Oxford-100-Manual.pdf - 第205页

Installation Data Oxford Instruments Plasma Technology PlasmalabSystem 1 00 3. Services connections PLC SERVICE ACCESS CONNECTOR (THIS IS NOT AN ALTERNATIVE PC COMMUNICATIONS CONNECTION) LIQUID N21N 1/4" SWAGELOK IN…

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PlasmalabSystem
100
Oxford
Instruments
Plasma Technology
Installation Data
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE
IS
ALLOWED
BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
55
1795
...-
r---
0
D~
O~
(iQ
f----
~
'-T"
444
~
n
0
=
~
II
IQI
00
0
00
00
00
0
00
0
000
o 0
.----
/-
-
System
Automatic
Services
Load
Lock
panel
Services
panel
...
..
...
..
514
I I
c::
=
1.2
0
2
1516
Q
..
159
Fig
3:
ICP 180 Layout (2-frame cluster upgradeable)
NOTE:
For services panel details,
see
fu:l..1.
Issue
5:
June 05
Installation Data
(ICP
180)
Page 8
of
18
Printed: 22-Mar-06. 6:57
Installation Data
Oxford
Instruments Plasma Technology
PlasmalabSystem100
3. Services connections
PLC SERVICE
ACCESS CONNECTOR
(THIS IS NOT AN
ALTERNATIVE PC
COMMUNICATIONS
CONNECTION)
LIQUID N21N
1/4" SWAGELOK
INSULATED
FITTING (CRYO
TABLE OPTION)
NITROGEN OUT
1/4" SWAGELOK
INSULATED
FITTING (CRYO
TABLE OPTION)
HELIUM SERVICE FOR
WAFER COOLING
(IF REQUIRED)
3/8"
SWAGELOK
746
t~:-,------1/-4-"-V-C-R--+---"""'''------f------t-----~
711
TOP ELECTRODE
& AMU COOLING
IN OUT
956.f:1
1--3WSWAGELOK
--@--@
..
_.-+-{(®
.,j,
RF
GENERATOR COOLING
IN OUT
r·····~-·-····------+
@ @
LOWER ELECTRODE
~OUN@
TURBO COOLING
IN
OUT
851
~r---83-7-J-~~--1-,-4'-'13-.--W--'A--G~E~L-9-K-+--
@
H'~-IN-
----(@)
@
816 1-------··---
'it
886
f--
....
---
.....
------
..
921
AIR OUT
r-
0)
781
-!t
Distance
to
floor
level
<
385
<.
415
< j I
461~
469
Distance
to
lett-hand
edge
of
frame
(viewed
from
rear
of
system)
Fig 4:
ICP
180 services
panel
NOTE: The
Automatic
load lock services panel
is
similar
to
that
shown above
but
only
the
CHAMBER BACKING connector
is
used.
Printed: 22-Mar-06. 6:57
Installation Data
OCP
180)
Page 9
of
18
Issue
5:
June
05
PlasmalabSystem
100
Oxford
Instruments
Plasma
Technology
Installation Data
POWER DISTRIBUTION
UNIT
(REMOVABLE
COVER)
HEATER/
CHILLER
SOCKET
9
SUPPLY TO ROTARY
PUMP 2
EARTH
TERMINAL
SYSTEM POWER
CABLE
GLAND
(CABLE
LENGTH
=4 METRES)
LOWVQLTAGE
FUSES
SOCKET
10
SUPPLY TO ROTARY
PUMP 1
o
K'
PHASE
3
-==
o
208V
Pin
1
Phase
1
Pin 2 Phase 2
Pin
E
Phase
3
SOCKET
17
SUPPLY TO ROTARY
PUMP
OIL
FILTER
415V~
Pin
1
live
-
Pin 2 Neutral
Pin E Earth
SKT
10
o
SKT9
SKT
7
SKT
10A
D~
SKT
8
SKT
16
SKT
17
DI~I
®
4-WAY
Blec
AUXILIARY
EMERGENCY
OFF
SWITCH
CONNECTOR
COOLING
FAN
SKT
7
PINA
EMO 1*
PIN
B +24V
PIN C
OV
PIN 0
EMO
2*
(NOTE:
EMO
1 & 2
MUST
BE
LINKED)
*EMO =EMERGENCY
Fig
5:
Electrical connections
Issue
5:
June 05
Installation Data (lep 180)
Page 10
of
18 Printed: 22-Mar-06, 6:57