Oxford-100-Manual.pdf - 第134页
PiasmaiabSystem100 Oxford Instruments Plasma Technology WARNING System Manual BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 • HEALTH AND SAFETY. fitted to load locks and transfer chambers is not so critical…
System
Manual
Oxford
Instruments
Plasma Technology
WARNING
PiasmaiabSystem100
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION
1-
HEALTH
AND
SAFETY.
6.9.3.2
6.9.4
6.9.4.1
6.9.4.2
6.9.4.3
Cleaning
WARNING
ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE). DO NOT
USE
IT
NEAR A NAKED FLAME OR ENERGISED ELECTRICAL EQUIPMENT.
The
cathode
cups,
body
tube
and anode assembly can be cleaned by firstly degreasing in a
proprietary
degreasing agent, and
then
thoroughly
soaking
in
a
laboratory
detergent.
After
soaking,
the
parts should
be
thoroughly
rinsed in clean
water
and
then
in Isopropyl Alcohol,
to
remove all traces
of
water.
The parts should be
dried
thoroughly.
Turbomolecular
pumps
Refer
to
the
manufacturer's
literature
in
Volume
3
for
details
of
maintenance required. Also,
refer
to
Appendix
B
'Operation
and
Maintenance
of
Turbomolecular
Pumps'.
Daily
Ensure
that
the
turbo
pump
temperature
is
sufficiently
high, i.e. >50°C. The
turbo
pump
temperature
can
be
monitored
on
the
turbo
pump
controller's
display. Refer
to
the
pump
manufacturer's
manual
for
details.
If
the
turbo
pump
temperature
is
too
low,
adjust
the
manually-operated
flow
valve
to
reduce
the
flow
rate
of
the
turbo
pump
cooling
water.
Re-greasing
of
turbo
pumps
fitted
to
process
chambers
The
following
instruction
applies
to
conventionally
greased
bearing
turbo
pumps, e.g.
the
Alcatel
ATP
series.
It
does
not
apply
to
Maglev
turbo
pumps.
To
prevent
damage
to
turbo
pumps
fitted
to
process chambers, OIPT
strongly
recommends
that
bearing
re-greasing
is
carried
out
periodically
after
every
2500
hours
of
pump
running
time.
Details
of
re-greasing are given in sub-section 6.9.4.3.
2000
to
8000
hours
(3
to
12
months):
pump
relubrication
CAUTION
Failure
to
perform
regular
pump
maintenance
will
result
in
pump
warranty
being
suspended.
Refer
to
the
manufacturer's
manual in
Volume
3
of
this manual.
Alcatel
ATP
series
turbo
pumps are
conventional
greased bearing pumps. Periodically, these
bearings need
to
be re-greased.
The re-greasing interval depends on a
number
of
factors; Refer
to
the
graph
in
the
Maintenance
section
of
the
manufacturer's
manual
to
establish
the
re-greasing interval
for
the
pump
in
your
system.
Remember
that
turbo
pumps
fitted
to
process chambers
must
be
re-greased
at
2500
hour
intervals.
The re-greasing interval
for
turbo
pumps
Printed: 22-Mar-06. 7:41
Maintenance
Page 6-15
of
22
UC
Davis 94-721001
Issue
1:
March 06
PiasmaiabSystem100
Oxford
Instruments Plasma Technology
WARNING
System
Manual
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 • HEALTH
AND
SAFETY.
fitted
to
load locks and
transfer
chambers
is
not
so critical.
therefore
the
manufacturer's
recommendations can be used.
The
ATP
turbo
pumps are supplied
with
series
ACT
intelligent
controllers
which
are menu-
driven. The 'SET-UP' menu allows
the
re-greasing interval
to
be set
so
that
a visual
warning
with
an
optional
audible
alarm
is
displayed
at
the
relevant
time.
Note
that
this visual
warning
does
not
require
any action immediately;
it
only
indicates
that
the
bearing should be re-
greased
at
the
next
available
opportunity.
If
required,
the
visual
warning
and
audible
alarm
can be disabled via
the
'SET-UP' menu.
When
the
pumps are supplied,
the
ACT
controller
is
pre-set
with
a 5,000
hour
re-grease
interval.
If
the
pumps are
running
continuously,
the
visual re-grease
warning
will
be
automatically
triggered
after
approximately
seven months.
The customer
is
advised
to
use
the
'SET-UP' menu
to
set
the
re-greasing interval
for
the
pump
fitted
to
his system. Refer
to
the
pump
manufacturer's manual.
Note
that
this change takes
approximately
five
minutes.
When
the
re-greasing
time
is
reached,
lubrication
is
carried
out
using a pre-loaded syringe
to
apply
a
metered
quantity
of
a specific grease
to
one
point
on
the
bearing. Refer
to
the
pump
manufacturer's
manual. The Alcatel
part
numbers
of
the
syringes are:
Pump
Type
Pre-loaded Syringe
Part
Number
ATP80
056993
150C/400HPC/900HPC
101924
Note
that
the
grease syringe has a
limited
shelf
life
so
shouldn't
be ordered
from
the
Alcatel
service centre
until
it
is
needed. Alcatel exercises
strict
stock
control
on
this
item
to
ensure
that
the
grease
is
always
in
good
condition.
Once
the
grease has been
applied
to
the
bearing,
it
needs
to
be evenly
distributed
around
the
bearing. This
is
done
automatically
by using
the
ACT
controller's 'RUNNING IN' menu.
Note
that
the
grease
distribution
takes
approximately
2.5 hours.
6.9.4.4
6.9.5
Alcatel
turbo
pumps
fitted
with
bake-out
collars
Some systems
incorporate
a
bake-out
collar
fitted
to
the
turbo
pump
to
assist
heating
the
process chamber
to
approximately
50°C
- 60°C.
If
the
flow
rate
of
the
cooling
water
to
the
turbo
pump
is
too
high,
the
pump
will
be over
cooled, thus reducing
the
heating
effect
of
the
bake-out
collar.
Rotary
vane
pumps
Refer
to
the
manufacture's
literature
for
details
of
the
maintenance required.
UC
Davis 94-721001 Issue
1:
March 06
Maintenance
Page 6-16
of
22
Printed: 22-Mar-06,
7:41
System
Manual
Oxford
Instruments
Plasma
Technology
WARNING
PlasmalabSystem100
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 • HEALTH
AND
SAFETY.
6.10
Gas
handling
system
WARNING
BEFORE
ATTEMPTING
ANY
MAINTENANCE WORK ON THE GAS HANDLING SYSTEM,
ELECTRICALLY ISOLATE
THE
SYSTEM BY SWITCHING
OFF
AND
LOCKING
OFF
THE
WALL-MOUNTED SAFETY ISOLATION BOX.
PROCESS
GASES USED
MAY
BE
TOXIC
OR
FLAMMABLE. ADOPT THE
CORRECT
PROCEDURES WITH REGARD
TO
PURGING
BEFORE
REMOVING
OR
LOOSENING COMPONENTS CARRYING
THESE
GASES. WEAR
PROTECTIVE CLOTHING.
6.10.1
Wall-mounted
gas
pod
6.10.1.1
Annually
Ensure
the
gas
pod
and its fixings are secure.
IMPORTANT: OIPT gas pods
typically
weigh
>40kg.
Ensure
the
wall
and
gas
pod
fixings
are
sturdy
enough
to
bear
at
least
four
times
the
weight
of
the
gas
pod.
6.10.2
Mass
flow
controllers
6.10.2.1
Annually
(or
as
necessary)
If
valves need cleaning,
repair
or
re-calibration:
1)
Make
sure valve has been
thoroughly
purged
before
removal.
2)
Discuss
with
the
vendor
the
return
of
the
Mass Flow Controllers
for
service
work.
Inform
the
vendor
if
hazardous gases have been used.
6.10.3
Filters
6.10.3.1
Annually
(or
as
necessary)
The process gas
filter
elements
will
need replacing
at
a frequency
that
depends
on
both
the
nature
and
purity
of
the
process gases, and
of
other
materials
that
come
into
contact
with
them.
The filters could need
changing
more
or
less
often
than
annually.
1)
Make
sure
line
has been
thoroughly
purged
before
removal.
2)
Unscrew
union
nut
and remove assembly.
3)
Tap
filter
element
lightly
on side
with
a
fibre
mallet
to
loosen and remove element.
4)
Fit
new
element.
5)
Re-assemble.
Printed: 22-Mar-06, 7:41
Maintenance
Page 6-17
of
22
UC
Davis 94-721001
Issue
1:
March 06