Oxford-100-Manual.pdf - 第2页

PI s~al Syst m100 Modular Cluster System Works Order No.: Customer: 94-721002 University of Utah Volume 1: Operation and Maintenance Manual This manual, Volume 1, is one of a series for the machine as follows: Volume 1 V…

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Plasm
la
System
100
Modular
Cluster System
Works
Order
No.:
94·721002
Customer:
University
of
Utah
Typical PlasmalabSystem100
(ICP
180)
WARNING
THIS SYSTEM INCORPORATES POTENTIALLY DANGEROUS COMPONENTS, WHICH CAN
EXPOSE PERSONNEL TO HAZARDS RESULTING
IN
DEATH OR SERIOUS INJURY.
BEFORE ATTEMPTING TO INSTALL, POWER UP OR OPERATE THIS SYSTEM, ENSURE YOU
HAVE READ
AND
UNDERSTOOD THE ENCLOSED SYSTEM
MANUAL,
ESPECIALLY SECTION 1
(HEALTH
AND
SAFETY).
Issue 1:
March
2006
PI
s~al
Syst
m100
Modular
Cluster System
Works
Order
No.:
Customer:
94-721002
University
of
Utah
Volume
1:
Operation
and
Maintenance
Manual
This manual,
Volume
1,
is
one
of
a series
for
the
machine
as
follows:
Volume
1
Volume
2
Volume
3
Operation
and
Maintenance
Manual
System Drawings
OEM Manuals
Notes:
1.
Please regard this manual
as
part
of
the
system.
2.
Ensure
that
any
amendment
received
is
incorporated
in
the
text.
Oxford
Instruments Plasma Technology
Yatton,
Bristol.
BS49
4AP
Tel:
+441934837000
Fax:
+441934837001
Issue
1:
March 2006
PlasmalabSystem
100
Contents
Oxford
Instruments
Plasma
Technology
System Manual
Title and inside
front
cover pages
Contents List (iii)
Preface (iv)
Customer
Support
Facilities (iv)
Quality
Control Forms
(v)
Goods Return Form
QCF60
Certificate
of
Pre-Acceptance
and
Certificate
of
Acceptance
QCF
61
System Readyness Form
QCF
89
1.
Health
and
Safety
1·1
2.
Services
(ICP
180)
2-1
3.
Description
3-1
4.
Installation
4-1
5.
Operating
Instructions
5·1
6.
Maintenance
6-1
7.
Process
Guide
and
Glossary
8-1
8.
Uninstallation
and
disposal
9·1
Appendix
A
Measurement
of
radio
frequency
and
microwave
emissions
Appendix
B
Operation
and
maintenance
of
turbomolecular
pumps
Appendix
C
Concessions
Appendix
E
PC
hard
drive
restore
information
Appendix
IDS
Installation
Data
Sheets
(ICP
180)
Appendix
R
Rotameter
data
Appendix
S
Services
Specifications
for
Plasma
lab
and
lonfab
Systems
ICP
180
Inductively
Coupled
Plasma
Source
Equipment
Manual
OIPT
Automatch
Unit
Equipment
Manual
Plasma
lab
System
100
Illustrated
Parts
Catalogue
(ICP
180)
System
Restore
DVD
(in
HDD
Restore
Kit)
and
System
Software
CD
Printed:
28
March 2006 09:54
Contents
Page (iii)
Issue
1:
March 2006