Oxford-100-Manual.pdf - 第120页

PlasmalabSystem 100 Oxford Instruments Plasma Technology WARNING System Manual BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 • HEALTH AND SAFETY. 6.11.1 General 6-18 6.11.2 Perfluorised polyethers 6-18 6.11…

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System
Manual
Oxford
Instruments Plasma Technology
WARNING
PlasmalabSystem
100
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 - HEALTH
AND
SAFETY.
6.
Maintenance
6.
Maintenance
6-1
6.1
Customer
support
facilities
6-3
6.2
General 6-4
6.3
Safety maintenance 6-5
6.3.1 Inspection and renewal 6-5
6.3.1.1
Quartz
components
6-5
6.3.1.2
Alumina
components
6-5
6.4
94-100-BW-2F
Base
wired
2-frame
kit
6-6
6.4.1
Weekly
6-6
6.4.2
Monthly
6-6
6.4.3
Three-Monthly
6-7
6.4.4
Annually
6-7
6.4.5 Changing
the
gas
bottles
6-7
6.4.6 Etch cleaning 6-7
6.5
94-100-3-41C
ICP
180 chamber
kit
with
gate
valve 6-9
6.5.1
Monthly
6-9
6.5.2 O-rings 6-9
6.6
Top
electrode 6-10
6.6.1
Monthly
6-10
6.6.2 Six-monthly (tools
with
a removable showerhead) 6-10
6.6.3
Annually
(tools having
access
to
the
gas
inlet
isolation assembly
from
the
top
side only) 6-10
6.7
94-100-5-12A Cryo He
lower
electrode
6-11
6.7.1
Monthly
6-11
6.8
94-100-6-500/200V
RIE
500W
RF
generator
/
OIPT
AMU
kit..
6-12
6.8.1
Three-monthly
6-12
6.9
Vacuum system 6-13
6.9.1 Active Pirani
gauge
6-13
6.9.2 Capacitance
manometer
6-13
6.9.2.1 Six-monthly (or
as
necessary) 6-13
6.9.3 Penning
gauge
6-13
6.9.3.1 Dismantling
the
body
tube
6-14
6.9.3.2 Cleaning 6-15
6.9.4
Turbomolecular
pumps 6-15
6.9.4.1 Daily 6-15
6.9.4.2 Re-greasing
of
turbo
pumps
fitted
to
process chambers 6-15
6.9.4.3 2000
to
8000 hours
(3
to
12 months):
pump
relubrication
6-15
6.9.4.4 Alcatel
turbo
pumps
fitted
with
bake-out
collars 6-16
6.9.5 Rotary vane pumps 6-16
6.10
Gas
handling
system 6-17
6.10.1
Wall-mounted
gas
pod
6-17
6.10.1.1
Annually
6-17
6.10.2 Mass
flow
controllers 6-17
6.10.2.1
Annually
(or
as
necessary) 6-17
6.10.3 Filters 6-17
6.10.3.1
Annually
(or
as
necessary) 6-17
6.11
Pump lubricants 6-18
Printed: 22-Mar-06, 7:41
Maintenance
Page
6-1
of
22
UC
Davis 94-721001
Issue
1:
March 06
PlasmalabSystem100
Oxford
Instruments
Plasma
Technology
WARNING
System Manual
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE
WORK, READ SECTION 1 • HEALTH
AND
SAFETY.
6.11.1 General 6-18
6.11.2 Perfluorised polyethers 6-18
6.11.3 Hydrocarbon lubricants 6-19
6.12
94-1
00-5-12A Cryo I
heated
-150 I 400C He
lower
electrode
wafer
clamping
plate
changeover procedure 6-19
6.13
Adjusting
the
lower
electrode
wafer
clamp clamping force
6-21
6.14
Automatic
load lock end
effector
adjustments
for
different
wafer
sizes
6-22
Fig 6.1: 94-1 00-5-12A Cryo
I
heated
-150 I 400C
He
lower
electrode 6-20
Fig 6.2: Clamping force
adjustment
6-21
Fig 6.3: End
effector
wafer
size adjustments 6-22
UC
Davis 94-721001
Issue
1:
March 06
Maintenance
Page 6-2
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22
Printed: 22-Mar-06,
7:41
System
Manual
Oxford
Instruments
Plasma
Technology
WARNING
PlasmalabSystem1
00
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 - HEALTH
AND
SAFETY.
6.1
Customer
support
facilities
Oxford
Instruments Plasma Technology has
global
Customer
Support
Facilities
to
provide
a co-
ordinated
response
to
customer's queries.
All
queries are recorded on
our
Support
Database
and
dealt
with
as
quickly
as
possible.
If
we
are
not
able
to
answer
the
query
immediately,
we
will
contact
you
as
soon
as
possible.
Before
contacting
a Customer
Support
Facility, please ensure
that
you
have
referred
to
the
appropriate
section
of
your
system manual, OEM manuals and electrical drawings.
Please
direct
all queries
through
your
nearest
support
facility
(see
below)
and have
the
following
details available.
System
Type, e.g. PlasmalabSystem1
00
etc.
Works
Order
No. - This can
be
found
on
the
front
cover
of
your
system manual.
Contact
Information
-
Your
name, Company and
how
we
can
contact
you.
Details
of
your
query
-
nature
of
the
problem,
part
numbers
of
spares required, etc.
You can
contact
us
via any
of
the
following:
China
Beijing
Tel:
+861065188160
Email: pt.support@oichina.cn
Shanghai
Tel:
+8621
63608530
Email: pt.support@oichaina.cn
Germany
Tel:
+496122937161
Email: info@oxford.de
Japan
Tel:
+81
352453591
Email: oikkpt@oxinst.co.jp
Singapore
Tel:
+6563376848
Email: pt.support@oxford-
instruments.com.s9
Taiwan
Tel:
+88635788696
Email: pt.support@oxford-instruments.com.tw
UK
Customer Support Hotline: +44(0) 1934 837070
(0800 - 2000 UK local time)
Fax: +44(0) 1934837071
Email: pt.support@oxinst.co.uk
USA
Concord, MA
Tel:
+1
9789933
ext. 444
Toll Free:
+1
8004474717
ext. 444
Fax:
+1
978 369 8287
Email: support.pt@ma.oxinst.com
Printed: 22-Mar-06,
7:41
Maintenance
Page 6-3
of
22
UC
Davis 94-721001
Issue
1:
March 06