Oxford-100-Manual.pdf - 第319页
Plasmalab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue Section 6 - RF supplies and automatch Section 6 • RF supplies and automatch 1 RIE 600W Generator + OPT AMU 200 pipe (100-6-2…
Plasmalab
System
100
(ICP
180)
NOTES:
Lower
Electrode
Oxford
Instruments
Plasma
Technology
Section 5 Page 10
of
10
Illustrated Parts Catalogue
Issue
2:
November 02
Printed: 16-Jan-06. 15:55
Plasmalab
System 100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
Section 6 -
RF
supplies
and
automatch
Section
6 •
RF
supplies
and
automatch
1
RIE
600W Generator +
OPT
AMU
200
pipe
(100-6-200V) 3
6.1
Automatch
assembly - vac cap etch
5-turn
coil (MAOOA23771) 3
ICP180
FLOAT
TOP
ASSY.
ALUMINA (100-6-56) 5
6.2
Automatch
assembly - vac cap (MAOOZ23828) 5
6.3
AMU
control
panel 6
6.4
RF
generators 7
6.5
RF
supplies and
automatch
option
spares 8
6.6
RF
supplies and
automatch
(vac cap) ICP180
option
spares 8
Issue
2;
November 02
Printed: 16-Jan-06. 15:55
Section 6 Page 1
of
8
RF
Supplies
and
Automatch
Plasmalab
System 100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
---
(5) AMU
Control
PCB
(3) RF
Inlet
VACUUM AUTOMATCH ASSEMBLY EXTERNAL VIEW
(4) DC
motor
and
gearbox
assy
(2)
Trimpots
100k
(2
off)
\
(7) Fan
Finger
Guard
(6) Fan
(1)
Capacitive
feed
through
(4 off)
VACUUM AUTOMATCH ASSEMBLY INTERNAL VIEW
(21)
Insulator
------
(20) Ferrite
cube
._~
....
(19) AMU
sense
PCB --
(18)
Conductor
(inside
insulator)
(17) AMU DC
bias
coil
(16)
Cooling
ring
assy
(8)
Modified
gear
(9) 1
OOOpf
capacitor
drive
adaptor
(10)
500pf
__
capacitor
insulator
(11)
500pf
vacuum
capacitor
(12)
1000pf
vacuum
capacitor
(13) SIS
tube
PTFE
tube
(15)
Cooling
connectors
RF
Supplies
and
Automatch
Section 6 Page 2
of
8
Issue
2:
November
02
Printed: 16-Jan-06,15:55