Oxford-100-Manual.pdf - 第5页

PiasmaiabSystem100 Oxford Instruments Plasma Technology System Manual Quality Control forms The following Quality Control Forms (QCF) are attached: Goods Return Form QCF 60 - To be completed and attached to the outside o…

100%1 / 362
PiasmaiabSysteml00
Preface
Oxford
Instruments
Plasma
Technology
System Manual
This manual
is
the
OPERATION
and
MAINTENANCE
MANUAL.
It
provides all
the
information
necessary
for
the
operation
and
routine
maintenance
of
the
system. Certain
components
within
the
system are supplied
by
other
manufacturers. These components have
their
separate manuals
which
are included, and should
be
referred
to
for
detailed
operation,
maintenance and repair
information.
6
i
'V\lARNING
SERVICE
BY
, QUALIFIED STAFF
• ONLY
Refer
to
manual
Where
this
label
is
displayed
(black
text
on
a
yellow
background),
read
the
relevant
manual
before
proceeding
to
operate
or
maintain
the
labelled
equipment.
Customer
Support
Facilities
Oxford
Instruments Plasma Technology has global Customer
Support
Facilities
to
provide
a co-
ordinated
response
to
customer's queries.
All
queries are recorded on
our
Support
Database
and
dealt
with
as
quickly
as
possible.
If
we
are
not
able
to
answer
the
query
immediately,
we
will
contact
you
as
soon
as
possible.
Before
contacting
a Customer
Support
Facility, please ensure
that
you
have referred
to
the
appropriate
section
of
your
system manual. OEM manuals and electrical drawings.
Please
direct
all queries
through
your
nearest
support
facility
(see
below)
and have
the
following
details available.
System
Type,
e.g. PlasmalabSystem100 etc.
Works
Order
No.
- This can be
found
on
the
front
cover
of
your
system manual.
Contact
Information
-
Your
name, Company and
how
we
can
contact
you.
Details
of
your
query
-
nature
of
the
problem,
part
numbers
of
spares required, etc.
You
can
contact
us
via any
of
the
following:
China
Beijing
Tel: +86
1065188160
Email: pt.support@oichina.cn
Shanghai
Tel: +8621 6360 8530
Email: pt.SUPDort@oichaina.cn
Germany
Tel: +49 6122 937 161
Email: info@oxford.de
Japan
Tel:
+81
352453591
Email: oikkpt@oxinst.co.jp
Singapore
Tel:
+6563376848
Email: pt.support@oxford-instruments.com.sg
Taiwan
Tel: +886 3 5788696
Email: pt.support@oxford-instruments.com.tw
UK
Customer Support Hotline: +44(0)
1934837070
(0800 - 2000
UK
local time)
Fax: +44(0) 1934837071
Email: pt.support@oxinst.co.uk
USA
Concord.
MA
Tel:
+1
9789933
ext. 444
Toll Free:
+1
8004474717
ext. 444
Fax:
+1
978 369 8287
Email: support.pt@ma.oxinst.com
Printed: 28 March 2006 09:54
Preface
Page (iv)
Issue
1:
March 2006
PiasmaiabSystem100
Oxford
Instruments
Plasma
Technology
System Manual
Quality
Control
forms
The
following
Quality
Control
Forms
(QCF)
are attached:
Goods
Return
Form
QCF
60
- To
be
completed
and
attached
to
the
outside
of
the
package
of
any
returned
parts.
Certificate
of
Pre-Acceptance
and
Certificate
of
Acceptance
QCF
61 - To be
completed
and
returned
if
the
customer
is
absent
from
acceptance.
System
Readiness
Form
QCF
89
- To be
completed
and
returned
prior
to
the
commissioning visit.
Printed: 28 March 2006 09:54
Preface
Page
(v)
Issue 1: February 2006
QCF
60
Issue 4
GOODS
RETURN
FORM
[
......
R_e_t_ur_n_s_N_o_:
~)
This form must be completed and a copy sent to Oxford Plasma Technology Service Department by fax or mail
before return
of
any goods to the factory. (Fax No : + 44 (0) 1934 837071)
If
return to the factory is approved a Returns Authorisation Number will be issued. This should be written
in
the
box provided on this form and the completed form returned with the goods as part
of
the shipping documentation.
It
must
be
possible
to
read
this
form
without
opening
the
packaging
containing
the
goods,
therefore
the
form
should
not
be
enclosed
within
the
packaging
but
affixed
to the
container.
Once the Returns Authorisation Number is issued goods should be returned within one month. OIPT
reserve the right to invoice the full value
of
parts if not returned.
All sections below must be completed.
If
any section does not apply, mark that section "not applicable".
If
the
information requested is not known, mark that section "not known".
Any
goods
returned
to the
factory
without
a
copy
of
this
form
carrying
a
Returns
Authorisation
Number
will
be
considered
hazardous
and
may
be
disposed
of
at
the
sender's
expense.
Mark
the
returns
number
on
all
packages
and
supporting
shipping
documentation.
Equipment
description.
Serial
number
or
identifying
marking
Original
OIPT
order
No
:
IDate
of
order:
Reason
for
return
of
part/so
Description
of
fault/s.
Chemical
names
of
all
materials
which
have
come
into
Precautions
which
must
be
taken
when
handling
these
contact
with
the
goods.
materials.
Nature
of
hazard(s)
presented
by
contact
with
these
Action
to
be taken
in
the
event
of
human
contact
or
materials.
spillage
of
these
materials.
Details
of
any
decontamination
carried
out
prior
to
Levels
of
residual
substances
left
in
or
on
the
returned
shipping
goods.
Name and
address
of
person
to
be
contacted
in
case
of
Tel
No:
Ext
:
query.
Fax
No:
Declaration
Please strike through the section a)
or
b) which does not applyand sign the declaration.
a) I hereby confirm that the equipment detailed above has not come into contact with any hazardous substance
and has been drained
of
any lubricant.
b) I hereby confirm that the only hazardous materials to which the equipment detailed above has been exposed
are listed above and that the following precautions have been taken.
1.
The equipment has been drained
of
any lubricant
2. All ports have been sealed and the equipment has been securely packed and labelled
in
accordance with
Oxford Instruments Plasma Technology recommendations (available on request)
3. The carrier has been informed
of
the nature
of
the consignment.
Signed .
Name
.
Date .
Position
.