Oxford-100-Manual.pdf - 第35页

System Manual Oxford Instruments Plasma Technology Plasma lab System 100 MINiMUM 1 ".;. ~U'L"".'iJl' iC"'''JM. , C----::~ . .•... __ • ,.- _.. . l --_ ...• --- "tiAH…

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Plasma
lab
System
100
Oxford
Instruments
Plasma
Technology
System
Manual
software
to
display a
blue
system
alert
followed
after
three
minutes
by
a red system
alert
and
subsequent system
shut
down
to
prevent
damage
to
the
turbo
pump.
For details
of
system
alerts,
see
Section 5
(Operating
Instructions.).
The
turbo
purge
valve
is
pneumatically
controlled
by
the
system
software.
Process
chamber
vent
line
The process
chamber
vent
line
supplies
nitrogen
to
the
process
chamber
during
the
venting
sequence via a
restrictor
and
chamber
vent
valve. The
chamber
vent
valve
is
pneumatically
controlled
by
the
system
software.
Foreline
vent
line
The
foreline
vent
line
supplies
nitrogen
to
the
foreline
during
the
venting
sequence
to
prevent
backstreaming
of
vapour
from
the
rotary
vane
pump.
Nitrogen
is
fed
from
the
regulator
to
the
foreline
via a
restrictor
and
the
foreline
vent
valve. The
foreline
vent
valve
is
opened
for
a
period
when
the
primary
vacuum
pump
is
turned
off.
Automatic
load
lock
vent
line
The
automatic
load
lock
vent
line
supplies
nitrogen
to
the
automatic
load
lock
during
the
venting
sequence via a
restrictor
and
chamber
vent
valve. The
chamber
vent
valve
is
pneumatically
controlled
by
the
system
software.
2.4
Services
diagrams
The services
flow
and
pneumatic
circuit
are shown in
the
following
diagrams.
Note
that
these
are typical schematics; actual
components
fitted
depend
on
the
options
supplied.
Issue
2:
February 02
Services (Iep 180 and
Automatic
Load Lock)
Page 2-4
of
6
Printed
25
May
200510:12
System
Manual
Oxford
Instruments
Plasma Technology
Plasma
lab
System
100
MINiMUM
1
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iC"'''JM.
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---
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ice
RF
GS;NER:;.
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'kATE:;
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SP91[2!~
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'NAiER -
SP'J1i?4171
Fig 2.1: System 100 (ICP 180/380) services
flow
diagram
Printed 25
May
200510:12
Services
(lCP
180 and
Automatic
Load Lock)
Page 2-5
of
6
Issue
2:
February 02
System
Manual
Oxford
Instruments
Plasma
Technology
Plasma
lab
System 100
SP91CZ
f
t-ril
r-----
1
REGUL4
TOR
G:',\,R'REGi560
V;.t..~'·~R~N
:ti",t.."'i:)-tnur
SP'J1i?41!1
Hi'
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'
----,
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.--
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---
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-----
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Fig 2.1: System 100 (ICP 180/380) servicesflow diagram
Printed
25 May
200510:12
Services
(lCP
180 and
Automatic
Load Lock)
Page 2-5
of
6
Issue
2: February 02