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System Manual Oxford Instruments Plasma Technology WARNING Plasma lab and lonfab BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY. 8. Uninstallation and Disposal 8. Uninstallation and Dispo…

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Plasma
lab
Oxford
Instruments
Plasma
Technology
System Manual
5 OIPT locations
worldwide
UK
Oxford Instruments Plasma Technolgy
North End, Yalton,
Bristol,
BS494AP
Tel: +44(0)1934 837000
Fax: +44(0)1934837001
Email: plasma.technology@oxinsl.co.uk
Web: www.oxford-
instruments.com/plmchp5.htm
USA
Oxford Instruments Inc.
130A Baker Avenue Extension
Concord, MA 01742
Tel:
+1
9783699933
Toll Free
+1
800-447-4717
Fax:
+1
978 369 8287
Email: info@ma.oxinsl.com
Germany
Oxford Instruments GmbH
Olto-von-Guericke Ring 10,
0-65205 Wiesbaden
Tel: +49(0)6122 937161
Fax: +49(0)6122937175
Email: plasma@oxford.de
Japan
Oxford Instruments K.K.
2-11-6 Tomioka
Koto-ku, Tokyo 135-0047
Tel: +81-3-5245-3261
Fax: +81-3-5245-4466
Email: oikkpt@oxinst.co.jp
Web: www.oxford-instruments.jp
People's
Republic
of
China
(Beijing)
Oxford Instruments China
Room 714, Office Tower
3,
Henderson Center,
No. 18 Jianguomennei Ave,
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Beijing 100005
Tel: +86
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Email: ptsales@oichina.cn
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China
(Shanghai)
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Process
Information
(Information
contained
in
this
document
is
confidential)
Issue
1: December 03 Page 30
of
30 Printed: 08 January 2006 09:37
System
Manual
Oxford
Instruments
Plasma
Technology
WARNING
Plasma
lab
and
lonfab
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 - HEALTH
AND
SAFETY.
8.
Uninstallation
and
Disposal
8.
Uninstallation
and
Disposal 8-1
8.1
About
this section
8-2
8.2
Uninstalling
the
system 8-2
8.2.1 General considerations
for
shutting
the
system
down
8-2
8.2.2
Shutting
the
system
down
8-2
8.2.3 Disconnecting
the
services 8-3
8.2.4
Decontamination
8-4
8.2.5 Dismantling
the
system components 8-4
8.3
Disposal 8-5
Printed: 25-May-05, 10:18
Uninstallation and Disposal
Page
8-1
of
6
Issue
1: February 00
Plasma
lab
and
lonfab
Oxford
Instruments
Plasma
Technology
WARNING
System Manual
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 - HEALTH
AND
SAFETY.
8.1
About
this
section
This section gives guidance
for
the
uninstallation
of
a
Plasma
lab
or
lonfab
system
prior
to
moving
it
to
another
location
or
disposing
of
it. Guidance
is
also given
for
the
disposal
of
a
system.
The guidance given
is
by
necessity
of
a general nature;
detail
will
vary
depending
on system
type, customer's site, etc.
IMPORTANT:
BEFORE
UNINSTALLING THE SYSTEM, ENSURE THAT ALL PERSONNEL
WHO WILL
BE
INVOLVED HAVE READ
AND
UNDERSTOOD SECTION 1
'HEALTH
AND
SAFETY'
OF
THE
SYSTEM
MANUAL.
8.2
Uninstalling
the
system
To uninstall
the
system, carry
out
the
following
sub-sections in sequence.
8.2.1
8.2.2
General
considerations
for
shutting
the
system
down
The main use
of
this
document
will
be
when
a customer requires
to
move
a system
to
another
location. This
will
involve
uninstalling
the
system,
moving
the
system components and
then
reinstalling
the
system.
An
important
consideration
is
the
length
of
time
between
shutting
the
system
down
and
powering
the
system up. The
longer
the
system
is
shut
down,
the
greater
the
need
to
remove
as
much residue gas
as
possible.
It
is
very
important
that
the
customer
follows
the
pump
manufacturer's
instructions
for
purging
pumps
prior
to
shut
down.
For periods
of
more
than
a
few
days
shutdown,
24
hours
of
N
z
purging
is
often
recommended.
If
the
system
is
to
be reinstalled,
the
vacuum system should be
left
fully
vented
with
dry
nitrogen,
with
the
pump
and gas supply service
points
capped.
Shutting
the
system
down
1)
Chamber
1
or
ion
source
z
plasma cleaning should be conducted
to
remove residues.
Use
the
normal
cleaning process according
to
the
most recent use
of
the
tool.
2)
Process gas supply lines
must
be
pumped
down
using
the
system
at
least
as
far
as
the
last isolation valve upstream
from
the
gas pod. Consider
whether
the
gases should
be
pumped
out
back
to
the
cylinder,
or
whether
the
gas installation has
alternative
means
of
exhausting hazardous gases. For
shut
down
periods
of
longer
than
two
days,
purge
the
gas lines
with
N
z
.
3)
Pump
the
system according
to
the
following
criteria:
Systems
fitted
with
turbomolecular
pumps:
a)
For a shut
down
period
of
less
than
two
days,
pump
the
system
for
three
hours.
b) For a
shutdown
period
of
longer
than
two
days: Pump
the
system
for
one
hour
with
a
small N
z
flow,
followed
by
a
12-hour
pump
down
with
no
gas
flow.
1 For Plasmalab systems,
refer
to
Section 6 (Maintenance)
of
the
System Manual.
z Run a 'discharge'
for>
1
hour
at
-500W
(15cm
or
35cm ion source),
-150W
(3cm
ion
source).
Issue
1:
February 00
Uninstallation
and Disposal
Page 8-2
of
6 Printed: 25-May-05. 10:18