Oxford-100-Manual.pdf - 第19页

Health and Safety Oxford Instruments Plasma Technology Plasma lab and lonfab 1.3.4 High Temperature WARNING HOT SURFACES· CLOSE CONTACT CAN CAUSE SERIOUS INJURY AND BURNS Allow sufficient time for heated components (e.g.…

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Plasma
lab
and
lonfab
Oxford
Instruments
Plasma
Technology
Health and Safety
1.3.3
Light
WARNING
LASER
RADIATION·
EXPOSURE CAN CAUSE SEVERE EVE
DAMAGE
OR BURNS
Before
operating
the
system,
ensure
that
all
covers
are
fitted
correctly.
Ensure
that
for
laser
equipment,
the
manufacturer's
instructions
have
been
read
and
full
understood.
1.3.3.1 Laser
equipment
when
handled
incorrectly
or
in
a damaged
condition
can seriously
damage eyesight. Read and
follow
the
manufacturer's
instructions carefully. Ensure
that
all covers supplied
by
Oxford
Instruments Plasma Technology
or
by
the
manufacturer
are correctly
fitted
before
the
equipment
is
powered
up.
WARNING
ULTRA VIOLET
RADIATION·
EXPOSURE CAN CAUSE SEVERE EVE
DAMAGE
OR BURNS
Ensure
that
all
view
ports
are
assembled
correctly,
and
that
any
replacement
filters
are
of
the
correct
specification.
1.3.3.2
View
ports on Plasmalab systems are
fitted
with
a clear plastic UV
filter
(Perspex
-VE-
clear-003). Replace this
item
only
with
the
correct part, and ensure
that
the
ports are
correctly reassembled.
If
a plastic
filter
is
not
fitted,
or
if
there
is
any
doubt
about
the
type
of
filter
that
is
fitted,
you
must check
with
Oxford
Instruments Plasma Technology
before
proceeding.
1.3.3.3 The customer should
be
aware
of
the
fact
that
view
ports are available in glass
or
quartz.
Most
view
ports on
Oxford
Instruments Plasma Technology systems are glass,
but
quartz
is
used in certain applications.
Quartz
view
ports
allow
much
more
UV
light
to
pass
through
than
glass does, and
so
present a
greater
hazard. They
will
require
very careful shielding
or
filtering
in ALL situations
on
Plasmalab and
lonfab
systems.
Be
careful
if
the
service
history
of
the
system
is
not
fully
known.
It
is
possible
that
a
glass
view
port
has been changed
for
a
quartz
one.
1.3.3.4 UV
light
can also escape
from
other
parts
of
the
system, e.g.
from
ICP
plasma
sources, and
downstream
plasma discharge tubes. Discharge tubes
of
this
type
are
often
made
of
quartz, and
so
very careful shielding
or
filtering
is
needed.
1.3.3.5 UV
light
can produce ozone
from
ambient
air. Detectable
quantities
are produced
by
ICP
sources
fitted
with
a
quartz
tube. Local
extraction
must be used in this
case.
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11:
August
2004
Health and Safety
Page 1-6
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2005. 06:31
Health and Safety
Oxford
Instruments
Plasma
Technology
Plasma
lab
and
lonfab
1.3.4
High
Temperature
WARNING
HOT SURFACES·
CLOSE
CONTACT CAN CAUSE SERIOUS INJURY
AND
BURNS
Allow
sufficient
time
for
heated
components
(e.g.
heated
lower
electrodes)
to
cool
to
room
temperature
before
carryina
out
maintenance.
1.3.4.1
During
operation
of
the
system some components can become dangerously hot.
Always
allow
time
for
these
to
cool
to
a safe
temperature
before
handling
them.
Components
that
become
hot
include electrically heated chambers, chamber
liners,
lower
electrodes, specimen holders and
halogen
lamps. Items
illuminated
by
halogen
lamps can also reach very
high
temperatures.
Note
that
items such
as
neutralizers,
ion
sources, and
ICP
sources
operate
at
high
temperatures.
1.3.5
Low
Temperature
WARNING
COLD OBJECTS· CONTACT CAN CAUSE SERIOUS INJURY
TO
THE
SKIN
AND
CAN CAUSE
THE SKIN TO ADHERE TO
THE
COLD
OBJECT
Allow
sufficient
time
for
cold
components
(e.g.
cryogenically
cooled
lower
electrodes)
to
return
to
room
temperature
before
carrying
out
maintenance.
If
cold objects
must
be
handled,
ensure
that
suitable
protective
clothina
is
worn.
1.3.5.1 Beware
of
the
extreme
cold produced in
refrigerated
or
cryogenically cooled
systems. Contact
with
the
skin by components
at
these temperatures can produce
'burns'.
Allow
the
cooling
system
to
reach a safe
temperature
before
attempting
any
maintenance
tasks.
Components
that
become cold include cryogenically cooled
lower
electrodes,
cryogenic pumps and components
that
use
liquid
nitrogen.
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2005, 06:31
Health and Safety
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Issue
11:
August
2004
Plasma
lab
and
lonfab
Oxford
Instruments
Plasma
Technology
Health and Safety
1.3.6
Gases
Gases
are used in
the
system
for
venting
and
purging
(N2),
for
aiding
heat
transfer (e.g.
helium) and
for
establishing
the
process
environment
(i.e. process gases).
Process
gases
used in
the
system are specified
dependent
on
the
process
for
which
the
system
is
designed.
The hazards presented by gases fall
into
one
or
more
of
the
following
categories:
a)
Asphyxiant - replaces Oxygen causing respiration
difficulties
and eventually death.
Examples
of
asphyxiants are: Nitrogen, Helium etc
..
b) Flammable - can
ignite
in
the
presence
of
heat
or
arcing.
c)
Toxic
d) Corrosive
The
following
WARNINGS may be applicable
to
the
gases used in
your
system;
it
is
your
responsibility
to
be aware
of
the
hazards and
take
the
necessary precautions. Contact
your
gas supplier
for
full
details.
WARNING
FLAMMABLE
GASES·
FLAMMABLE MATERIAL CAN IGNITE
IN
THE PRESENCE
OF
HEAT
OR
ARCING, CAUSING SEVERE INJURY.
After
a processing
run,
the
process
chamber
must
be
subjected
to
at
least
one
vent
cycle
before
any
maintenance
work
is
carried
out.
Ensure
that
the
gas
lines
have
been
purged
before
removing
or
loosening
components.
Wear
personal
protective
equipment
as necessary.
WARNING
TOXIC
GASES·
CONTACT CAN CAUSE DEATH OR SERIOUS INJURY
After
a processing
run,
the
process
chamber
must
be
subjected
to
at
least
two
vent
cycles
before
any
maintenance
work
is
carried
out.
Ensure
that
the
gas lines
have
been
purged
before
removing
or
loosening
components.
Wear
personal
protective
equipment
as necessary.
WARNING
CORROSIVE
GASES·
CONTACT CAN CAUSE SERIOUS INJURY
After
a processing
run,
the
process
chamber
must
be
subjected
to
at
least
two
vent
cycles
before
any
maintenance
work
is
carried
out.
Ensure
that
the
gas
lines
have
been
purged
before
removing
or
loosening
components.
Wear
personal
protective
equipment
as necessary.
Issue
11:
August
2004
Health and Safety
Page 1-8
of
18
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May
2005, 06:31