Oxford-100-Manual.pdf - 第314页
Plasma lab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 5.3 Cryo table (100-5-12A) I (100-5-12A/1 - Anodised) DETAil B B A ®----~L-~ @ @--- @----~U'II'A @--_.- DETAllC L…
Plasmalab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
Item
No.
in
OIPT
Part
Number
Description
illustration
100-5·26A
RIE + He VARI HEIGHT TABLE
MA91Z21031
ELECTRODE LWR RIE
He
VARI + CLAMP
MA91A21088
WAFER CLAMP ASSEMBLV
MA91C20442
HELIUM PIPE RUN ASSEMBLV
1
MD91B23034
DARK
SPACE
SHIELD
2
MD91D21077
ROD (3
OFF)
3
MD91D21077
BUSH (3
OFF)
4
MA91D21074
CAP (3
OFF)
5
MD91D21288
SLEEVE
(WAFER CLAMP) (3
OFF)
5a
G/SUN/SPG/017
SPRING
COMPRESSION D22470 (INSIDE ITEM 5)
6
MD91D21287
PLUG (WAFER CLAMP) (3
OFF)
7
MA91D21352
FRICTION WELD JOINT 3/8" TUBE
8
MD91D21714
WAFER LIFTING PIN (3
OFF)
8a MD91C21713
PIN
LIFT
STAR
9 MD91B21711 TABLE
MAIN
BODY
10
MD91C19695
TABLE LOWER
PLATE
(RIE)
11
MD91C21010 WATER COOLING TUBE
12
MD91C21011 TABLE SUPPORT TUBE
13
MA91A19142
BELLOWS ASSEMBLY
14
G/SEUO-V/146C
2.6 x 66.3
mm
VITON
'0'
RING BS146
15
MD81C14107 TABLE FEEDTHROUGH
16
G/SEUO-V/829C
3.5 x 47.6
mm
VITON
'0'
RING BS829
17
MD81D14110
COMPRESSION RING
18
MD81D14109
CLAMPING FLANGE
19
MD81C14104 WATER COOLED CLAMP
20
MD81D14111
SPACER
21
MA91C19809
BELLOWS WELDED ASSEMBLY
21a
G/SU
N/SPGI008
SPRING
COMPo
OlD 31.75 x 50.8 x 2.6 (INSIDE ITEM
21)
22 G/AIR/CYU315 AIR CYLINDER CDQ2B20-15D (SMC)
23
MD91D23589
CYLINDER
MOUNTING
BRACKET
24
MD91D21407
SPRING
SHOULDER
25
MD91D21408
SPRING
SPACER
26
MD91D19679
CYLINDER
SPACER
27
MD91D23105
PIN
LIFT
ROD
28
MD91B21005
TABLE
SUPPORT
TUBE
29
MD91B22277
3"
DIA
WAFER CLAMP - QUARTZ -
SEE
SUB-SECTION
5.1
for
OTHER AVAILABLE WAFER CLAMPS
30
MA91B22491 RETAINING RING
FOR
WAFER CLAMP
G/AIRIVLV/502 SMC
ASSY.
VZ3140/5MNZIOOl
G/AIR/REG/104
INLINE FLOW
REG.
AS1001F-04
G/AIR/CYU807
REED
SWITCH SMC No. D-A73L
G/SUN
BRG/010 LINEAR
MOTION
GUIDE
G/SUN/ACT/002 TABLE
LIFT
ACTUATOR
EQTOO14
TYPE
17 Pt
RES
THERMOMETER
Note: See
sub
Section 0.5
for
hydraulic components and sub Section 5.4 for the helium pipe run.
Issue
2:
November
02
Printed: 16-Jan-06.15:55
Section 5 Page 5
of
10
Lower
Electrode
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
5.3 Cryo
table
(100-5-12A)
I
(100-5-12A/1
-
Anodised)
DETAil B
B
A
®----~L-~
@
@---
@----~U'II'A
@--_.-
DETAllC
Lower Electrode
Section 5 Page 6
of
10
Issue
2:
November 02
Printed: 16-Jan-06. 15:55
Plasmalab System 100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
Item
No.
in
OIPT
Part
Number
Description
illustration
100·5·12A
CRVOTABLE
100·5·12A11 CRVO
TABLE·
ANODISED
MA91Z20975
TABLE ASSV (.1501+140C)
MA91A20949
ELECTRODE
LOWER ASSV (.1501+140C)
ANODISED
MA91A22537
WAFER CLAMP ASSEMBLV
200
PORT
MA91C20442
HELIUM
PIPE
RUN ASSEMBLV
1
MD91D22533
WAFER CLAMP RING SUPPORT
2
G/SELlO-
V
1218C
3.5 x 31.3
mm
VITON
'0'
RING BS218
3
MA91D17600
PIN
WELDED ASSEMBLY
4
MD91D17604
FLANGED
BUSH
5
MD91D17602
HOUSING
6
G/SUN/SPGI012
COMPo
SPRING
LEE
No. LCM-050C-5 (NOT SHOWN)
7
G/SUN/BSH/123
OILiTE
BUSH
16
x 20LG
QM21-20
8
G/AIR/CYU320
20
mm
CYLINDER CDQ2B20-20D
9
G/SELIO-V/146C
2.6 x 66.3
mm
VITON
'0'
RING BS146
10
MD81C14107 TABLE FEEDTHROUGH
11
MD81D14110
COMPRESSION RING
12
G/SELIO-V/829C
3.5 x 47.6
mm
VITON
'0'
RING BS829
13
MD81D14109
CLAMPING FLANGE
14
MD81D14111
SPACER
15
MD91D19828
PUSH
ROD
16
MD81C14104 WATER COOLED CLAMP
17
MA91C19809
BELLOWS WELDED ASSEMBLY
18
MD91D19679
CYLINDER
SPACER
19
MD91D21408
SPRING
SPACER
20
MD91D21407
SPRING
SHOULDER
21
G/AIR/CYU315 AIR CYLINDER CDQ2B20-15D (SMC)
22
MD91D23589
CYLINDER
MOUNTING
BRACKET
22a
G/SUN/SPG/008
SPRING
COMPo
OlD 31.75 x 50.8 x 2.6 (NOT SHOWN)
23
MD91B20935
DSS
SUPPORT
TUBE
23a
MD91B20946
DSS
SUPPORT
TUBE ANODISED (ALT. TO ITEM 23)
24
MD91B20939
DARK
SPACE
SHIELD
24a
MD91B20945
DARK
SPACE
SHIELD ANODISED (ALT. TO ITEM 24)
25
MD91D20934
LOCATING RING
26
MA91A20947
ELECTRODE
LOWER ASSEMBLY WELDED
26a
MA91B20944
ELECTRODE
LOWER ANODISED (ALT. TO ITEM 26)
27
MD91C21713 PIN
LIFT
STAR
(UNDER)
28
MD91D21714
PIN
LIFT
ROD (UNDER)
29 MD91B22531
WAFER CLAMP BOTTOM
PLATE
30
MD91D22532
WAFER CLAMP
SUPPORT
ROD
31
MA91B22491 RETAINING RING
FOR
WAFER CLAMP
32a
MD91B22327
2"
DIA
WAFER CLAMP - QUARTZ
32b
MD91B22277
3"
DIA
WAFER CLAMP - QUARTZ
32c
MD91B22328
4"
DIA WAFER CLAMP - QUARTZ
32d
MD91B22938
4W'
DIA
WAFER CLAMP - QUARTZ
32e
MD91B24693
5"
DIA
WAFER CLAMP - QUARTZ
32f
MD91B22329
6"
DIA
WAFER CLAMP - QUARTZ
32q
MD91B23026
8"
DIA
WAFER CLAMP - QUARTZ
G/AIRNLV/502
SMC
ASSY.
VZ3140/5MNZ/001
G/AIR/REG/104
INLINE FLOW
REG.
AS1001F-04
G/AIR/CYU807
REED
SWITCH SMC No.
D-A
73L
EQT0014
TYPE
17 Pt
RES
THERMOMETER
Note: See
sub
Section 0.5
for
hydraulic components and
sub
Section 5.4 for the helium pipe run.
Issue
2:
November
02
Printed: 16-Jan-06. 15:55
Section 5 Page 7
of
10
Lower
Electrode