Oxford-100-Manual.pdf - 第305页
Plasmalab System 100 (ICP180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue Section 3 - Process chambers Section 3 - Process chambers 1 3.1 ICP180 chamber kit 200LF pipe (1 00-3-41 C) 2 3.2 Common proc…
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
0.9
System
common
components
option
spares
OIPT
Part
No.
Qty
Description
100-S-CMP 1
Common
100
PM spares - See Sub-section 11.2
100-S-RIE 1
RI
E
100
PM spares - See Sub-section 11.3
UNIVERSAL
BASE
CONSOLE WITH MODULE CONTROLLER (100·0·RIE)
MAOOZ22000 1
APC
STEPPER
MOTOR DRIVE
ASSY
MA91Z21084
1
100
SYS
PCB
ASSY
POWER BOX
ASSV·
TOTAL
(MA91Z18519)
EGB2000 1 CONTACTOR DIODE MODULE
KM
EGB3022 1 CONTACTOR
20A
24VDC
MIN.KM
EGT0058 1
OIL RELAY
ZE6
4-6A
MIN.
KM
EFM1606 1
K.M. SLOW MCB
TRIPLE
POLE
6A
EFB2010 3
INS
BOOT 20
mm
FUSE
EFF2120
3
FUSE
20
mm
HBC
ANTI-SURGE
2A
EFM1420 1 K.M. SLOW MCB SINGLE
POLE
20A
ESM0201
1
EMERGENCY
STOP
BUTTON
ESZ8112 1 CONTACT BLOCK
EXP2415 1
MULTI
OIP
PSU
24V/4A
+1-
15V/2.5A
- Replaces EXP0012
and
EXP0502
PLC
UNIT
EXP0700 1
B&R MINICONTROLLER 4
SLOT
EXOO725 1
B&R ANALOGUE MODULE.4
EXP0730 1 B&R DIGITAL MODULE
16
lIP
EXP0750 1 B&R ARCNET INTERF. EE32-0
EXP0272 1
PC
ARCNET INTERFACE CARD (EXP0270
obsolete)
EXP0751 1 B&R MINICONTROLLER - Basic system consists; 4
off
Analogue
cards EXP0725, 2
off
Digital
cards EXP0730, 1
off
Arcnet
memory
card
EXP0750
and
1
off
mini
controller
base EXP0700.
BASIC
VACUUM
KIT
GVV0503
1
PTR
PAUL
SERIES
50
NIC
GIV
AC/SEU025
1
NW25
CENTERING RING
System
Common
Components
Section 0 Page
12
of
12
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Plasmalab System 100
(ICP180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
Section 3 - Process chambers
Section 3 - Process chambers 1
3.1
ICP180 chamber
kit
200LF
pipe
(1
00-3-41
C)
2
3.2 Common process chamber
option
spares 4
3.3
ICP180 source
option
spares 4
Issue
2:
November
02
Printed: 16-Jan-06.15:55
Section 3 Page 1
of
4
Process
Chambers
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts Catalogue
3.1 ICP180
chamber
kit
200LF
pipe
(100-3-41C)
Process Chambers
Section 3 Page 2
of
4
DETA!lA
@
--~@
..
_@
.~-@
~@
DETA!l B
Issue
2:
November
02
Printed: 16-Jan-06.15:55