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OIPT Systems Oxford Instruments Plasma Technology System Manual 4.1 Mandatory Specifications for compressed air supplies • Inlet pressure to filter/mist 6 bar (90 psig) minimum. separator/re~ulator unit: OUTLET TO SYSTEM…

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System
Manual
Oxford
Instruments
Plasma
Technology
OIPT Systems
4. Compressed
air
A
dry
and clean compressed
air
supply
at
a
minimum
pressure
of
6 bar (90 psig) must be fed
to
a customer-supplied air
filter/mist
separator/pressure
regulator
unit
mounted
adjacent
to
the
machine. A suitable
unit
is
supplied by
SMC
(part
No.
AC
2030);
other
units
to
the
same
specification can be used.
Maximum
safe
pressure in
the
customer's feed
to
the
regulator
is
determined
by
the
regulator
used (9.9 bar (148.5 psig)
for
the
SMC
unit).
The supply
to
the
system must be
monitored
by a pressure gauge having a range
of
0
to
10
bar
(0
to
150 psi). The pressure
regulator
must be
fitted
with
a stop
to
prevent a pressure
greater
than
6 bar
from
being supplied
to
the
system. The pressure
to
be used
will
be set
during
commissioning
of
the
system.
The
following
air
filter/mist
separator/pressure
regulator
unit
components are recommended:
Air
filter:
SMC
AF2000-02D
with
filter
element
1129116A.
Mist
separator:
SMC
AFD2000-02D
with
filter
element
63092. This
filter
element
must
be
changed
annually.
Note
that
as
this
item
is
not
supplied by
DIPT,
its maintenance
is
not
included in
the
system
manuals.
Regulator
with
gauge:
SMC
AR2001-02G.
Spacers: 2
off
SMC
Y20L.
DRY AND CLEAN
.----,------,.-------,
AIR
SUPPLY
COMPRESSED
AIR
SUPPLY TO
PLASMALAB
OR
IONFAB SYSTEM
(SEE SPECIFICATION)
)
6MM
I
PUSH-FIT
CONNECTOR
PRESSURE
GAUGE
oTO 10
BAR
(0 TO 150 PSIG)
)
ADJUSTABLE
PRESSURE
~--------~
REGULATOR
MIST
SEPARATOR
SMC COMPONENTS
OR EQUIVALENT
FILTER
)
MINIMUM PRESSURE
6
BAR
(90 PSIG)
Fig 4.1: Recommended compressed air supply installation
Printed: 6-Jan-06, 8:44
Services Specifications
Page
11
of
22
Issue
16: April
05
OIPT
Systems
Oxford
Instruments
Plasma
Technology
System Manual
4.1
Mandatory
Specifications
for
compressed
air
supplies
•
Inlet
pressure
to
filter/mist
6
bar
(90
psig)
minimum.
separator/re~ulator
unit:
OUTLET
TO
SYSTEM:
•
Oil
content:
Less
than
10
ppm
•
Maximum
Moisture
Content:
·3°C (25°F)
•
Filtration:
Maximum
particle
size
of
0.3
microns
•
Regulator
outlet
pressure:
Adjustable
from
3
bar
to
6
bar
(45
psig
to
90
psig).
6
bar
must
be
the
maximum
provided.
•
Maximum
flow
rate:
135
litres/minute
(5
scfm).
•
Pressure
monitoring:
o
to
10
bar
(0
to
150
psi)
pressure
gauge.
Issue
16:
April
05
Services Specifications
Page 12
of
22 Printed: 6-Jan-06. 8:44
System
Manual
5.
Nitrogen
Oxford
Instruments
Plasma
Technology
OIPT Systems
Nitrogen
is
required
to
vent
and
purge
process chambers, load locks and pumps.
il====::::r-
"
\
I
\
I
\
"
1/4"
SWAGELOK
CONNECTOR
REGULATOR
OT01SLM
FLOW CONTROL
ROTAMETER
(IF REQUIRED)
TO
PLASMALAB
t
ORIONFAB
I SYSTEM
1
TOPUMP
PURGE
CONNECTOR
Fig 5.1: Recommendednitrogen supply installation
Semiconductor
grade
fittings
and pressure regulators,
together
with
electropolished stainless
steel
tube
must
be used
to
ensure
that
gas
quality
is
not
degraded. Purges
to
turbo
pumps are
supplied
by
DIPT
as
part
of
the
system. The customer
will
usually need
to
fit
a
purge
to
the
rotary
pump.
See
below.
5.1
Mandatory
specifications
for
Nitrogen
supplies
•
Pipework
fittings
and
Semiconductor
grade
pressure reQulators:
•
Gas
handling
tubing:
Electropolished stainless steel
•
Purity:
At
least
99.99%
or
higher
to
satisfy process
reQuirements.
•
Filtration:
2
micron
filter
mounted
adjacent
to
the
system.
•
ReQulation:
0.5
to
5
bar
(7.5
to
75
psig)
•
Minimum
pressure
at
input
3
bar
(45
psig).
Certain
pumps,
for
example
to
system:
Edwards
Drystar
pumps,
may
need
up
to
5
bar
(75psig)
to
ensure
satisfactory
purging.
Check
with
the
vendor's
instructions.
•
Rotary
pump
purging
It
is
the
customer's
responsibility
to
ensure
that
a
rotary
pump
purge
connection
is
fitted
and
used correctly. This is
needed
to
ensure
the
protection
of
the
pumping
system
from
the
customer's
process,
and
may
also
be
required
by
local
safety
regulations.
Because customers'
requirements
vary,
components
are
not
supplied
automatically
by
OIPT. Kits
of
parts
are
available
if
required.
Contact
OIPT
for
further
information.
It
may
be
safe
to
omit
this
feature
on
certain
systems, such
as
lonfab
machines
running
inert
gas processes.
However,
unless
the
customer
has
written
agreement
on
this
point
from
OIPT,
any
damage
caused
by
the
omission
cannot
be
covered
by
the
system
warranty.
Printed: 6-Jan-06. 8:44
Services Specifications
Page
13
of
22
Issue
16:
April
05