Oxford-100-Manual.pdf - 第29页
Health and Safety Oxford Instruments Plasma Technology Plasma lab and lonfab WARNING System vent gas: Nitrogen Warns of gas type and maximum pressure, connected to the system. Max inlet pressure : 5 Bar WARNING Gas type:…
Plasma
lab
and
lonfab
Oxford
Instruments Plasma Technology
Health and Safety
1.4
Warning
and
advisory
labels
During
manufacture,
warning
and advisory labels are
attached
to
the
system
to
indicate
potential
hazards and components,
which
should
not
be
operated
or
maintained
without
first
reading
the
relevant
manual. Typical labels and
their
meanings are
as
follows:
~
DANGER
-----
,-,.----".-
RF
ENERGY
«t
l
-.»
Disconnect
electrical
supply
before
servicing
Danger
of
physical
injury
from
RF
radiation
or
from
touching
components
within
the
labelled
equipment.
~
WARNING
PINCH POINT
....
.
Keep
hands
away
Danger
of
trapping
limbs, fingers etc.
In
the
labelled
equipment.
from
chamber
lid
when
closing.
Lfi\
WARNING
~------
STRONG
MAGNETIC
FIELD
n
Avoid
contact
with
this
area.
Danger
of
physical
injury
from
the
Strong
Magnetic
Field generated by
the
labelled
equipment.
&
WARNI~G
Caution,
hot
surface
IEC
417, No.
5041
( (
('
HOT
SURFACE
) ) )
Do
not
touch
-
~
DANGER
,
~-~---
lOW
TEMPERATURE
Wear
thermal
*
protective
gloves
Danger
of
physical injury,
from
the
labelled
equipment.
WARNING
SERVICE BY
QUALIFIED STAFF
ONLY
Refer
to
manual
Read
the
relevant
manual
before
proceeding
to
operate
or
maintain
the
labelled
equipment.
!AI
WARNING
~-~.~-----
RF
&
UV
RADIATION.
DO
NOT
USE
THIS
PORT
~.~
FOR
VIEWING
WITH
THE
a
WI~~~~~
~:SH
SHIELD
IN
PLACE
&I
~J\RNING
._-,-----
LASER
BEAM
Disconnect
~
electrical
supply
before
servicing
Danger
of
physical
injury
from
RF
and UV
radiation
from
the
labelled
components.
Danger
of
physical
injury
from
Laser Beam
generated
by
the
labelled
components.
Issue
11:
August
2004
Health and Safety
Page 1-16
of
18
Printed:29
May
2005, 06:31
Health and Safety
Oxford
Instruments
Plasma
Technology
Plasma
lab
and
lonfab
WARNING
System vent gas: Nitrogen
Warns
of
gas
type
and maximum pressure, connected
to
the
system.
Max inlet pressure : 5
Bar
WARNING
Gas type:
Air
(compressed)
Warns
of
gas
type
and maximum pressure, connected
to
the
system.
Max inlet pressure: 9
Bar
WARNING
System process
gas:
Warns
of
gas
type
and maximum pressure, connected
to
the
system.
Max inlet pressure: 5
Bar
WARNING
Fluid type: Water (cooiing)
Warns
of
fluid
type
and maximum pressure, connected
to
the
system
Max inlet pressure: 4.2
Bar
~
Caution,
refer
to
accompanying documents.
ISO
3864,
No.
B.3.1
Continued
...
Printed:29 May 2005. 06:31
Health and Safety
Page 1-17
of
18
Issue
11:
August
2004
Plasma
lab
and
lonfab
...
Continued
Oxford
Instruments
Plasma
Technology
Health and Safety
1
On (Supply)
IEC
417, No.5007
0
Off
(Supply)
IEC
417, NO.5008
Earth
(ground)
IEC
417, No.5017
@
Protective
earth
(ground)
IEC
417, NO.5019
3
..............
Three phase
alternating
Current
IEC
617-2 No. 020206
3N~
Three phase
alternating
Current
with
Neutral wire.
&
WARNING
HAZARDOUS
Warns
of
any
voltage
between
208V and 240V
underneath
the
cover.
VOLTAGE
~
,,=._
.'00"00'
supply before
removing cover
&
When
used
on
its
own,
this label warns
of
any
voltage
between
208V
and 240V.
The labels
below
indicate
the
presence
of
high
voltages
within
the
labelled
equipment.
There
is
a
danger
of
electric shock
or
burns
from
touching
components
within
the
labelled
equipment.
&~~riGER
&fit
ER
~~ANGER
~-~~------~
HAZARDOUS
HAZARDOUS
HAZARDOUS
VOLTAGE
VOLTAGE
VOLTAGE
~
",.~
~
,w_
~
""0,"
50/60 hz
50/60
hz
50/60 hz
3 Phase
3 Phase
3
Phase
&DANGER
~DANGER
&:DANGER
~
""''"'"''''
~
"","00"'
~
~OOO,
VOLTAGE
VOLTAGE
VOLTAGE
240
Volts
220
Volts
115
Volts
50/60 hz
50/60 hz
50/60
hz
Issue
11:
August
2004
Health and Safety
Page 1-18
of
18 Printed:29
May
2005. 06:31