Oxford-100-Manual.pdf - 第101页
System Manual Oxford Instruments Plasma Technology PlasmalabSystem 100 ii) STOP buttons: Select to stop either pumping down or venting the associated chamber. Note that the STOP button must be selected before venting to …
PlasmalabSystem100
Oxford
Instruments
Plasma
Technology
AUTOMADCPRESSURE
CONTROLLER
System Manual
TURBO
PURGE
VALVE
ROTARYVANE/DRY PUMP ROTARYVANE/DRY PUMP
Fig 5.11: Pump controlpage vacuum mimic
Operator
interface
The
operator
interface
facilities are labelled in Fig 5.12.
Fig 5.12: Pump controlpage operator interface
The
following
controls are provided:
a)
Control and status panels
for
the
process chamber and
Automatic
load lock.
Each
Control
and status panel has associated EVACUATE,
STOP
and VENT buttons.
i)
EVACUATE buttons: Select
to
pump-down
the
associated chamber.
UC
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1:
March 06
Operating
Instructions
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Printed: 22-Mar-06, 10:42
System
Manual
Oxford
Instruments
Plasma
Technology
PlasmalabSystem100
ii) STOP buttons: Select
to
stop
either
pumping
down
or
venting
the
associated chamber.
Note
that
the
STOP
button
must be selected
before
venting
to
ensure
the
correct sequencing
of
the
valves.
iii)
VENT
buttons:
Select
to
vent
the
associated chamber.
b) Mimics
of
all valves
showing
open/closed status (coloured green
when
open, red
when
closed).
c)
Rotary/dry
pump
controls. Clicking
on
a
rotary
vane/dry
pump
mimic
button
will
switch
the
associated
pump
on
or
off
(a
running
rotary
pump
is
indicated by
animation).
d) Transfer arm,
Wafer
lift
and
Wafer
clamp status panel. Displays indicators
for
ARM
HOME, ARM
EXTENDED
and ARM FAULT
(illuminated
when
active). Also displays
WAFER
LIFT
and
WAFER
CLAMP status (up,
down,
moving
or
fault).
See
the
following
table.
MessaQe
MeaninQ
UP
The
UP
microswitch
is
detected
as
active.
DOWN
The DOWN microswitch
is
detected
as
active.
MOVING Both microswitches are detected
as
inactive.
FAULT Both microswitches are detected
as
active.
e)
The run status
of
the
turbo
pump
is
indicated
by
an associated message panel
containing
an indicator.
While
the
turbo
pump
is
running
up
to
speed,
the
message
'accelerating'
is
displayed and
the
indicator
is
flashing
yellow.
While
the
turbo
pump
is
at
its
operating
speed,
the
message
'at
speed'
is
displayed and
the
indicator
is
green.
f)
A
SET
BASE
PRESSURE
button.
Select
to
set
the
Process
Chamber
Base
Pressure.
g)
Context
related message panels
for
the
process chamber,
Automatic
load lock and
wafer
transfer
progress.
h) 'Ready
for
transfer'
indicators (
....
~)
- displayed
when
the
associated chamber
or
load
lock
is
evacuated and ready
for
wafer
transfers.
Printed: 22-Mar-06. 10:42
Operating
Instructions
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of
52
UC
Davis 94-721001
Issue
1:
March 06
PlasmalabSystem100
Oxford
Instruments
Plasma
Technology
System Manual
5.8.2
Robot
control
page
Fig 5.13: Robot controlpage
The
Robot
Control page
is
used
to
manually
transfer a
wafer
between
chambers (when
operating
in
automatic
mode, i.e.
running
a recipe,
wafers
are transferred automatically). The
location
of
the
wafer
is
indicated by a green
wafer
indicator. The
arrowed
path
shows
the
currently
available
wafer
destination.
The page provides
the
following
features:
Show
Pumps
button
Transfer arm
and
Wafer
lift
status panel
Transfer
status
message
field
Process
chamber and
Automatic
load
lock
mimic
Displays
the
Pump Control page
Displays indicators
for
ARM HOME, ARM
EXTENDED
and ARM FAULT
(illuminated
when
active). Also displays WAFER
LIFT
and
WAFER
CLAMP
status (up
or
down).
Displays
context-related
message
about
the
wafer
transfer
progress.
Displays
the
wafer
location
and possible
wafer
destination.
To transfer a
wafer
from
the
Automatic
load lock
to
the
process chamber
to
carry
out
a
manual process, use
the
following
steps:
1)
Click
on
the
Automatic
load lock
wafer
mimic. The
blue
arrowed
path
is
displayed
showing
the
available destination.
UC
Davis 94-721001
Issue
1:
March 06
Operating
Instructions
Page 5-36
of
52
Printed: 22-Mar-06. 10:42