Oxford-100-Manual.pdf - 第308页

Plasmalab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 3.2 Common process chamber option spares OIPT Part No. Qtv Description ICP 180 SOURCE (180 mm DIAMETER) MDOOD18559 1 PERSPEX…

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Plasma
lab
System
100
(ICP180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
Item
No.
OIPT
Part
No.
Qtv
Description
MAOOZ22821
ICP180
(ALUMINA
TUBE) HINGED ASSEMBLY
1 MD81C15834 1 NW25KF FLANGE (INTERFEROMETRY)
2
G/SELIO-K/117
1
2.62 x 20.3
mm
K'REZ
'0'
RING
BSl17
3 G/SELIO-K/219 1 3.53 x 32.9
mm
K'REZ
'0'
RING BS219
4
MD81D15869
1 GASKET
5
G/SELIO-K/235
1
3.53 x 79.0
mm
K'REZ
'0'
RING BS235
6
MD81D15847
1 RING
7
MAOOB21488 1 FLOATING TOP WELD
MC
ASSY-ICP
8
G/SELIO-K/264
2
3.53 x 190.1
mm
K'REZ
'0'
RING BS264
9 GIV
AC/SELlO15C
1
NW16
CENTRING RING ALlIVITON
10
GIV
AC/FIT
1323C
1
16KF BLANK FLANGE
11
MDOOD18558 1 VALVE BLOCK
12
MDOOB23127 1 CERAMIC TUBE WATER COOLING RING
13 MDOOD21388 1
SUPPORT
PILLAR
14
MDOOB18547 1
RF
SHIELD
15
MDOOB18549 1
COIL (4)
ICP
SOURCE
16
G/GAS/F
IT
1284C
1
Y4
UNION
17 MDOOA23821 1 BACK
PLATE
HINGED
18
G/GAS/FlT/274C 2
Y4
BULKHEAD UNION
19
G/GAS/FIT/276C
2
3/8
BULKHEAD UNION
20
G/SUN/BSH/116
4 8 x 12 x
12
mm
OILiTE
BUSH
CM16
21
MD91D17198
2 HINGE
PIN
22
G/SUN/SPG/923
2
GAS
SPG
6-60-220-MB-MB-RV400N
23 MDOOD18551 3
SPACER
BLOCK
24
MDOOD18552 3
SPACER
BLOCK HALF
25*
MD81D16140
1
WINDOW
FLANGE
26*
G/FIXlS32/625 4
M6
x 25
mm
SIS
CAPHEAD
SCREW
27*
MD81D14211
1 UV/RF
FILTER
28*
M/4175D/Ol
1
WINDOW
GASKET
29*
M/0651D/01
1
WINDOW
GLASS
(6
mm
PYREX)
30*
MAOOD14711 1
NW40
CENTRING RING
MOD
31
MD91D20353
1 CHAMBER 200LF STANDARD
32
G/SELIO-V/263C
1 3.5 x 196.4
mm
VITON
'0'
RING BS263 (PART
OF
ITEM 33
AND
MOUNTED ON ITEM 33)
33 GIVACIVLV/930
1
MONVAT
VLV 46 x 236 02010-BA24
34
GIV
AC/SELl040C
1
NW40
CENT.
RING ALlIVITON
35
GIV
AC/FlT/327C
1 40KF BLANK FLANGE
36
GIVAC/CLP/311C
4 CLAWS DN25 lS0-KF.BP220366-T
37
G/SELlO-
V
1384C
1 5.3 x 380.37
mm
VITON
'0'
RING 200-384
38
G/SUN/CAB/850 2 OVER
CENTRE
DRAW
LATCH
39
MDOOA22716 1
LID (HINGED ICP180)
40 MAOOA23828 1
AUTOMATCH
ASSY.
(VAC CAP) ICP180
41
MDOOC18541
1 QUARTZ TUBE
(ICP
SOURCE)
41a MDOOC18542 1
ALUMINA
TUBE (lCP
SOURCE)
- ALTERNATE TO ITEM
41
42 MDOOA21385 1
TOP PLATE (lCP)
43
MDOOA23852 1 ICP180
SIDE
COVER
* 25
to
30
MA91Z17161 CHAMBER VIEWPORT KIT
Issue
2:
November
02
Printed: 16-Jan-06. 15:55
Section 3 Page 3
of
4
Process Chambers
Plasmalab
System 100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
3.2
Common
process
chamber
option
spares
OIPT
Part
No.
Qtv
Description
ICP
180
SOURCE
(180
mm
DIAMETER)
MDOOD18559 1
PERSPEX
WINDOW
MDOOD18684 1
WINDOW
MESH
MD81D15869
1 GASKET
MDOOC18541 1 QUARTZ TUBE
(ICP
SOURCE)
MDOOC18542
1
ALUMINA
TUBE
(ICP
SOURCE)
MDOOB18547 1 ELECTROSTATIC SHIELD
GIVAC/FIT/978 2
25
010 x 2
mm
SAPPHIRE
WINDOW
G/SEUO-K/235
1
3.53 x 79.0
mm
KALREZ
'0'
RING BS235
G/SEUO-K/219 1 3.53 x 32.9
mm
KALREZ
'0'
RING BS219
G/SEUO-
K/264 2 3.53 x 190.1
mm
KALREZ
'0'
RING BS264
G/SEUO-K/117
1 2.63 x 20.3
mm
KALREZ
'0'
RING BS117
GIV
AC/SEU015 1
NW16
CENTERING RING
ALUMINIUM
GIVAC/SEU025 1
NW25
CENTERING RING
GIVAC/FIT/980 1 SIGHT
GLASS
(NW25)
ICP
PROCESS
CHAMBER WITH SINGLE VIEWPORT
AND
SIDE ACCESS DOOR
FOR
ICP180 SOURCE (1
00·3·41
C)
GIVAC/SEU040 1
NW40
CENTERING RING
G/GAS/FIT/614 1
Y<i
RETAINING GASKET
G/SEUO-V/265 1 3.5 x 196.4
mm
VITON
'0'
RING BS265
G/SEUO-V/268 1 3.5 x 215.5
mm
VITON
'0'
RING 200-268
3.3 ICP180 source
option
spares
OIPT
Part
No.
Qtv
Description
G/SUNIDWU920 2
SIS
DOWEL 10.006/10
GIVAC/SUN/032 1 EDWARDS
VACUUM
INTERLOCK SWITCH
ESZ91007
1 MICRO SWITCH 331-45
GIV
AC/SEU040
1
NW40
CENTERING RING
G/SEUO-V/269 1 3.5 x 221.85
mm
VITON
'0'
RING 200-269
GIVACIVLV/930
1 46 x 236
MESC
VALVE
(ALUMINIUM)
CHAMBER
AND
HEATER PUMP
DOWN
KITS
EXZ0200
1
SERIES
2 ON/OFF HEATER CONTROL
EQTOO02
1 TH'COUPLE
TYPE
K 200/C (replaces EQF0100)
G/SUN/HETI010 1
FIREROD
W'
x 101
LG
240V
250W
Process
Chambers
Section 3 Page 4
of
4
Issue
2:
November
02
Printed: 16-Jan-06. 15:55
Plasmalab System 100
(ICP
180)
Oxford Instruments Plasma Technology
Illustrated Parts Catalogue
Section 5 -
Lower
electrode
Section
5 •
Lower
electrode
1
5.1
Standard He backed
lower
electrode
with
centrally
positioned
3-pin
lift
and
wafer
clamp assembly
(100-5-36A)
I (100-5-36A101 - Anodised) 2
5.2
RIE
+ He vari
height
table
(100-5-26A) 4
5.3 Cryo
table
(100-5-12A) I (100-5-12A11 - Anodised) 6
5.4
Helium
pipe
run
8
5.5
Lower
electrode
option
spares 9
Issue
2:
November
02
Printed: 16-Jan-06.15:55
Section 5 Page 1
of
10
Lower
Electrode