Oxford-100-Manual.pdf - 第215页

System Manual Oxford Instruments Plasma Technology All OIPT Systems Appendix R Rotameter data 1 Rotameters 2 1.1 Rotameter types 2 1.2 Setting the required purge flow rate 3 1.3 Flow versus scale reading graphs 4 Fig 1: …

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PlasmalabSystem100
Oxford
Instruments
Plasma
Technology
Installation Data
Emergency
Off
I Electrical
24V
Process
line
24V
Chamber
line
Fail
Interlock
Fail
Restore
Fail
Restore
Fail Restore
System/Controller
OFF
Restart
Required
ON ON
RF
Generator
OFF
Powered, NOT
OFF
Powered,
OFF
Powered,
active
NOT active
NOT active
Process
Gases
OFF
Powered, NOT
OFF
Powered,
OFF
Powered,
active
NOT active
NOT active
Automatic
Pressure
CLOSED CLOSED
NO NO
CLOSED
CLOSED
Controller
Valve CHANGE CHANGE
Load lock
Slit Valve
HOLD HOLD
HOLD HOLD HOLD HOLD
Pumps
OFF
Pumps must be NO NO
OFF
Pumps must
restarted
CHANGE
CHANGE
be restarted
Table
2 • Consequences
of
open
circuit
interlocks
The
other
component
specific interlocks are
incorporated
into
the
software
controller,
alerting
the
operator
of
conditions such
as
low
process gas
flow,
pump
failure, etc. The
software
also
monitors
the
position
of
the
wafer
handling
mechanisms, ensuring safe
operation.
9. OIPT locations
worldwide
UK
Oxford Instruments Plasma Technolgy
North End, Yalton,
Bristol,
BS494AP
Tel: +44(0)1934 837000
Fax: +44(0)1934837001
Email: plasma.technology@oxinst.co.uk
Web: www.oxford-
instruments.com/plmchp5.htm
USA
Oxford Instruments Inc.
130A Baker Avenue Extension
Concord, MA 01742
Tel:
+1
9783699933
Toll Free +1800-447-4717
Fax:
+1
9783698287
Email: info@ma.oxinst.com
Germany
Oxford Instruments GmbH
Olto-von-Guericke Ring 10,
0-65205 Wiesbaden
Tel: +49(0)6122 937161
Fax: +49(0)6122937175
Email: plasma@oxford.de
Issue
5:
June 05
Japan
Oxford Instruments
K.K.
2-11-6 Tomioka
Koto-ku, Tokyo 135-0047
Tel: +81-3-5245-3261
Fax: +81-3-5245-4466
Email: oikkpt@oxinst.co.jp
Web: www.oxford-instruments.jp
People's
Republic
of
China (Beijing)
Oxford Instruments China
Room 714, Office Tower
3,
Henderson Center,
No. 18 Jianguomennei Ave,
Dongcheng District,
Beijing 100005
Tel: +86 1065188160/1/2
Fax: +86 1065188155
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
Installation Data
(ICP
180)
Page 18
of
18
People'S
Republic
of
China
(Shanghai)
Oxford Instruments China
Room 14-F,
No.1
Plaza
800 Nanjing East Road
Shanghai 200001
Tel:
+862163608530
Fax:
+862163608535
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
Singapore
Oxford Instruments Pte.
Ltd
371
Beach Road,
#02-07 Keypoint
Singapore 199597
Tel: +65 6337 6848
Fax: +65 6337 6286
Email: oipt.sales@oxford-
instruments.com.sg
Taiwan
Oxford Instruments Overseas
Marketing Ltd.
1
F,
No 23 Jing-Shang 19
'h
Street,
Hsinchu, Taiwan
Tel: +65 6337 6848
Fax: +65 6337 6286
Email: oipt.sales@oxford-
instruments.com.sg
Printed: 22-Mar-06. 6:57
System
Manual
Oxford
Instruments
Plasma
Technology
All
OIPT Systems
Appendix
R
Rotameter
data
1
Rotameters
2
1.1
Rotameter types 2
1.2 Setting
the
required
purge
flow
rate 3
1.3
Flow
versus scale
reading
graphs 4
Fig
1:
Typical
rotameter
2
Printed: 2-Jul-05.
11
:43
Rotameter Data
Page 1
of
4
Issue
1:
August
03
All
OIPT Systems
1
Rotameters
Oxford
Instruments
Plasma
Technology
System
Manual
A
rotameter
is
a
manually
controlled
variable valvelindicating tube, used
by
OIPT
to
manually
set
the
flow
rate'
for
various gas supplies. For example,
purge
flow
rates
for
turbomolecular
2
,
rotary
vane and
dry
pumps, glove boxes and etch gas supplies
for
process chamber cleaning.
Ball
float
Graduated
scale
Flow
control
__
....
knob
Tube type
number
is marked
on
this
side
of
the tube
Fig 1: Typical rotameter
1.1
Rotameter
types
The models
of
rotameter
used
for
setting
purge
gas
flows
on
OIPT
equipment
is
fitted
with
a
common
scale, reading
from
0
to
6
as
flow
is
varied
from
zero
to
full
scale. The full-scale
flow
depends on:
• The
tube
type
(marked on
the
tube
itself)
• The ball material
• The gas
type
•
Temperature
• Pressure
The full-scale
flows
given
in
the
following
table
are
for
20
0
C,
1 atmosphere pressure, air
or
nitrogen
gas.
OIPT
part
Tube
number
Ball
material
Normal
use Full scale
flow
G/GAS/ROT
1050
A125-3
Glass
Turbo
pump
pur!=le
53
sccm
G/GAS/ROT/25L A250-4
Carboloy
Rotary
pump
purqe,
PECVD
27.5 slpm
G/GAS/ROT/40L A250-6
Stainless steel Pump exhaust
purqe
43.4 slpm
G/GAS/ROT
1800
A125-7 Stainless steel CF4/02 'clean
!=las'
meterinq
850
sccm
G/GAS/ROT/900 A250-1
Stainless steel Rotary
pump
purge, etch, 4.4 slpm
PECVD
1 Flow rates are
quoted
in
either
standard cubic centimetres per
minute
(seem)
or
standard litres per
minute
(slpm).
2 In most
OIPT
systems.
turbomolecular
pump
purge
flows
are set
automatically
and
monitored
by
the
system
software
via a
flow
meter: these systems
do
not
incorporate
a
rotameter
for
the
turbo
pump
purge.
Issue
1:
August
03
Rotameter Data
Page 2
of
4
Printed: 2-Jul-05.
11
:43