Oxford-100-Manual.pdf - 第203页

Installation Data Oxford Instruments Plasma Technology PlasmalabSystem 100 55 2335 r--- ~ .-L. 0 D~ 0 qQ """--'--- ~ ~ ........ - 509 ~ 1- SERVICE ACCESS 514 o Automatic Load Lock Services panel Syste…

100%1 / 362
PlasmalabSystem
100
Oxford
Instruments
Plasma
Technology
Installation Data
1630
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS
ALLOWED
BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS,
E.G.
THE POWER
DISTRIBUTION UNIT.
55
D~
0
0
747
()
-.;
""
.......
"
I I
n
0
-
'-
D
II
IQI
uilil
II
1111
00
0
00
00
00
0
~~o
0
o 0
L--
t----
-
..
...
..
-
..
I I
c::
p
0
2
1516
f---
f---
..
159
Fig
1:
lCP
180 system layout (3-frame)
NOTE: For services panel details,
see
~
Issue
5:
June 05
Installation Data
OCP
180)
Page 6
of
18 Printed: 22-Mar-06, 6:57
Installation Data
Oxford
Instruments
Plasma
Technology
PlasmalabSystem
100
55
2335
r---
~
.-L.
0
D~
0
qQ
"""--'---
~
~
........
-
509
~
1-
SERVICE ACCESS
514
o
Automatic
Load
Lock
Services
panel
System
Services
panel
OIPT RECOMMENDS THAT AT
LEAST
600mm
SERVICE ACCESS SPACE IS
ALLOWED
BETWEEN
ANY
OBSTACLE (E.G. WALLS, PARTITIONS, ETC.) 0
AND
SERVICEABLE ITEMS,
E.G.
THE POWER
DISTRIBUTION UNIT.
I I
c
::>
2
1516
~
..
159
Fig 2:
ICP
180 system layout (3-frame cluster upgradeable)
NOTE: For services panel details,
see~.
Printed: 22-Mar-06, 6:57
Installation Data (Iep 180)
Page 7
of
18
Issue
5:
June 05
PlasmalabSystem
100
Oxford
Instruments
Plasma Technology
Installation Data
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE
IS
ALLOWED
BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
55
1795
...-
r---
0
D~
O~
(iQ
f----
~
'-T"
444
~
n
0
=
~
II
IQI
00
0
00
00
00
0
00
0
000
o 0
.----
/-
-
System
Automatic
Services
Load
Lock
panel
Services
panel
...
..
...
..
514
I I
c::
=
1.2
0
2
1516
Q
..
159
Fig
3:
ICP 180 Layout (2-frame cluster upgradeable)
NOTE:
For services panel details,
see
fu:l..1.
Issue
5:
June 05
Installation Data
(ICP
180)
Page 8
of
18
Printed: 22-Mar-06. 6:57