Oxford-100-Manual.pdf - 第9页

QCF 89 Issue 6 Please return the completed form to your nearest Oxford Instruments Support Office, detailed below: USA & Canada Oxford Instruments America Inc Plasma Technology Support Manager 130A Baker Avenue Exten…

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QCF
61 Issue 7
Oxford
Instruments Plasma Technology
North
End,
Yatton
Bristol,
BS49
4AP
England.
Telephone:
+44
(0)
1934 837000
Fax:
+44
(0)
1934 837001
Email:
plasma.technology@oxinst.co.uk
CERTIFICATE OF ACCEPTANCE
Sheet 2/2
Customer:
Project number:
Equipment
serial number/s:
Brief
description
of
the
system:
Pre-acceptance
form
completed
at
OIPT
?
Yes
/ No
The
equipment
supplied
has
been
examined
and
tested
as
an
assembled
system
in
my
presence,
and
has
given
satisfactory
results
where
shown.
(Tick as
appropriate)
Operational
D Process D
I
am
satisfied
with
the
results
that
this
system
has
produced
and
I
accept
that
the
technical
specifications
have
been
achieved.
Comments:-
Accepted
by: Representative
of
the
end user.
Signature: Date:
/0
Please ask
our
representative
for
a copy
of
our
Customer feedback
form,
in
order
that
you
may record
your
opinions
of
the
service given by
Oxford
Plasma Technology Ltd.
Witnessed
by:
Oxford
Instuments Plasma Technology representative
Signature:
OIPT
circulation:
Service
Manager
Design
Manager
Date: /
/0
QCF
89
Issue 6
Please return the completed form
to
your nearest Oxford Instruments
Support Office, detailed below:
USA & Canada
Oxford
Instruments America Inc
Plasma Technology Support Manager
130A Baker Avenue Extension
Concord
MA
01742
Tel: (800) 447 4717
Fax:
(978) 3698287
Email: CSG@ma.oxinst.com
DE, NE,
B,
SE,
FI,DK
Oxford
Instruments GmbH
Plasma Technology
Postfach 4509
65035 Wiesbaden
Germany
Tel: +496122937161
Fax:
+496122937175
Email: Plasma@oxford.de
Eastern Territories
Oxford
Instruments Pte. Ltd
Raymond
Wong
371
Beach Road
#02-07 Keypoint
Singapore 199597
Tel:
+6563376848
Fax:
+65
6337 6286
Email: Raymond.Wong@oxford-instruments.com.sg
Page 4
of
4
U.K.
and
all
Other
Territories
Oxford
Instruments Plasma
Technology
Global Support
Manager
North
End
Yatton,
Nr Bristol
BS494AP.
U.K.
Tel:
+441934837070
Fax:
+44 1934 837071
Email: Support.PT@oxinst.co.uk
QCF
89
Issue 6
Please
tick
appropriate
box
15.
Have
the
rotary
pump
exhaust
lines
been.
connected
to
an
exhaust
extraction
system
that
meets
all
local
safety
standards?
16.
If
the
system
is
fitted
with
a
cryo
pump,
which
is
used
for
toxic
gasses,
has
an
action
plan
been
discussed
and
impl,me.,t'd
for
connection
of
the
pump
outlet
connector?
17.
Has
the
rotary
pump
purge
been
connected
to
the
DumDS
and
nitroaen
SUDDly?
18.
Have
the
rotary
pumps
been
filled
with
oil
of
the
correct
tYDe
for
the
DumD
in
use?
20.
Is
the
gas
pod
extraction
connected
with
a
minimum
flow
rate
of
1m3/hour
(6
line
gas
pod)
or
3
m3/hour
(12
line
gas
pod).
Does
the
extraction
system
meet
all
local
safety
reaulations?
21.
Do
you
believe
that
that
demonstration
of
process
has
been
included
in
the
Durchase
of
your
tool?
21.~.>Please
state,
which
processes
require
to
be
demonstrated.
21.b.
Are
the
required
samples
and
measurement
equipment
available
for
the
process
work
to
follow
on
from
hardware
acceDtance?
YES
NO
Detail
Name:
1
Signature:
1
1
Date:
1
Position
Within
Company:
/0
1
Preferred
Date
for
Commissioning
Commencement:
/0
Page 3
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