Oxford-100-Manual.pdf - 第18页

Plasma lab and lonfab Oxford Instruments Plasma Technology Health and Safety 1.3.3 Light WARNING LASER RADIATION· EXPOSURE CAN CAUSE SEVERE EVE DAMAGE OR BURNS Before operating the system, ensure that all covers are fitt…

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Health and Safety
Oxford
Instruments
Plasma
Technology
Plasma
lab
and
lonfab
1.3.2
Electromagnetic
Radiation
WARNING
HAZARDOUS
RF
AND
MICROWAVE
EMISSIONS·
EXPOSURE CAN CAUSE
SEVERE
INJURY OR BURNS
Before
operating
the
System
On
button,
ensure
that
all
RF
and
I
or
microwave
shielding
is
correctly
fitted
and
that
all
connectors
and
flanges
are
in
place.
1.3.2.1 Parts
of
the
system produce electromagnetic
radiation
from
audio
frequencies
to
2.45 GHz.
At
all frequencies
within
this range
there
is
a
field
strength
level
at
which
radiation
can cause injury.
Oxford
Instruments Plasma Technology specifies limits
for
the
Electric and
Magnetic
field
strengths
within
the
environment
of
the
system.
The system must be tested
to
ensure
that
radiation
is
within
these limits, using
suitably
calibrated
equipment.
The tests must be carried
out
after
maintenance
involving
RF
shielding components, and
routinely
every
three
months. Refer
to
the
instructions
in
the
maintenance section
of
this manual.
1.3.2.2 Ensure
that
all
waveguide
components, flanges and cables are correctly
fitted,
secure and undamaged.
View
ports
on
Plasmalab systems and on certain
lonfab
systems are
fitted
with
a
metal
grid
for
shielding
RF
radiation. Replace this
item
only
with
the
correct part,
and ensure
that
the
ports are correctly reassembled.
If
a
metal
grid
is
not
fitted
and
there
is
any
doubt
about
whether
one should be
fitted,
you
must check
with
Oxford
Instruments Plasma Technology
before
proceeding.
If
the
view
port
has
been disassembled
then
tests must be carried
out
as
described in sub-section 1.3.2.1 above.
1.3.2.3
Operating
the
equipment
with
any panels removed increases
the
risk
of
RF
burns.
Maintenance
procedures,
which
require
this, must
only
be
performed
by skilled
persons
who
have
access
to
a suitable
field
strength
meter.
1.3.2.4 Removing panels
or
modifying
the
equipment
may increase
the
radio
interference
emitted
by
the
equipment
above
permitted
levels. This may cause nearby
equipment
to
operate
unexpectedly.
1.3.2.5
If
portable
transmitting
equipment,
e.g. radio, cellular phone, etc.,
is
used
within
two
metres
of
the
equipment,
the
equipment
could
operate
unexpectedly.
Removing panels
or
modifying
the
equipment
may increase this risk.
Printed:29 May 2005, 06:31
Health and Safety
Page 1-5
of
18
Issue
11:
August
2004
Plasma
lab
and
lonfab
Oxford
Instruments
Plasma
Technology
Health and Safety
1.3.3
Light
WARNING
LASER
RADIATION·
EXPOSURE CAN CAUSE SEVERE EVE
DAMAGE
OR BURNS
Before
operating
the
system,
ensure
that
all
covers
are
fitted
correctly.
Ensure
that
for
laser
equipment,
the
manufacturer's
instructions
have
been
read
and
full
understood.
1.3.3.1 Laser
equipment
when
handled
incorrectly
or
in
a damaged
condition
can seriously
damage eyesight. Read and
follow
the
manufacturer's
instructions carefully. Ensure
that
all covers supplied
by
Oxford
Instruments Plasma Technology
or
by
the
manufacturer
are correctly
fitted
before
the
equipment
is
powered
up.
WARNING
ULTRA VIOLET
RADIATION·
EXPOSURE CAN CAUSE SEVERE EVE
DAMAGE
OR BURNS
Ensure
that
all
view
ports
are
assembled
correctly,
and
that
any
replacement
filters
are
of
the
correct
specification.
1.3.3.2
View
ports on Plasmalab systems are
fitted
with
a clear plastic UV
filter
(Perspex
-VE-
clear-003). Replace this
item
only
with
the
correct part, and ensure
that
the
ports are
correctly reassembled.
If
a plastic
filter
is
not
fitted,
or
if
there
is
any
doubt
about
the
type
of
filter
that
is
fitted,
you
must check
with
Oxford
Instruments Plasma Technology
before
proceeding.
1.3.3.3 The customer should
be
aware
of
the
fact
that
view
ports are available in glass
or
quartz.
Most
view
ports on
Oxford
Instruments Plasma Technology systems are glass,
but
quartz
is
used in certain applications.
Quartz
view
ports
allow
much
more
UV
light
to
pass
through
than
glass does, and
so
present a
greater
hazard. They
will
require
very careful shielding
or
filtering
in ALL situations
on
Plasmalab and
lonfab
systems.
Be
careful
if
the
service
history
of
the
system
is
not
fully
known.
It
is
possible
that
a
glass
view
port
has been changed
for
a
quartz
one.
1.3.3.4 UV
light
can also escape
from
other
parts
of
the
system, e.g.
from
ICP
plasma
sources, and
downstream
plasma discharge tubes. Discharge tubes
of
this
type
are
often
made
of
quartz, and
so
very careful shielding
or
filtering
is
needed.
1.3.3.5 UV
light
can produce ozone
from
ambient
air. Detectable
quantities
are produced
by
ICP
sources
fitted
with
a
quartz
tube. Local
extraction
must be used in this
case.
Issue
11:
August
2004
Health and Safety
Page 1-6
of
18
Printed:29
May
2005. 06:31
Health and Safety
Oxford
Instruments
Plasma
Technology
Plasma
lab
and
lonfab
1.3.4
High
Temperature
WARNING
HOT SURFACES·
CLOSE
CONTACT CAN CAUSE SERIOUS INJURY
AND
BURNS
Allow
sufficient
time
for
heated
components
(e.g.
heated
lower
electrodes)
to
cool
to
room
temperature
before
carryina
out
maintenance.
1.3.4.1
During
operation
of
the
system some components can become dangerously hot.
Always
allow
time
for
these
to
cool
to
a safe
temperature
before
handling
them.
Components
that
become
hot
include electrically heated chambers, chamber
liners,
lower
electrodes, specimen holders and
halogen
lamps. Items
illuminated
by
halogen
lamps can also reach very
high
temperatures.
Note
that
items such
as
neutralizers,
ion
sources, and
ICP
sources
operate
at
high
temperatures.
1.3.5
Low
Temperature
WARNING
COLD OBJECTS· CONTACT CAN CAUSE SERIOUS INJURY
TO
THE
SKIN
AND
CAN CAUSE
THE SKIN TO ADHERE TO
THE
COLD
OBJECT
Allow
sufficient
time
for
cold
components
(e.g.
cryogenically
cooled
lower
electrodes)
to
return
to
room
temperature
before
carrying
out
maintenance.
If
cold objects
must
be
handled,
ensure
that
suitable
protective
clothina
is
worn.
1.3.5.1 Beware
of
the
extreme
cold produced in
refrigerated
or
cryogenically cooled
systems. Contact
with
the
skin by components
at
these temperatures can produce
'burns'.
Allow
the
cooling
system
to
reach a safe
temperature
before
attempting
any
maintenance
tasks.
Components
that
become cold include cryogenically cooled
lower
electrodes,
cryogenic pumps and components
that
use
liquid
nitrogen.
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May
2005, 06:31
Health and Safety
Page 1-7
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Issue
11:
August
2004