Oxford-100-Manual.pdf - 第89页
System Manual Oxford Instruments Plasma Technology PlasmalabSystem 1 00 Repeat Step Repeats all subsequent steps until a Loop Step is reached. This group of steps can be repeated any number of times. (When you select thi…
PlasmalabSystem100
Oxford
Instruments
Plasma
Technology
System
Manual
5.5.2
To create a recipe step, based
on
an existing recipe step, use
the
following
procedure:
1)
Select a recipe step
from
the
Step
Library
list, i.e. click on
it
to
highlight
it.
2)
Select
the
COPY
button.
Enter a
new
step name.
3)
Edit
the
step parameters
as
required,
then
click
on
OK. The
new
recipe step
is
automatically
saved.
EDIT
AN
EXISTING
RECIPE
STEP
To
edit
an existing recipe, use
the
following
procedure:
1)
Select a recipe step
from
the
Step
Library
list, i.e. click on
it
to
highlight
it.
2)
In
the
Step Library panel. click on
the
Edit
button.
3)
Edit
the
step's process parameters
as
required.
then
click on OK. The step
is
automatically
saved.
NOTE: Changing an existing recipe step
will
not
alter
saved recipes,
which
use
the
old
version
of
that
step.
DELETE
A
RECIPE
STEP
To
delete
a recipe step. use
the
following
procedure:
1)
Select
the
recipe step
from
the
Step
Library
list. i.e. click
on
it
to
highlight
it.
2)
Select
the
DELETE
button;
the
selected recipe step
is
deleted.
Working
with
recipes
Recipes are
'built'
using existing recipe steps, and
edited
as
required.
Within
a recipe. steps can be
manipulated
using
the
Step
Commands
pop-up
menu
(accessed
by
clicking
on
the
Recipe Steps field).
Fig 5.4: Step Commands pop-up
menu
The
Step
Commands
pop-up
menu provides
the
following
options:
Edit
Step
Enables
the
selected
(highlighted)
step
to
be edited.
UC
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Operating
Instructions
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Printed: 22-Mar-06, 10:42
System
Manual
Oxford
Instruments
Plasma
Technology
PlasmalabSystem100
Repeat
Step
Repeats all subsequent steps
until
a Loop Step
is
reached. This
group
of
steps can be repeated any
number
of
times. (When
you
select this
option,
you
are
prompted
to
enter
the
number
of
times
the
group
of
steps
is
to
be
repeated.)
Loop
Step
Terminates a Repeat Step
group.
Insert
Step
Creates a 'gap' above
the
selected step
to
allow
another
step
to
be
dragged
into
the
list.
Delete
Step
Deletes
the
selected step
from
the
list.
Cancel Closes
the
Step
Commands
pop-up
menu.
BUILD A RECIPE
To
build
a recipe, use
the
following
procedure:
1)
In
the
Recipe panel, select
the
NEW
button.
2)
Click on a recipe step in
the
Step
Library
list,
hold
the
left
mouse
button
down
then
drag
the
mouse
pointer
to
the
Step
Name
field
next
to
the
asterisk (*)
then
release
the
mouse
button.
The step name
is
displayed in
the
Step
Name
field.
3)
Repeat
2)
as
required
to
add
further
steps
to
the
recipe.
Note
that
once
you
have
filled
the
Step Name field,
the
recipe step list becomes scrollable,
enabling
you
to
add a
maximum
total
of
1000 steps.
4)
To remove a step
from
the
list, click on
it
to
highlight
it
then
select
the
Delete
step
button
from
the
Step
Commands
pop-up
menu.
Any
further
steps
will
move
up
the
list
by
one
place.
5)
To add a step
before
an existing step, click on
the
existing step
then
select
the
Insert
step
button
from
Step
Commands
pop-up
menu. The selected step and all those
following
it
will
move
down
the
list
by
one place. You can
then
drag
another
step
from
the
Step
Library
list
into
the
now
vacant field.
6)
When
all steps have been added,
enter
a
time
into
the
Data
Log
Interval
field,
then
enter
a name
for
the
recipe
in
the
Recipe
Name
field. Finally, select
the
SAVE
button.
EDIT A RECIPE
To
edit
a recipe, use
the
following
procedure:
1)
Select
the
LOAD
button,
then
select
the
recipe
to
be edited.
2)
In
the
Step Commands
pop-up
menu, click on
the
Edit Step
button,
then
edit
the
process parameters
as
required.
Note
that
editing
a recipe step
will
not
affect
the
associated step, i.e. a step having
the
same filename,
in
the
Library
of
Available
Steps.
3)
To remove a step
from
the
list, click
on
it
to
highlight
it
then
select
the
DELETE
STEP
button
from
the
Step
Commands
pop-up
menu.
Any
further
steps
will
move
up
the
list
by
one
place.
4)
To add a step
before
an existing step, click
on
the
existing step
then
select
the
INSERT
STEP
button.
The selected step and all those
following
it
will
move
down
the
list by
one
place. You can
then
drag
another
step
from
the
Step
Library
list
into
the
now
vacant field.
Printed: 22-Mar-06, 10:42
Operating
Instructions
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of
52
UC
Davis 94-721001
Issue
1:
March 06
PlasmalabSystem100
Oxford
Instruments
Plasma Technology
System
Manual
5.6
Process
Datalog
All
processes are
automatically
data-logged. The interval
between
logging
events
is
set in
the
Recipe screen.
The
Process
Datalog
facility
allows
you
to
view
process data runs and associated comments.
The
facility
comprises
three
pages:
a)
SELECT
LOG
page - allows
you
to
select
the
process data
to
view.
b)
RUN
LOG
page - lists
the
selected process data,
for
all runs except Leak
detection
runs and
MFC
calibration
runs,
with
respect
to
time.
c)
Leak
detection
and
MFC
calibration
log
page - displays
the
Leak
detection
runs and
MFC
calibration
runs in
text
and graphical formats.
These pages are described
in
the
following
text.
5.6.1
Select
Log
page
The Select Log page
is
displayed by selecting
the
Process
button,
then
the
Log
View
option.
Fig 5.5: Select Logpage
The page comprises a list
of
logged
events,
which
can be
filtered
by type, batch name and
time.
When
the
required
events have been selected,
they
can be
viewed
on
a Log
View
page.
UC
Davis 94-721001
Issue
1:
March 06
Operating
Instructions
Page 5-24
of
52
Printed: 22-Mar-06. 10:42