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Plasma lab System 100 2.1 General Oxford Instruments Plasma Technology System Manual The services requirements for the Plasma lab System 100 are given in two appendices to this manual: Appendix S Appendix I Services Spec…

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System
Manual
Oxford
Instruments
Plasma
Technology
Plasma
lab
System 100
2. Services (lCP
180
&
automatic
load lock)
2.
Services (ICP
180
&
automatic
load
lock) 2-1
2.1
General
2-2
2.2
Services requirements 2-3
2.3
Distribution
and use
of
Nitrogen
vent
and
turbo
purge
gas 2-3
2.4
Services diagrams 2-4
Fig 2.1: System 100
(ICP
180/380) services
flow
diagram
2-5
Fig 2.2: System 100
pneumatic
circuit
diagram
2-6
Printed
25
May
2005 10:12
Services
OCP
180 and
Automatic
Load Lock)
Page
2-1
of6
Issue
2:
February 02
Plasma
lab
System
100
2.1
General
Oxford
Instruments
Plasma Technology
System Manual
The services requirements
for
the
Plasma
lab
System
100 are given in
two
appendices
to
this
manual:
Appendix
S
Appendix
I
Services Specifications
for
Plasma
lab
and
lonfab
Systems. This
document
gives generic
information
and
mandatory
requirements
for
all services.
Plasmalab
System
100
Installation
Data Sheets. This
document
gives
the
information
necessary
to
prepare
the
environment
for
the
Plasmalab
System
100. Services
information
includes electrical
power
consumption
and
cooling
water
flow
rates. References are made
to
the
relevant
mandatory
services requirements, listed
in
'Services Specifications
for
Plasma
lab
and
lonfab
Systems'
(see
Appendix
S).
Services diagrams
of
the
Plasma
lab
System
100
(ICP
180 +
automatic
load lock) are given in
the
following
drawings:
SP91C24171
System 100
(ICP
180) Services
flow
diagram
SP91
B24018 System 100 Pneumatic
circuit
These
drawings
are located in
Volume
2
of
this manual. Illustrations
of
these
drawings
are
also given in sub-section 2.4, page 2-4.
Issue
2:
February 02
Services
OCP
180 and
Automatic
Load Lock)
Page 2-2
of
6 Printed 25
May
200510:12
System
Manual
Oxford
Instruments
Plasma
Technology
Plasma
lab
System
100
2.2
Services
requirements
For details
of
the
services requirements,
refer
to
Appendix
IDS
and
Appendix
S.
2.3
Distribution
and
use
of
Nitrogen
vent
and
turbo
purge
gas
Nitrogen
(N
2
)
is
supplied
to
the
system via
the
services panel
to
allow
the
process chamber,
foreline
and
automatic
load lock
to
be
filled
during
system
venting
and
to
provide
a
purge
gas supply
to
the
turbo
pump
(if
fitted).
The N
2
distribution
circuit
is
shown in
the
services
flow
diagram;
see
the
following
paragraph.
The services
flow
diagram
of
the
PlasmalabSystem 100
(ICP
180) are given in
drawing
94-
SP91C24171. This
drawing
is
located in
Volume
2
of
this manual.
An
Illustration
of
this
drawing
is
also given
at
the
rear
of
this Section.
Nitrogen
enters
the
system
at
the
services panel
through
a
Y<!"
Swagelok
bulkhead
connector.
It
is
then
fed
to
a
regulator
and pressure
gauge
(located
behind
a panel
to
prevent
unauthorized
adjustment) via a stainless steel pipe. The
outlet
pressure
of
the
regulator
can
be
manually
adjusted. To set
up
the
outlet
pressure
of
the
regulator,
refer
to
'Operator
Adjustments'
in Section
5.
The
outlet
from
the
regulator
is
connected to:
a)
A check valve (over-pressure
relief
valve).
b) The
turbo
pump
purge
line
(if
a
turbo
pump
is
fitted).
c)
If
a
Maglev
turbo
pump
is
fitted,
directly
to
the
turbo
pump
(for
use by
the
Alcatel
turbo
controller
during
system venting).
d) The process chamber
vent
line.
e)
The
foreline
vent
line.
f) The
automatic
load lock
vent
line.
Check
valve
The check valve
is
installed
to
limit
the
maximum pressure
that
the
regulator
can supply. The
valve
is
normally
closed and
will
open
at
pressures above 5 psi. The
outlet
of
the
check valve
is
fed
to
the
air
out
connector on
the
services panel
to
allow
any
excess
nitrogen
to
be piped
out
of
the
cleanroom
if
required.
WARNING
IN
A
NORMALLY
VENTED ROOM,
THERE
IS A LOW RISK
OF
ASPHYXIA DUE TO VENT
GAS DISPLACING AIR.
USERS SHOULD
MAKE
THEIR
OWN
RISK ASSESSMENT.
DO NOT REMOVE THE CHECK VALVE OR CAP THE
AIR
OUT CONNECTOR; THIS WOULD
COMPROMISE A SYSTEM SAFETY FEATURE.
Turbo
pump
purge
line
The
turbo
purge
line supplies
nitrogen
to
the
turbo
pump
purge
gas
inlet
via a
mass
flow
meter, restrictor and
the
turbo
purge
valve. The
mass
flow
meter's readback
is
monitored
by
the
PC
2000 software.
If
the
nitrogen
flow
is
too
low, this state
is
detected by
the
PC
2000
Printed
25
May
200510:12
Services
(ICP
180 and
Automatic
Load Lock)
Page 2-3
of
6
Issue
2:
February 02