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System Manual Oxford Instruments Plasma Technology Plasma lab and lonfab Appendix B Operation and maintenance of turbomolecular pumps Appendix B Operation and maintenance of turbomolecular pumps 1 1 Maintenance for all T…

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Plasma
lab
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lonfab
NOTES:
Issue
2:
December
01
Oxford
Instruments
Plasma
Technology
Measurement
of
RF
&
Microwave
Emissions
Page 4
of
4
System Manual
Printed: 21-Dec-04, 13:43
System
Manual
Oxford
Instruments
Plasma
Technology
Plasma
lab
and
lonfab
Appendix
B
Operation
and
maintenance
of
turbomolecular
pumps
Appendix
B
Operation
and
maintenance
of
turbomolecular
pumps
1
1
Maintenance
for
all
Turbo
Pumps 2
2
Maintenance
for
Alcatal
ATP/ACT
Turbo
pumps
3
2.1
Re-greasing
of
turbo
pumps
fitted
to
process chambers 3
2.2 2000
to
8000 hours
(3
to
12 months):
pump
relubrication
3
Printed: 21-Dec-04, 13:44
Operation
and
Maintenance
of
Turbo
Pumps
Page 1
of
4
Issue
3:
June 02
Plasma
lab
and
lonfab
Oxford
Instruments
Plasma
Technology
System Manual
1
Maintenance
for
all
Turbo
Pumps
Please
note
that
premature
failure
of
Turbomolecular
Pumps can be caused by
failing
to
observe
the
following
recommendations:
a)
Always
follow
the
maintenance and
operating
instructions
contained
in
the
manufacturers' manuals, copies
of
which
are
provided
within
the
system manuals.
Note
that
with
some types
of
pump
the
lubricant
should be replaced
when
the
total
running
time
reaches 500 hours.
b)
When
corrosive process gases are
being
used always
purge
the
turbo
pump
with
dry
nitrogen
during
a processing run.
If
the
process chamber
is
to
be
vented
adequate
time
must
first
be
allowed
for
the
process gases
to
be
pumped
away.
c)
If
corrosive process gases are used
in
a system
with
no
gate
valve
between
the
turbo
pump
and
the
process chamber and
the
system
is
to
be
left
for
more
than
one
hour
with
the
turbo
pump
not
running,
proceed
as
follows:
1)
Turn
off
all
the
manual gas taps
on
the
process gas lines. Also
turn
off
the
gas taps on
the
process gas cylinders.
2)
Close
the
chamber
door.
3)
Pump
the
process chamber and
turbo
pump
down
to
approximately
1 x 10-
4
millibars.
4)
Vent
the
process chamber and
turbo
pump
to
atmospheric pressure
with
dry
nitrogen.
Do
not
allow
the
chamber
door
to
open.
5)
Repeat Steps 3 and 4
three
times.
6)
Seal
the
process chamber and
turbo
pump.
d)
If
corrosive process gases are used in a system
with
a
gate
valve
between
the
turbo
pump
and
the
process chamber and
the
system
is
to
be
left
for
more
than
one
hour
with
the
turbo
pump
not
running,
proceed
as
follows:
1)
With
the
exception
of
the
Argon
and
Nitrogen
lines,
turn
off
all
the
manual
gas taps on
the
process gas lines and also
turn
off
the
gas taps on
the
process
gas cylinders.
2)
Close
the
chamber
door.
3)
Run a 'process' sequence
(without
any samples loaded) using
only
Argon
or
Nitrogen
as
process gases
for
at
least 10 minutes.
4)
Vent
the
process chamber and
vent
the
turbo
pump
to
atmospheric pressure
with
dry
nitrogen.
Do
not
allow
the
chamber
door
to
open.
5)
Pump
the
process chamber and
the
turbo
pump
down
to
1 x
10-
4
millibars
and
then
vent
them
with
dry
nitrogen.
6)
Repeat Step 5
three
times.
7)
Seal
the
process chamber and
the
turbo
pump.
Issue
3:
June 02
Operation
and
Maintenance
of
Turbo Pumps
Page 2
of
4
Printed: 21-Dec-04, 13:44