Oxford-100-Manual.pdf - 第355页

Plasma lab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 11.2 Common system 100 base unit standard spares kit A kit containing recommended parts for a System 100 base module includ…

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Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
11.1
Standard
spare
parts kits
This section covers a
commonly
sold consumable parts list (100-S-PM
ICP
180)
for
the
Plasamalab
System
100
(ICP180) exchanged
as
part
of
a Planned
Annual
Maintenance
visit.
Spare Parts Kits
Section
11
Page 2
of
4
Issue
2:
November 02
Printed: 16-Jan-06, 15:55
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
11.2
Common
system
100
base
unit
standard
spares
kit
A
kit
containing
recommended
parts
for
a System 100 base
module
including
window
components,
table
components,
general
fixings
etc.
Spares
kit
Part
Number
100-S·CMP
OIPT
Part
No.
Qtv
Description
G/SEUO-V/384 1 5.3
mm
x 380.37
mm
VITON
'0'
RING
200-384 (Top
electrode
lid
-
chamber
seal)
G/SEUO-V/211
1
3.5
mm
x 20.2
mm
VITON
'0'
RING
BS211
G/SEUO-V/829 1 3.5
mm
x 47.6
mm
VITON
'0'
RING
BS829
(Table feedthrouClh
'0'
rinCl)
G/SEUO-V/146
1
2.6
mm
x 66.3
mm
VITON
'0'
RING
BS146
(Table
feedthrouah
'0'
rina)
G/SEUO-V/362 2 5.34
mm
x 158.12
mm
VITON
'0'
RING
BS362
(A - Pump
down
pipe
to
baseplate)
(B
- Table
to
baseplate)
GIV
AC/SEU040C 1 NW40
CENTERING
RING
ALlIVITON
G/GAS/FIT
1614C
1
% RETAINING
GASKET
(GIM vcr qasket)
M/0651D/01 1
WINDOW
GLASS
(6
MM
PYREX)
M/4175D/01
1
WINDOW
GASKET
MAOOD14711
1
NW40
CENTERING
RING
MOD
(Viewport
seal)
MD81D14211
1
UV/RF
FILTER
(Viewport
filter)
MD81D14110 1
COMPRESSION
RING
(Table
FT
seal)
MD81C14107
1
TABLE FEEDTHROUGH (Table
FT)
G/FIX/S32/630 4
M6
x 30
mm
SIS
CAPHEAD
SCREW
(Fixina 100
RIE)
G/FIX/S32/616
4
M6
x 16
mm
SIS
CAPHEAD
SCREW
(Fixina 100
RIE)
G/FIX/S54/516
4
M5
x 16
mm
SIS
CSK
HEAD
SCREW
(Fixina 100
RIE)
G/FIX/S21/930
4
Ml0
x 30
mm
HEX
HD
SIS
SCREW
(Fixinq 100
PECVD)
G/FIX/S32/630 4
M6
x 30
mm
SIS
CAPHEAD
SCREW
(FixinCll00
PECVD)
G/FIX/S32/640
4
M6
x 40
mm
SIS
CAPHEAD
SCREW
(Fixina 100
PECVD)
G/FIXlS21/520 4
M5
x 20
mm
HEX
HD
SIS
SCREW
(Fixina 100
PECVD)
G/FIX/S31/508
2
M5
x 8
mm
CAPHEAD
SKT
SCREW
(Fixina 100
PECVD)
G/FIX/S35/535
4
M5
x
35
mm
SIS
CAPHEAD SCREW(Fixinq 100
PECVD)
11.3
ICP180
additional
parts
kit
The list
below
contains
additional
spares
that
are
limited
to
ICP180 machines:
Spares
kit
Part
Number
100-S-180C - Ceramic
OIPT
Part
No.
Qtv
Description
G/SEUO-K/219 1 3.53
mm
x 32.9
mm
KALREZ
'0'
RING
BS219
(Gas
inlet
manifold)
G/SEUO-K/235 1 3.53
mm
x 79.0
mm
KALREZ
'0'
RING
BS235
(Gas
inlet
manifold)
G/SEUO-K/117
1
2.62
mm
x 20.3
mm
KALREZ
'0'
RING
BS117
(Gas
inlet
manifold)
G/SEUO-K/264
2
3.53
mm
x190.1
mm
KALREZ
'0'
RING
BS264
(Main
ICP
tube
seal)
GIVAC/FIT
1039SP
1
VIEWPORT NW25
GLASS
VP-NW-25
(Viewport)
GIV
AC/SEU025CSP
1
NW25
CENTERING
RING
(Viewport)
GIVAC/SEU015
1
NW16
CENTERING
RING
ALUMINIUM (Top
plate)
MD81D15847
1
PTFE
RING
(Gas
inlet
manifold)
MDOOC18542SP
1
ALUMINA
TUBE
-
ICP
SOURCE
(Main
ICP
Process
tube)
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Section
11
Page 3
of
4
Spare Parts Kits
Plasma
lab
System
100
(lep
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
11.4
Single
wafer
OIPT
load
lock spares
kit
The kit
in
the table below applies if a Single Wafer OIPT load lock is attached and consists of the following components:
Spares
kit
Part
Number
100·10·05CS
OIPT
Part
No.
Qtv
Description
MD90D12788 1 WINDOW
GASKET
(Sinqle
wafer
OIPT
loadlock)
G/SEUO-V/280C 1
3.5
mm
x 355.2
mm
VITON
'0'
RING
BS280
(Sinqle
wafer
OIPT
loadlock)
G/SEUO-V/260C 1
3.5
mm
x164.7
mm
VITON
'0'
RING
200-260 (Sinqle
wafer
OIPT
loadlock)
GIV
AC/SEU015C
1 NW16
CENT.
RING
ALI/VITON (Sinqle
wafer
OIPT
loadlock)
G/SEUO-V/015 1 1.8
mm
x13.99
mm
VITON
'0'
RING
BS015
(Sinqle
wafer
OIPT
loadlock)
G/SEUO-V/263C
1 3.5
mm
x 196.4
mm
VITON
'0'
RING
BS263
(Sinqle
wafer
OIPT
loadlock)
G/SELIO-V/269C 1
3.5
mm
x 221.85
mm
VITON
'0'
RING
200-269 (Sinqle
wafer
OIPT
loadlock)
G/SEUO-V/279C
1
3.5
mm
x 329.8
mm
VITON
'0'
RING
BS279
(Sinqle
wafer
OIPT
loadlock)
Spare Parts Kits
Section
11
Page 4
of
4
Issue
2:
November 02
Printed: 16-Jan-06, 15:55