Oxford-100-Manual.pdf - 第242页

Plasma lab Ie P 180 Contents Oxford Instruments Plasma Technology Equipment Manual 1. Health and Safety 3 2. Services 4 2.1 Qualitative requirements 4 2.2 Quantitative requirements 4 2.2.1 Cooling water. 4 2.2.2 Process …

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Plasmalab
ICP
180
Inductively Coupled Plasma Source
TCP
180 sourcefitted to a Plasmalab System 100
Issue
4:
January 06 Page 1
of
26
Plasma
lab
Ie
P
180
Contents
Oxford
Instruments
Plasma
Technology
Equipment
Manual
1.
Health
and
Safety
3
2.
Services
4
2.1
Qualitative
requirements 4
2.2
Quantitative
requirements 4
2.2.1
Cooling water. 4
2.2.2
Process
gas 4
2.2.3
RF
power
4
2.2.4 Electrical supply 4
2.2.5 Extraction 4
3.
Description
5
3.1 Function 5
3.2
Mechanical assembly 7
3.3
Source specification 8
3.4
Graphs
of
typical
operating
characteristics 9
4.
Installation
11
5.
Operating
Instructions
12
5.1
Introduction
12
5.1.1
Manual
adjustment
of
the
Automatch
Unit
12
5.1.2
Obtaining
a Plasma
13
6.
Maintenance
15
6.1
Maintenance
schedule
15
6.2
Safety maintenance
15
6.2.1 Inspection and renewal 16
6.3
Routine maintenance
17
6.3.1
As
required
17
6.3.2
Weekly
18
6.3.3
3-Monthly
18
6.4
Changing
the
ICP180 dielectric
tube
19
7.
Troubleshooting
21
7.1 Customer
Support
Facilities
21
7.2
High reflected
power
initial
checks
22
7.3
High reflected
power
(system
under
vacuum)
23
7.3.1
Automatch
gives reflected
power>
5%
23
7.3.2
Automatch
gives reflected
power
of
2%
to
5%
24
OIPT
locations
worldwide
26
Fig
1:
ICP
180 source -
cross
section
of
principal components 5
Fig
2:
ICP
180 Exploded
view
7
Fig
3:
Ion
current
density
at
the
wafer
versus
ICP
power
9
Fig
4:
Operating
window
10
Fig
5:
Typical
AMU
control
panel 12
Fig
6:
Automatch
components
25
Issue
4:
January 06
ICP
180 Source
Page 2
of
26
Printed: 18-Jan-06. 8:44
Equipment
Manual
Oxford
Instruments
Plasma
Technology
Plasma
lab
lep 180
1.
Health
and
Safety
For Health and Safety aspects
of
operating
and
maintaining
the
ICP
180 source,
refer
to
Section 1 - Health
and Safety
of
the
PiasmaiabSystem100 manual.
Printed: l8-Jan-DB, 8:44
ICP
180 Source
Page 3
of
26
Issue
3 : December 00