Oxford-100-Manual.pdf - 第330页
Plasma lab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 7.2 Vacuum measurement option spares OIPT Part No. Qtv Description HEATED 100 mT CAPACITANCE MANOMETER + PENNING GAUGE (81.…
Plasmalab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
Item
OIPT
Part
No.
Qty
Description
1 GIVAC/SEU025C
2
NW25
CENTRING RING ALlIVITON
2 GIV
AC/CPU025C 2
NW25
CLAMP RING
3
GIVACIVLV/125
1 PV25PK ISOLATION VALVE
4 GIVAC/FIT/015C 1
NW25
TO
%"
QUICK DISCONNECT
5 GIV
AC/GGE/625 1 HEATED 100mT MKS CAPACITIVE MANOMETER 6288.1T-D-E-1-8
-
USED
ON 81-7-03/4
5a
GIVAC/GGE/002 1 UNHEATED
100mT
MKS CAPACITIVE MANOMETER
-
USED
ON 81-7-03/1
6
GIV
AC/GGE/004
1 ACT.INVERT.MAG.GGE.AIM-S-NW25 (PENNING UNIT)
7 EWM9307
1
LINE
CORD PLG/SPADE TEL.PLUG
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Section 7 Page 3
of
4
Vacuum
Measurement
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
7.2
Vacuum
measurement
option
spares
OIPT
Part
No.
Qtv
Description
HEATED
100
mT
CAPACITANCE
MANOMETER
+ PENNING GAUGE
(81.7·03/4)
GIVAC/GGE/625 1 HEATED
100mT
MKS CAPACITANCE MANOMETER
6288.IT-D-E-1-8 -
USED
ON 81-7-03/4
GIVAC/GGEI002
1 UNHEATED 100mT MKS CAPACITANCE MANOMETER
-
USED
ON
81-7-0311
GIVAC/GGEI004 1 ACT INVERT
MAG
GGE
AIM-V-NW25
(PENNING)
GIVACIVLV/125 1 PV25PK ISOLATION VALVE
GIV
AC/SEU025 1
NW25
CENTERING RING
Vacuum
Measurement
Section 7 Page 4
of
4
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
Section 8 -
Pumping
pipework
Section 8 •
Pumping
pipework
1
8.1
General 2
8.2 200mm
pipework
+ 200 VAT
APC
(1
00-8-20) 3
8.3 Pumping
pipework
option
spares 6
Issue
2:
November 02
Printed:
16·Jan-06,15:55
Section 8 Page 1
of
6
Pumping Pipework