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System Manual Oxford Instruments Plasma Technology Plasma lab and lonfab 2 Maintenance for Alcatal ATP/ACT Turbo pumps 2.1 Re-greasing of turbo pumps fitted to process chambers The following instruction applies to conven…

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Plasma
lab
and
lonfab
Oxford
Instruments
Plasma
Technology
System Manual
1
Maintenance
for
all
Turbo
Pumps
Please
note
that
premature
failure
of
Turbomolecular
Pumps can be caused by
failing
to
observe
the
following
recommendations:
a)
Always
follow
the
maintenance and
operating
instructions
contained
in
the
manufacturers' manuals, copies
of
which
are
provided
within
the
system manuals.
Note
that
with
some types
of
pump
the
lubricant
should be replaced
when
the
total
running
time
reaches 500 hours.
b)
When
corrosive process gases are
being
used always
purge
the
turbo
pump
with
dry
nitrogen
during
a processing run.
If
the
process chamber
is
to
be
vented
adequate
time
must
first
be
allowed
for
the
process gases
to
be
pumped
away.
c)
If
corrosive process gases are used
in
a system
with
no
gate
valve
between
the
turbo
pump
and
the
process chamber and
the
system
is
to
be
left
for
more
than
one
hour
with
the
turbo
pump
not
running,
proceed
as
follows:
1)
Turn
off
all
the
manual gas taps
on
the
process gas lines. Also
turn
off
the
gas taps on
the
process gas cylinders.
2)
Close
the
chamber
door.
3)
Pump
the
process chamber and
turbo
pump
down
to
approximately
1 x 10-
4
millibars.
4)
Vent
the
process chamber and
turbo
pump
to
atmospheric pressure
with
dry
nitrogen.
Do
not
allow
the
chamber
door
to
open.
5)
Repeat Steps 3 and 4
three
times.
6)
Seal
the
process chamber and
turbo
pump.
d)
If
corrosive process gases are used in a system
with
a
gate
valve
between
the
turbo
pump
and
the
process chamber and
the
system
is
to
be
left
for
more
than
one
hour
with
the
turbo
pump
not
running,
proceed
as
follows:
1)
With
the
exception
of
the
Argon
and
Nitrogen
lines,
turn
off
all
the
manual
gas taps on
the
process gas lines and also
turn
off
the
gas taps on
the
process
gas cylinders.
2)
Close
the
chamber
door.
3)
Run a 'process' sequence
(without
any samples loaded) using
only
Argon
or
Nitrogen
as
process gases
for
at
least 10 minutes.
4)
Vent
the
process chamber and
vent
the
turbo
pump
to
atmospheric pressure
with
dry
nitrogen.
Do
not
allow
the
chamber
door
to
open.
5)
Pump
the
process chamber and
the
turbo
pump
down
to
1 x
10-
4
millibars
and
then
vent
them
with
dry
nitrogen.
6)
Repeat Step 5
three
times.
7)
Seal
the
process chamber and
the
turbo
pump.
Issue
3:
June 02
Operation
and
Maintenance
of
Turbo Pumps
Page 2
of
4
Printed: 21-Dec-04, 13:44
System
Manual
Oxford
Instruments
Plasma
Technology
Plasma
lab
and
lonfab
2
Maintenance
for
Alcatal
ATP/ACT
Turbo
pumps
2.1 Re-greasing
of
turbo
pumps
fitted
to
process
chambers
The
following
instruction applies
to
conventionally
greased bearing
turbo
pumps, e.g.
the
Alcatel
ATP
series.
It
does
not
apply
to
Maglev
turbo
pumps.
To
prevent
damage
to
turbo
pumps
fitted
to
process chambers, OIPT
strongly
recommends
that
bearing
re-greasing
is
carried
out
periodically
after
every
2500
hours
of
pump
running
time.
Details
of
re-greasing are given in
the
following
sub-section.
2.2
2000
to
8000
hours (3
to
12
months):
pump
relubrication
CAUTION
Failure
to
perform
regular
pump
maintenance
will
result
in
pump
warranty
being
suspended.
Refer
to
the
manufacturer's
manual in
Volume
3
of
this manual.
Alcatel
ATP
series
turbo
pumps are conventional greased bearing pumps. Periodically, these bearings
need
to
be re-greased.
The re-greasing interval depends on a
number
of
factors; Refer
to
the
graph
in
the
Maintenance
section
of
the
manufacturer's manual
to
establish
the
re-greasing interval
for
the
pump
in
your
system.
Remember
that
turbo
pumps
fitted
to
process
chambers
must
be
re-greased
at
2500
hour
intervals.
The re-greasing interval
for
turbo
pumps
fitted
to
load locks and transfer chambers
is
not
so
critical,
therefore
the
manufacturer's
recommendations can be used.
The
ATP
turbo
pumps are supplied
with
series
ACT
intelligent
controllers
which
are menu-driven. The
'SET-UP' menu allows
the
re-greasing interval
to
be set
so
that
a visual
warning
with
an
optional
audible
alarm
is
displayed
at
the
relevant
time.
Note
that
this visual
warning
does
not
require
any action
immediately;
it
only
indicates
that
the
bearing
should be re-greased
at
the
next
available
opportunity.
If
required,
the
visual
warning
and
audible
alarm can be disabled via
the
'SET-UP' menu.
When
the
pumps are supplied,
the
ACT
controller
is
pre-set
with
a 5,000
hour
re-grease interval.
If
the
pumps are
running
continuously,
the
visual re-grease
warning
will
be
automatically
triggered
after
approximately
seven months.
The customer
is
advised
to
use
the
'SET-UP' menu
to
set
the
re-greasing interval
for
the
pump
fitted
to
his
system. Refer
to
the
pump
manufacturer's
manual.
Note
that
this change takes
approximately
five
minutes.
When
the
re-greasing
time
is
reached,
lubrication
is
carried
out
using a pre-loaded syringe
to
apply
a
metered
quantity
of
a specific grease
to
one
point
on
the
bearing. Refer
to
the
pump
manufacturer's
manual. The Alcatel
part
numbers
of
the
syringes are:
Pump
Type
Pre-loaded
Syringe
Part
Number
ATP80 056993
150C/400HPC/900HPC
101924
Printed: 21-Dec-04. 13:44
Operation
and
Maintenance
of
Turbo
Pumps
Page 3
of
4
Issue
3:
June 02
Plasma
lab
and
lonfab
Oxford
Instruments
Plasma
Technology
System
Manual
Note
that
the
grease syringe has a
limited
shelf
life
so
shouldn't
be ordered
from
the
Alcatel service
centre
until
it
is
needed. Alcatel exercises
strict
stock
control
on this
item
to
ensure
that
the
grease
is
always in
good
condition.
Once
the
grease has been
applied
to
the
bearing,
it
needs
to
be
evenly
distributed
around
the
bearing.
This
is
done
automatically
by
using
the
ACT
controller's
'RUNNING IN' menu.
Note
that
the
grease
distribution
takes
approximately
2.5
hours.
Issue
3:
June 02
Operation
and
Maintenance
of
Turbo
Pumps
Page 4
of
4
Printed: 21-Dec-04. 13:44