2) Sw2, 3 (3) LCD1, LCD2
(2) Sw6, 7
(1) Sw5
I
(4) Rv1, Rv2 (6) Sw4 (5) Sw8 (4) Rv3, Rv4
Note - AMU control panel PCB
assy
- attached to rear
of
panel
Item
OIPT
Part
No.
Qtv
Description
1 ES13l02C 2 SW1, SW5
2 ESTl122C 4
SW2,SW3,SW6,
SW7
3
EDM0200 2 LCD1, LCD2
4 ERU0417C 4 RV1,RV2, RV3,RV4
5
ESMOlll
1 SW4
6
ES13204 1 SW8
7 MAOOZ23250 1
OPT
AMU
CONTROL PANEL
PCB
ASSY
RF
Supplies
and
Automatch
Section 6 Page 6
of
8
Issue
2:
November
02
Printed: 16-Jan-06, 15:55