Oxford-100-Manual.pdf - 第340页

Plasmalab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 9.2 12-line gas pod (81-9-61) 7 PCB 1 PCB2 PCB3 Gas Lines Gas Lines Gas Lines 1-4 5-8 9-12 Gas Handling Section 9 Page 4 of …

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Plasmalab System 100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
Item
No.
OIPT
Part
No.
Qty
Description
1
MA81D15070
1
MANIFOLD
GAS
OUT
PIPE
2
MA81D14783
1
GAS CONNECTION LINE
3
81-9-31 1 CLEAN GAS LINE
(SEE
SUB-SECTION 9.5)
4
MA81Z16003
1 GAS POD CHAMBER A
OR
B INTERFACE
PCB
5
G/AIRIVLV/506 1
6
WAY
SMC
ASSY.
SPASBR06
6
ESZ9102
1 DOOR INTERLOCK MICRO-SW
SPDT
7
G/AIRIVLV/501
1
SINGLE
SMC
ASSY.
SPASBR01
8
81-9-11
1 NON-TOXIC GAS LINE
(SEE
SUB-SECTION 9.3)
9
81-9-21
1 TOXIC GAS LINE
(SEE
SUB-SECTION 9.4)
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Section 9 Page 3
of
10
Gas
Handling
Plasmalab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
9.2
12-line
gas
pod
(81-9-61)
7
PCB1 PCB2 PCB3
Gas Lines Gas Lines Gas Lines
1-4 5-8 9-12
Gas
Handling
Section 9 Page 4
of
10
0)
I
Programmable Logic
Controller
See Sub-section 0.4
Issue
2:
November
02
Printed: 16-Jan-06.15:55
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
Item
OIPT
Part
No.
Qtv
Description
1
MD81A22487
1
GAS POD BOX
2
MD31B18526
1 GAS POD LID
3
MA81D14783
1
GAS CONNECTION LINE
4
MA81D15070
1
MANIFOLD
GAS OUT
PIPE
5 G/AIRIVLV/506
2 6
WAY
SMC ASSY.SPASBR10
6 G/AIRIVLV/501 2 SINGLE SMC ASSEMBLY. SPASBROl
7
MA31Z18421
3
300
PLUS
GASES
PCB2
ASSY
8
EXP0701 1 B&R MINICONTROLLER
EXP0730 1 B&R DIGITAL MODULE
16
lIP
EXP0725 1 B&R ANALOGUE MODULE.4
EXP0750
3
B&R ARCNET INTERF. EE32-0
10
MA81Z16005
3
PLC
INTERFACE
PCB
11
ESZ9102 1 DOOR INTERLOCK MICRO-SW
SPDT
12
81-9-11
NON-TOXIC GAS LINE
(SEE
SUB-SECTION 9,3)
13
81-9-21 TOXIC GAS LINE
(SEE
SUB-SECTION 9.4)
14
81-9-31 1 CLEAN GAS LINE
(SEE
SUB·SECTION 9.5)
Note -
For
PLC components.
see
Sub-section 0.4.
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Section 9 Page 5
of
10
Gas
Handling