Oxford-100-Manual.pdf - 第286页

All OIPT Systems Oxford Instruments Plasma Technology System Manual 6.4 Adjustment of capacitor park positions The capacitors drive automatically to the park positions if: the AMU is set to Auto the RF is off the circuit…

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System
Manual
Oxford
Instruments
Plasma
Technology
All OIPT Systems
6.3
Changing
the
RF
components
This may
be
necessary
to
match a process beyond
the
normal
operating
range.
WARNING
HAZARDOUS
RF
VOLTAGE·
CONTACT CAN CAUSE DEATH,
SEVERE
INJURY
OR BURNS
Any
work
requiring
the
removal
of
covers
or
panels
must
only
be
performed
by
authorised
personnel
who
are
aware
of
the
hazards
involved.
Turn
off
the
RF
generator
completely
before
removing
the
smaller L-section cover. This
reveals
the
ends
of
the
two
variable capacitors and
mounting
positions
for
extra fixed
capacitors.
CAUTION
Components
fitted
must
be
suitable
for
RF
power
service.
Low
power
circuit
devices
will
overheat
uickl .
Suitable components are given
in
the
following
table:
OIPT
Part
Number
Capacitance
Rating
94-ECC1209
90pf
1kV
94-ECC1218
180pF 2kV
Change components according
to
the
following
table:
C1
going
maximum
Add
fixed
capacitance in parallel
with
C1
See
following
NOTE.
C1
going
minimum
Remove
fixed
capacitance
in
parallel
with
C1
Minimum
is
zero
C2
going
maximum
1.
Add
fixed
capacitance in parallel
with
C2
See
following
NOTE.
2.
Increase coil inductance
C2
going
minimum
1.
Remove
fixed
capacitance in parallel
Minimum
is
zero fixed capacitance
with
C2
2.
Decrease coil inductance
NOTE: Variable capacitors
C1
and
C2
have a
maximum
capacitance
of
1000pF and 500pF respectively.
For each
of
these variable capacitors
there
are
three
positions
for
fitting
parallel
'padding'
capacitors. Therefore, a
maximum
of
3 x 180pF
padding
capacitors could be
fitted
but
usually
there
is
no
need
to
fit
more
than
one
paddinq
capacitor (i.e. 180pF).
Printed: 5-Jan-06, 8:03
DIPT
Automatch
Unit
Page 19
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Issue
6:
February
05
All
OIPT Systems
Oxford
Instruments
Plasma
Technology
System
Manual
6.4
Adjustment
of
capacitor
park
positions
The capacitors drive
automatically
to
the
park
positions if:
the
AMU
is
set
to
Auto
the
RF
is
off
the
circuit
board
links enable
parking
The
park
positions can be adjusted
when
all
of
these conditions are satisfied, by
altering
the
corresponding
potentiometer
with
a small
flat-bladed
screwdriver. The capacitor
will
move
when
the
potentiometer
is
adjusted, and
the
park
position
is
displayed
as
the
capacitor
position.
7.
OIPT locations
worldwide
UK
Oxford Instruments Plasma Technolgy
North End, Yatton,
Bristol, BS49 4AP
Tel: +44(0)1934837000
Fax: +44(0)1934837001
Email: plasma.technology@oxinst.co.uk
Web: www.oxford-
instruments.com/plmchp5.htm
USA
Oxford Instruments Inc.
130A Baker Avenue Extension
Concord, MA 01742
Tel:
+1
9783699933
Toll Free
+1
800-447-4717
Fax:
+1
9783698287
Email: info@ma.oxinst.com
Germany
Oxford Instruments GmbH
Otto-von-Guericke Ring 10,
D-65205 Wiesbaden
Tel: +49(0)6122937161
Fax: +49(0)6122937175
Email: plasma@oxford.de
Issue
6:
February
05
Japan
Oxford Instruments
KK
2-11-6 Tomioka
Koto-ku, Tokyo 135-0047
Tel: +81-3-5245-3261
Fax: +81-3-5245-4466
Email: oikkpt@oxinst.co.jp
Web: www.oxford-instruments.jp
People's
Republic
of
China
(Beijing)
Oxford Instruments China
Room 714, Office Tower
3,
Henderson Center,
No.
18
Jianguomennei Ave,
Dongcheng District,
Beijing 100005
Tel: +86 1065188160/1/2
Fax: +86 1065188155
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
DIPT
Automatch
Unit
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20
People's
Republic
of
China
(Shanghai)
Oxford Instruments China
Room 14-F,
NO.1
Plaza
800 Nanjing East Road
Shanghai 200001
Tel:
+862163608530
Fax:
+862163608535
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
Singapore
Oxford Instruments Pte.
Ltd
371
Beach Road,
#02-07 Keypoint
Singapore 199597
Tel:
+6563376848
Fax: +65 6337 6286
Email: oipt.sales@oxford-
instruments.com.s9
Taiwan
Oxford Instruments Overseas
Marketing Ltd.
1
F,
No
23
Jing-Shang 19
1h
Street,
Hsinchu, Taiwan
Tel:
+6563376848
Fax: +65 6337 6286
Email: oipt.sales@oxford-
instruments.com.S9
Printed: 5-Jan-06. 8:03
,
,
III\Od
ular
Cluster
system
-ICP
180
Issue
2:
November
2002