Oxford-100-Manual.pdf - 第204页
PlasmalabSystem 1 00 Oxford Instruments Plasma Technology Installation Data SERVICE ACCESS OIPT RECOMMENDS THAT AT LEAST 600mm SERVICE ACCESS SPACE IS ALLOWED BETWEEN ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.) AND SERVI…
Installation Data
Oxford
Instruments
Plasma
Technology
PlasmalabSystem
100
55
2335
r---
~
.-L.
0
D~
0
qQ
"""--'---
~
~
........
-
509
~
1-
SERVICE ACCESS
514
o
Automatic
Load
Lock
Services
panel
System
Services
panel
OIPT RECOMMENDS THAT AT
LEAST
600mm
SERVICE ACCESS SPACE IS
ALLOWED
BETWEEN
ANY
OBSTACLE (E.G. WALLS, PARTITIONS, ETC.) 0
AND
SERVICEABLE ITEMS,
E.G.
THE POWER
DISTRIBUTION UNIT.
I I
c
::>
2
1516
~
..
159
Fig 2:
ICP
180 system layout (3-frame cluster upgradeable)
NOTE: For services panel details,
see~.
Printed: 22-Mar-06, 6:57
Installation Data (Iep 180)
Page 7
of
18
Issue
5:
June 05
PlasmalabSystem
100
Oxford
Instruments
Plasma Technology
Installation Data
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE
IS
ALLOWED
BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
55
1795
...-
r---
0
D~
O~
(iQ
f----
~
'-T"
444
~
n
0
=
~
II
IQI
00
0
00
00
00
0
00
0
000
o 0
.----
/-
-
System
Automatic
Services
Load
Lock
panel
Services
panel
...
..
...
..
514
I I
c::
=
1.2
0
2
1516
Q
..
159
Fig
3:
ICP 180 Layout (2-frame cluster upgradeable)
NOTE:
For services panel details,
see
fu:l..1.
Issue
5:
June 05
Installation Data
(ICP
180)
Page 8
of
18
Printed: 22-Mar-06. 6:57
Installation Data
Oxford
Instruments Plasma Technology
PlasmalabSystem100
3. Services connections
PLC SERVICE
ACCESS CONNECTOR
(THIS IS NOT AN
ALTERNATIVE PC
COMMUNICATIONS
CONNECTION)
LIQUID N21N
1/4" SWAGELOK
INSULATED
FITTING (CRYO
TABLE OPTION)
NITROGEN OUT
1/4" SWAGELOK
INSULATED
FITTING (CRYO
TABLE OPTION)
HELIUM SERVICE FOR
WAFER COOLING
(IF REQUIRED)
3/8"
SWAGELOK
746
t~:-,------1/-4-"-V-C-R--+---"""'''------f------t-----~
711
TOP ELECTRODE
& AMU COOLING
IN OUT
956.f:1
1--3WSWAGELOK
--@--@
..
_.-+-{(®
.,j,
RF
GENERATOR COOLING
IN OUT
r·····~-·-····------+
@ @
LOWER ELECTRODE
~OUN@
TURBO COOLING
IN
OUT
851
~r---83-7-J-~~--1-,-4'-'13-.--W--'A--G~E~L-9-K-+--
@
H'~-IN-
----(@)
@
816 1-------··---
'it
886
f--
....
---
.....
------
..
921
AIR OUT
r-
0)
781
-!t
Distance
to
floor
level
<
385
<.
415
< j I
461~
469
Distance
to
lett-hand
edge
of
frame
(viewed
from
rear
of
system)
Fig 4:
ICP
180 services
panel
NOTE: The
Automatic
load lock services panel
is
similar
to
that
shown above
but
only
the
CHAMBER BACKING connector
is
used.
Printed: 22-Mar-06. 6:57
Installation Data
OCP
180)
Page 9
of
18
Issue
5:
June
05