Oxford-100-Manual.pdf - 第4页

PiasmaiabSysteml00 Preface Oxford Instruments Plasma Technology System Manual This manual is the OPERATION and MAINTENANCE MANUAL. It provides all the information necessary for the operation and routine maintenance of th…

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PlasmalabSystem
100
Contents
Oxford
Instruments
Plasma
Technology
System Manual
Title and inside
front
cover pages
Contents List (iii)
Preface (iv)
Customer
Support
Facilities (iv)
Quality
Control Forms
(v)
Goods Return Form
QCF60
Certificate
of
Pre-Acceptance
and
Certificate
of
Acceptance
QCF
61
System Readyness Form
QCF
89
1.
Health
and
Safety
1·1
2.
Services
(ICP
180)
2-1
3.
Description
3-1
4.
Installation
4-1
5.
Operating
Instructions
5·1
6.
Maintenance
6-1
7.
Process
Guide
and
Glossary
8-1
8.
Uninstallation
and
disposal
9·1
Appendix
A
Measurement
of
radio
frequency
and
microwave
emissions
Appendix
B
Operation
and
maintenance
of
turbomolecular
pumps
Appendix
C
Concessions
Appendix
E
PC
hard
drive
restore
information
Appendix
IDS
Installation
Data
Sheets
(ICP
180)
Appendix
R
Rotameter
data
Appendix
S
Services
Specifications
for
Plasma
lab
and
lonfab
Systems
ICP
180
Inductively
Coupled
Plasma
Source
Equipment
Manual
OIPT
Automatch
Unit
Equipment
Manual
Plasma
lab
System
100
Illustrated
Parts
Catalogue
(ICP
180)
System
Restore
DVD
(in
HDD
Restore
Kit)
and
System
Software
CD
Printed:
28
March 2006 09:54
Contents
Page (iii)
Issue
1:
March 2006
PiasmaiabSysteml00
Preface
Oxford
Instruments
Plasma
Technology
System Manual
This manual
is
the
OPERATION
and
MAINTENANCE
MANUAL.
It
provides all
the
information
necessary
for
the
operation
and
routine
maintenance
of
the
system. Certain
components
within
the
system are supplied
by
other
manufacturers. These components have
their
separate manuals
which
are included, and should
be
referred
to
for
detailed
operation,
maintenance and repair
information.
6
i
'V\lARNING
SERVICE
BY
, QUALIFIED STAFF
• ONLY
Refer
to
manual
Where
this
label
is
displayed
(black
text
on
a
yellow
background),
read
the
relevant
manual
before
proceeding
to
operate
or
maintain
the
labelled
equipment.
Customer
Support
Facilities
Oxford
Instruments Plasma Technology has global Customer
Support
Facilities
to
provide
a co-
ordinated
response
to
customer's queries.
All
queries are recorded on
our
Support
Database
and
dealt
with
as
quickly
as
possible.
If
we
are
not
able
to
answer
the
query
immediately,
we
will
contact
you
as
soon
as
possible.
Before
contacting
a Customer
Support
Facility, please ensure
that
you
have referred
to
the
appropriate
section
of
your
system manual. OEM manuals and electrical drawings.
Please
direct
all queries
through
your
nearest
support
facility
(see
below)
and have
the
following
details available.
System
Type,
e.g. PlasmalabSystem100 etc.
Works
Order
No.
- This can be
found
on
the
front
cover
of
your
system manual.
Contact
Information
-
Your
name, Company and
how
we
can
contact
you.
Details
of
your
query
-
nature
of
the
problem,
part
numbers
of
spares required, etc.
You
can
contact
us
via any
of
the
following:
China
Beijing
Tel: +86
1065188160
Email: pt.support@oichina.cn
Shanghai
Tel: +8621 6360 8530
Email: pt.SUPDort@oichaina.cn
Germany
Tel: +49 6122 937 161
Email: info@oxford.de
Japan
Tel:
+81
352453591
Email: oikkpt@oxinst.co.jp
Singapore
Tel:
+6563376848
Email: pt.support@oxford-instruments.com.sg
Taiwan
Tel: +886 3 5788696
Email: pt.support@oxford-instruments.com.tw
UK
Customer Support Hotline: +44(0)
1934837070
(0800 - 2000
UK
local time)
Fax: +44(0) 1934837071
Email: pt.support@oxinst.co.uk
USA
Concord.
MA
Tel:
+1
9789933
ext. 444
Toll Free:
+1
8004474717
ext. 444
Fax:
+1
978 369 8287
Email: support.pt@ma.oxinst.com
Printed: 28 March 2006 09:54
Preface
Page (iv)
Issue
1:
March 2006
PiasmaiabSystem100
Oxford
Instruments
Plasma
Technology
System Manual
Quality
Control
forms
The
following
Quality
Control
Forms
(QCF)
are attached:
Goods
Return
Form
QCF
60
- To
be
completed
and
attached
to
the
outside
of
the
package
of
any
returned
parts.
Certificate
of
Pre-Acceptance
and
Certificate
of
Acceptance
QCF
61 - To be
completed
and
returned
if
the
customer
is
absent
from
acceptance.
System
Readiness
Form
QCF
89
- To be
completed
and
returned
prior
to
the
commissioning visit.
Printed: 28 March 2006 09:54
Preface
Page
(v)
Issue 1: February 2006