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Plasma lab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 11.1 Standard spare parts kits This section covers a commonly sold consumable parts list (100-S-PM ICP 180) for the Plasama…

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Plasmalab
System 100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
Section 11 - Spares
Section
11 • Spares 1
11.1 Standard spare parts
kits
2
11.2
Common
system 100 base
unit
standard
spares
kit..
3
11.3 ICP180
additional
parts
kit
3
11.4 Single
wafer
DIPT Loadlock spares
kit
4
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Section
11
Page 1
of
4
Spare Parts Kits
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
11.1
Standard
spare
parts kits
This section covers a
commonly
sold consumable parts list (100-S-PM
ICP
180)
for
the
Plasamalab
System
100
(ICP180) exchanged
as
part
of
a Planned
Annual
Maintenance
visit.
Spare Parts Kits
Section
11
Page 2
of
4
Issue
2:
November 02
Printed: 16-Jan-06, 15:55
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
11.2
Common
system
100
base
unit
standard
spares
kit
A
kit
containing
recommended
parts
for
a System 100 base
module
including
window
components,
table
components,
general
fixings
etc.
Spares
kit
Part
Number
100-S·CMP
OIPT
Part
No.
Qtv
Description
G/SEUO-V/384 1 5.3
mm
x 380.37
mm
VITON
'0'
RING
200-384 (Top
electrode
lid
-
chamber
seal)
G/SEUO-V/211
1
3.5
mm
x 20.2
mm
VITON
'0'
RING
BS211
G/SEUO-V/829 1 3.5
mm
x 47.6
mm
VITON
'0'
RING
BS829
(Table feedthrouClh
'0'
rinCl)
G/SEUO-V/146
1
2.6
mm
x 66.3
mm
VITON
'0'
RING
BS146
(Table
feedthrouah
'0'
rina)
G/SEUO-V/362 2 5.34
mm
x 158.12
mm
VITON
'0'
RING
BS362
(A - Pump
down
pipe
to
baseplate)
(B
- Table
to
baseplate)
GIV
AC/SEU040C 1 NW40
CENTERING
RING
ALlIVITON
G/GAS/FIT
1614C
1
% RETAINING
GASKET
(GIM vcr qasket)
M/0651D/01 1
WINDOW
GLASS
(6
MM
PYREX)
M/4175D/01
1
WINDOW
GASKET
MAOOD14711
1
NW40
CENTERING
RING
MOD
(Viewport
seal)
MD81D14211
1
UV/RF
FILTER
(Viewport
filter)
MD81D14110 1
COMPRESSION
RING
(Table
FT
seal)
MD81C14107
1
TABLE FEEDTHROUGH (Table
FT)
G/FIX/S32/630 4
M6
x 30
mm
SIS
CAPHEAD
SCREW
(Fixina 100
RIE)
G/FIX/S32/616
4
M6
x 16
mm
SIS
CAPHEAD
SCREW
(Fixina 100
RIE)
G/FIX/S54/516
4
M5
x 16
mm
SIS
CSK
HEAD
SCREW
(Fixina 100
RIE)
G/FIX/S21/930
4
Ml0
x 30
mm
HEX
HD
SIS
SCREW
(Fixinq 100
PECVD)
G/FIX/S32/630 4
M6
x 30
mm
SIS
CAPHEAD
SCREW
(FixinCll00
PECVD)
G/FIX/S32/640
4
M6
x 40
mm
SIS
CAPHEAD
SCREW
(Fixina 100
PECVD)
G/FIXlS21/520 4
M5
x 20
mm
HEX
HD
SIS
SCREW
(Fixina 100
PECVD)
G/FIX/S31/508
2
M5
x 8
mm
CAPHEAD
SKT
SCREW
(Fixina 100
PECVD)
G/FIX/S35/535
4
M5
x
35
mm
SIS
CAPHEAD SCREW(Fixinq 100
PECVD)
11.3
ICP180
additional
parts
kit
The list
below
contains
additional
spares
that
are
limited
to
ICP180 machines:
Spares
kit
Part
Number
100-S-180C - Ceramic
OIPT
Part
No.
Qtv
Description
G/SEUO-K/219 1 3.53
mm
x 32.9
mm
KALREZ
'0'
RING
BS219
(Gas
inlet
manifold)
G/SEUO-K/235 1 3.53
mm
x 79.0
mm
KALREZ
'0'
RING
BS235
(Gas
inlet
manifold)
G/SEUO-K/117
1
2.62
mm
x 20.3
mm
KALREZ
'0'
RING
BS117
(Gas
inlet
manifold)
G/SEUO-K/264
2
3.53
mm
x190.1
mm
KALREZ
'0'
RING
BS264
(Main
ICP
tube
seal)
GIVAC/FIT
1039SP
1
VIEWPORT NW25
GLASS
VP-NW-25
(Viewport)
GIV
AC/SEU025CSP
1
NW25
CENTERING
RING
(Viewport)
GIVAC/SEU015
1
NW16
CENTERING
RING
ALUMINIUM (Top
plate)
MD81D15847
1
PTFE
RING
(Gas
inlet
manifold)
MDOOC18542SP
1
ALUMINA
TUBE
-
ICP
SOURCE
(Main
ICP
Process
tube)
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Section
11
Page 3
of
4
Spare Parts Kits