Oxford-100-Manual.pdf - 第210页

PiasmaiabSystem100 s. Services Oxford Instruments Plasma Technology Installation Data The required services are listed in the following sub-sections. For full details of services specifications including connection diagr…

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Installation Data
Oxford
Instruments
Plasma
Technology
PlasmalabSystem100
T"
GAS INLET
LINES
20
-SECONDARY GAS OUTLET
LINE
TO
SYSTEM (ONLY
USED IF A SPLIT MANIFOLD
ISFITIED)
LOCATION OF FIXING HOLES,
EACH 6.6
mm
DIAMETER
o
PRIMARY GAS
OUTLET LINE TO
SYSTEM
/
I iY."
--
..
'r-
-
-----.-.--
----.--..
,
I i
I
1 i
~1~~W~~1
~~s
rt---------
....
---+
1246
STAINLESS STEEL '
i 1
TUBE FOR WELDING 623 i i
~~X~:::ER'S"lJ
L--1
..
CONTROLLED t
~......
606
-c>I
(THIS
WILL
OCCUpy
ONE GAS LINE
POSITION)
100
100
mm
DIAMETER
EXTRACTION COLLAR
~
t===~
EARTH (GROUND)
TERMINAL BLOCK
1286
ENTRY GLANDS FOR
COMPRESSED AIR PIPE
AND ELECTRICAL CABLES
(CONTROL
CABLE
TO MAIN
UNIT IS 3 METRES LONG)
Fig 8: I2-line gas
pod
Printed: 22-Mar-06. 6:57
Installation
Data
(ICP
180)
Page 13
of
18
Issue
5:
June
05
PiasmaiabSystem100
s.
Services
Oxford
Instruments
Plasma
Technology
Installation Data
The
required
services are listed in
the
following
sub-sections. For
full
details
of
services
specifications
including
connection diagrams, electrical connection schematic etc., read in
conjunction
with
the
Oxford
Instruments Plasma Technology 'Services Specifications
for
Plasmalab
and
lonfab
Systems' document.
5.1 Electrical
Supply
requirement
Function
Connection
Parameter
System electrical
Cable
(4
meters
Voltage
supply (208V
long)
Current
system)
Frequency
Phases
System electrical
Cable
(4
meters
Voltage
supply (415V
long)
system)
Current
Frequency
Phases
5.2
Water
Cooling
requirement
Function
Connection
Parameter
Process
turbo
'//'
stainless steel Flow
Swagelok
Temperature
RF
Generator and
3/
8
"
stainless steel
Flow
ICP
Swagelok
Temperature
ICP
&
AMU
3/
8
"
stainless steel
Flow
Swagelok
Temperature
Load lock
turbo
(if
'/4" stainless steel
Flow
required)
Swagelok
Temperature
5.3
Lower
Electrode
Cooling
requirement
Specification
208Vac ±10%
50A
50/60
Hz
3 phase, N + E
380Vac
-10%
to
415Vac
+6%
50A
50/60
Hz
3 phase, N + E
Specification
1 lpm (0.27
gpm
(US»
15
-
25°C
(59 -
77°F)
8 Ipm (2.12
gpm
(US»
10 -
25°C
(50 - 77°F)
2 lpm (0.53
gpm
(US»
10 -
25°C
(50 - 77°F)
1
lpm
(0.27
gpm
(US»
15
-
25°C
(59 -
77°F)
Function
Liquid cooled
lower
electrode
LN2
Cryo cooled
lower
electrode
Connection
3/
8
"
stainless steel
Swagelok
to
heater
/
chiller
unit
%"
stainless steel
Swagelok
to
dewar
Parameter
Flow
Temperature
Flow
Specification
2
lpm
(0.53
gpm
(US»
As
required by process
As
required
by process
5.4
Compressed
Air
requirement
Function
System CDA
Gas
pod
CDA
Connection
4mm
push-fit
Legris
4mm
push-fit
Legris
Parameter
Flow
Pressure
Flow
Pressure
Specification
5
lpm
(0.2 cfm)
(combined
with
gas
pod)
4.0 - 6.0 Bar (60 - 90
psi)
5 lpm (0.2 cfm)
(combined
with
system)
4.0 - 6.0 Bar (60 - 90
psi)
Issue
5:
June
05
Installation Data
(ICP
180)
Page
14
of
18 Printed: 22-Mar-06, 6:57
Installation Data
Oxford
Instruments
Plasma
Technology
PiasmaiabSystem100
5.5
Nitrogen
requirement
Function
System N
2
Rotary
pump
purge
Connection
%"
stainless steel
Swagelok
%"
stainless steel
Swagelok
typically
Parameter
Flow
Pressure
Flow
Pressure
Specification
10 Ipm (0.4 cfm)
3.0 Bar
(45
psi)
minimum
Refer
to
sub-section
6.1
Rotary
pump
purging
Refer
to
sub-section
6.1
Rotary
pump
purging
5.6 Process gas
requirement
Function
Process gas in
Connection
%"
stainless steel
welded
pipe
at
gas
pod.
%"
stainless
steel
VCR
at
system.
Parameter
Pressure
Specification
2.0 - 3.0 Bar (30 -
45
psi)
5.7
Helium
requirement
Function
Helium
in
Connection
%"
stainless steel
Swagelok
Parameter
Pressure
Specification
2.0 - 3.0 Bar (30 -
45
psi)
5.8
Extraction
requirement
Function
ICP180
Gas
pod
Rotary
pump
exhaust
Connection
100mm (4")
tube
100mm
(4")
tube
Refer
to
Section 6
Pump set
information
Parameter
Flow
Flow
Specification
1 m
3
/hour
(0.6 cfm)
6-line gas
pod
- 1
m
3
/hour
(0.6 cfm)
12-line gas
pod
- 3
m
3
/hour
(1.8 cfm)
Printed: 22-Mar-06, 6:57
Installation Data
OCP
180)
Page
15
of
18
Issue
5:
June 05