Oxford-100-Manual.pdf - 第301页

Plasmalab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 0.6 Nitrogen purge line Check valve GW0605 Air OUT Gauge G/AIR/REG/570 Regulator G/AIR/REG/560 Set to 0.5/0.7 bar Note - Nit…

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Plasmalab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
0.5
Pneumatic
control
components
(continued)
G/AIR/REG/104
WAFER CLAMP CIRCUIT
Wafer clamp
cylinder
G/AIR/CYLl320
¢:::>
-
.---
---lI~
...
7liJ~~:_+lI--___l-
-
IT
.~
TI
Wafer clamp
valve
G/AIRNL
V/502
EA A
G/AIRIREG/104
IT
'7
TI
G/AIR/REG/104
¢:::>
Wafer clamp
cylinder
GI
AI
R/CYLl320
co-
I_A_IR_I_N
'--
.....
__
+-
__
~P+-_--I*"B~_....-
__
+-
__
-++
1....;~~.J<-
..
A+-I
Ir---
~
EB
IT
6'
J I
G/AIR/REG/104
AIR OUT
II
IA
~J
AI
G/AIR/REG/104
¢:::>
WAFER LIFT CIRCUIT
Wafer lift valve
G/AIRNL
V/502
G/AIR/REG/104 Wafer lift
)---!\
G/AIR/REG/104 cylinder
'r--v'
¢:::>
G/AIR/CYLl315
EA A
I
,tt
I
co-
L_~_--E..p
+-_~~B
J:I~
T~~~T~I-+-_-+I~J~~.~I
__
-Ir---
~
EB
+ I'
.ill"
I I
Only fitted if
required to cure
cylinderjudder
I'
'.ill"
'I
Note - Air tubing is blue
System
Common
Components
Section 0 Page 8
of
12
Issue
2:
November
02
Printed: 16-Jan-06. 15:55
Plasmalab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts Catalogue
0.6
Nitrogen
purge
line
Check valve
GW0605
Air OUT
Gauge
G/AIR/REG/570
Regulator
G/AIR/REG/560
Set to
0.5/0.7 bar
Note
-
Nitrogen
tubing
is
yellow.
Issue
2:
November
02
Printed: 16-Jan-06. 15:55
Maglev turbo pipe run
Mass flow meter
M/MTR/MFM/003
Restrictor
G/AIR/REG/106
Restrictor
G/AIR/REG/106
Restrictor
G/AIRIREG/106
Section 0 Page 9
of
12
Solenoid switch & T piece
(supplied with Maglev
Turbo only)
Chamber
vent valve
GW0012C
Foreline
vent valve
GW0012C
System
Common
Components
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
0.7
Water
cooling
circuits
Service
panel
Water
IN
Water OUT
Water
IN
Water OUT
Water
IN
Water OUT
Water
IN
Valve supplied and fitted
with Maglev turbo only
1/4G
1/4G
3/8G
3/8G
1/4G
Thermocouple
G/GAS/ROT
1800
1/4G
1/4G
TURBO
._._._._._._._._._._._._._._.~
~._._._._._._._._._._._._._._.J
ICP R.F. GENERATOR
._._.-._._._._._._._._._._._.~
~._._._._._._._._._._._._._._.J
ICPCOIL
'-'-'-'-'-'-'-'-'-'-'-'-'-'-')
~._._._._._._._._._._._._._._.J
LOWER ELECTRODE
'-'-'-'-'-'-'-'-'-'-'-'-'-'-')
~._._._._._._._._._._._._._._.J
ELECTRODE AMU
(OPTIONAL COOLING)
'-'-'-'-'-'-'-'-'-'-'-'-'-'-')
I
I
I
I
I
~._._._._._._._._._._._._._._.J
ICP+
ICPAMU
Water OUT
Note - Water tubing
is
green
Flow Switch
GIWTR/FLW/002
1/4G
I·-·-·-·-·-·-·-·_·_·_·_·_·_·-·~
I I
I I
I I
I I
I I
~._._._._._._._._._._._._._._.J
System Common Components
Section 0 Page 10
of
12
Issue
2:
November 02
Printed: 16-Jan-06, 15:55