Oxford-100-Manual.pdf - 第345页

Plasma lab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 9.6 Clean gas line with rotameter (81-9-07) CLEANGAS ~ SHUT-OFF VALVE (PNEUMATICALLY OPERATED) PROCESS GAS SHUT-OFF VALVE (…

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Plasmalab
System 100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
9.5
Clean
gas
line
with
MFC
(81-9-31)
PROCESS GAS
OUTLET VALVE
(PNEUMATICALLY
CONTROLLED
/~FFI
Item
No.
in
Part
Number
Description
Illustration
MA81C15916
CLEAN
GAS
LINE
(MFC
CONTROLLED)
(all
welded
pipework
including valves
but
excluding
MFC
and
MFC
cable)
G/GAS/F
IT
1614C
1/4
GASKET.
RETAIN
SS4VCR2GR
(USED
IN
ALL
VCR
FITTINGS)
1
*
MASS
FLOW
CONTROLLER
2 MAOOZ21746 MKS
MASS
FLOW
CABLE
ASSY
Mass
Flow
Controllers are
not
supplied
with
the
gas line,
they
vary in
type
according
to
each
customer's
requirement.
Please
quote
the
part
number
on
the
unit
if
spares are required.
Gas
Handling
Section 9 Page 8
of
10
Issue
2:
November 02
Printed:
16-Jan-06,15:55
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
9.6 Clean gas
line
with
rotameter
(81-9-07)
CLEANGAS
~
SHUT-OFF VALVE
(PNEUMATICALLY
OPERATED)
PROCESS GAS
SHUT-OFF VALVE
(PNEUMATICALLY
OPERATED)
I
PROCESS GAS
OUT
TO
SYSTEM
I
CLEAN GAS IN
..--
LINE
Item
No.
in
Part
Number
Description
Illustration
MA81B15081
CLEAN GAS
LINE
(ROTAMETER) (all
welded
pipework
including
valves
but
excluding
rotameter)
G/GAS/FIT/614C 1/4 GASKET. RETAIN
SS4VCR2GR
(USED
IN ALL
VCR
FIITINGS)
1
G/GAS/ROT/800 ROTAMETER 800 CCM F65-SAHR3-A125-7SS
2
MA81D14784
INLET
PIPE
(ROTAMETER)
Issue
2:
November
02
Printed:
16-Jan-06,
15:55
Section 9 Page 9
of
10
Gas
Handling
Plasmalab System 100
(Iep
180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
9.7
Gas
handling
option
spares
OIPT
Part
No.
Qtv
Description
81-9-51 -
Externally
mounted
gas
pod
for
up
to
six MFC lines +
one
rotameter
or
MFC
control
line
MA81Z16003
1
GAS POD CHAMBER A
or
B
PCB
G/AIRIVLV/506
1 6
WAY
SMC ASSEMBLY SPASBR06
ESZ9102 1 DOOR INTERLOCK MICRO-SW
SPOT
G/AIRIVLV/501 1
SINGLE
SMC ASSEMBLY
SPASBR01
G/GAS/F
IT
1614
1
Y4
RETAINING GASKET
81-9-11 1
Non-toxic
Qas
line
excludinQ mass
flow
controller
G/GAS/FIT/614
10
Y4
RETAINING GASKET
81-9-21 1 Toxic gas
line
with
MFC bypass,
excluding
mass
flow
controller
G/GAS/FIT/614
10
Y4
RETAINING GASKET
Gas
Handling
Section 9 Page
10
of
10
Issue
2:
November
02
Printed: 16-Jan-06, 15:55