Oxford-100-Manual.pdf - 第136页

PlasmalabSystem 100 Oxford Instruments Plasma Technology WARNING System Manual BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY. 6.11 6.11.1 6.11.2 Pump lubricants CAUTION When changing or …

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System
Manual
Oxford
Instruments
Plasma
Technology
WARNING
PlasmalabSystem100
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 • HEALTH
AND
SAFETY.
6.10
Gas
handling
system
WARNING
BEFORE
ATTEMPTING
ANY
MAINTENANCE WORK ON THE GAS HANDLING SYSTEM,
ELECTRICALLY ISOLATE
THE
SYSTEM BY SWITCHING
OFF
AND
LOCKING
OFF
THE
WALL-MOUNTED SAFETY ISOLATION BOX.
PROCESS
GASES USED
MAY
BE
TOXIC
OR
FLAMMABLE. ADOPT THE
CORRECT
PROCEDURES WITH REGARD
TO
PURGING
BEFORE
REMOVING
OR
LOOSENING COMPONENTS CARRYING
THESE
GASES. WEAR
PROTECTIVE CLOTHING.
6.10.1
Wall-mounted
gas
pod
6.10.1.1
Annually
Ensure
the
gas
pod
and its fixings are secure.
IMPORTANT: OIPT gas pods
typically
weigh
>40kg.
Ensure
the
wall
and
gas
pod
fixings
are
sturdy
enough
to
bear
at
least
four
times
the
weight
of
the
gas
pod.
6.10.2
Mass
flow
controllers
6.10.2.1
Annually
(or
as
necessary)
If
valves need cleaning,
repair
or
re-calibration:
1)
Make
sure valve has been
thoroughly
purged
before
removal.
2)
Discuss
with
the
vendor
the
return
of
the
Mass Flow Controllers
for
service
work.
Inform
the
vendor
if
hazardous gases have been used.
6.10.3
Filters
6.10.3.1
Annually
(or
as
necessary)
The process gas
filter
elements
will
need replacing
at
a frequency
that
depends
on
both
the
nature
and
purity
of
the
process gases, and
of
other
materials
that
come
into
contact
with
them.
The filters could need
changing
more
or
less
often
than
annually.
1)
Make
sure
line
has been
thoroughly
purged
before
removal.
2)
Unscrew
union
nut
and remove assembly.
3)
Tap
filter
element
lightly
on side
with
a
fibre
mallet
to
loosen and remove element.
4)
Fit
new
element.
5)
Re-assemble.
Printed: 22-Mar-06, 7:41
Maintenance
Page 6-17
of
22
UC
Davis 94-721001
Issue
1:
March 06
PlasmalabSystem
100
Oxford
Instruments
Plasma
Technology
WARNING
System
Manual
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 - HEALTH
AND
SAFETY.
6.11
6.11.1
6.11.2
Pump
lubricants
CAUTION
When
changing
or
topping-up
the
lUbricating
oil
in
a
pump,
always
use
oil
of
the
same
brand
and
type.
If
a
change
of
brand
or
type
is
contemplated,
refer
to
Oxford
Instruments
Plasma
Technology
for
advice.
General
The
lubricating
oils used
for
pumps
where
the
oil
comes
into
contact
with
the
pumped
gases,
Le. oil-sealed pumps such
as
rotary
vane types, should be chosen
to
meet
the
specific
characteristics necessary
for
the
process involved.
The
vapour
pressure must be
low
at
the
temperatures
reached
at
the
rubbing
surfaces.
Viscosity should
not
vary significantly over
the
temperature
range involved, and
the
water
absorption
rate and
content
must
be
low.
Lubricating oils generally fall
into
one
of
two
categories: mineral (hydrocarbon) based oil
or
synthetic
oil
such
as
perfluorinated
polyether. The synthetic oils are
normally
used
where
they
come
into
contact
with
strong oxidants such
as
nitrogen
dioxide, oxygen,
or
one
of
the
halogens.
Perfluorised
polyethers
Perfluorised
polyether
(PFPE)
lubricants have
the
following
properties:
a)
They are stable
up
to
350
0
C,
Le.
they
do
not
decompose
below
this
temperature.
b)
They are chemically inert. They
will,
however, react
with
Lewis acids
(BCI
3
,
AICI
3
etc.)
at
temperatures
over 100
0
C.
c)
They
do
not
polymerise
under
the
impact
of
high-energy
radiation.
d) Since
they
tend
not
to
keep contaminants suspended, pumps using these lubricants
must always be
fitted
with
suitable oil filters.
e)
They
do
not
'age' and
therefore,
if
used correctly, need
not
be replaced
during
the
lifetime
of
the
pump.
f)
Any
contaminants
in
the
lubricant
may be removed by
fitting
clean
filters
and
letting
the
pump
run
for
several hours
with
inert
gas ballast,
the
intake
port
having
been closed.
g) They
do
not
protect
metal surfaces against corrosion. Pumps should
therefore
always
be flushed
with
inert
gas. Pumps using
PFPE
should be
allowed
to
run continuously.
h)
PFPE
is
incompatible
with
hydrocarbon oils, i.e. mineral oils, conventional greases
and cleaning agents.
i)
If
a
pump
uses
PFPE
lubricant
only
Freon 113
or
Frigen 113 may be used
as
a cleaning
agent, and
only
PFPE
grease may be employed.
UC
Davis 94-721001
Issue
1: March 06
Maintenance
Page 6-18
of
22
Printed: 22-Mar-06,
7:41
System
Manual
Oxford
Instruments
Plasma Technology
WARNING
PiasmaiabSystem100
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION
1·
HEALTH
AND
SAFETY.
j)
If
it
should become necessary
to
change
from
PFPE
to
mineral oil
lubrication
or
vice
versa,
the
pump
must
be
completely
disassembled, freed
of
lubricant
and
fitted
with
new
gaskets and vanes.
k)
At
temperatures
over 350
0
C,
hazardous gaseous
decomposition
products are
formed.
Therefore
do
not
smoke
in
rooms
where
PFPE
is
used, and make sure
that
no
tobacco comes
into
contact
with
PFPE.
I)
When
handling
PFPE,
protective
clothing
must
be
used.
m) Do
not
mix
PFPE
with
used oil. Dispose
of
them
separately.
n)
PFPE
is
normally
odourless and colourless. Cloudiness
or
odour
is
a sign
of
contamination.
6.11.3
6.12
Hydrocarbon
lubricants
Where
mineral oils are used,
the
rate
of
oil
deterioration
for
a
particular
pump
and process
should
be
established
at
an early stage, and oil changes based
upon
this
information.
94-100-5-12A
Cryo
I
heated
-150
1400C
He
lower
electrode
wafer
clamping
plate
changeover
procedure
Before carrying
out
a process, in
the
process chamber
on
a
wafer
which
is
a
different
size
to
that
last processed,
it
is
necessary
to
fit
the
correct
type
of
clamping plate. Clamping plates
are available
for
various sized wafers.
To change
the
clamping plate, use
the
following
procedure
(refer
to
Fig 6.1, page 6-20):
6)
If
necessary,
vent
the
process chamber.
7)
Open
the
process chamber lid.
8)
Wearing
powder-free
gloves, unscrew
the
three
clamping
plate
securing screws
then
remove
the
clamping
plate
from
the
process chamber and place on a clean surface.
9)
Take
the
replacement
clamping
plate
and
mount
it
on
the
three
supporting
pillars
then
insert and
tighten
the
three
securing screws.
10) Close
the
process chamber lid.
Printed: 22-Mar-06,
7:41
Maintenance
Page 6-19
of
22
UC
Davis 94-721001
Issue
1:
March 06