Oxford-100-Manual.pdf - 第129页

System Manual Oxford Instruments Plasma Technology WARNING PlasmalabSystem 100 BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1· HEALTH AND SAFETY. 6.7 94-100-S-12A Cryo He lower electrode WARNING BEFORE ATTEM…

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PlasmalabSystem100
Oxford
Instruments
Plasma
Technology
WARNING
System Manual
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 - HEALTH
AND
SAFETY.
6.6
Top
electrode
WARNING
BEFORE ATTEMPTING
ANY
MAINTENANCE WORK
ON
THE
PROCESS
CHAMBER, IT
MUST
BE
SUBJECTED TO AT LEAST TWO VENT CYCLES SUBSEQUENT TO A
PROCESSING RUN.
6.6.1
6.6.2
6.6.3
Monthly
1)
Visually examine
the
top
electrode
for
contamination.
Any
necessary cleaning should
be carried
out
using a
lint-free
cloth moistened
with
Isopropyl Alcohol (IPA).
WARNING
ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE). DO NOT
USE
IT
NEAR A
NAKED
FLAME OR ENERGISED ELECTRICAL EQUIPMENT.
2)
Examine
the
top
electrode and its
integral
gas
and
water
fittings
for
damage.
CarefUlly inspect gas
inlet
showerhead plates
for
signs
of
plasma
concentrating
in a
hole
and
enlarging
the
hole.
3)
Examine
the
seal
for
signs
of
incipient
deterioration.
Six-monthly
(tools
with
a
removable
showerhead)
Check
the
condition
of
the
gas
inlet
isolation assembly
for
any signs
of
brown
discoloration
of
the
white
PTFE.
(It goes
brown
sometimes
before
failing
with
a
major
enlargement
of
the
through-holes.)
Annually
(tools
having
access
to
the
gas
inlet
isolation
assembly
from
the
top
side
only)
Check
the
condition
of
the
gas
inlet
isolation assembly
for
any signs
of
brown
discoloration
of
the
white
PTFE.
(It goes
brown
sometimes
before
failing
with
a
major
enlargement
of
the
through-holes.)
UC
Davis 94-721001
Issue
1: March 06
Maintenance
Page 6-10
of
22
Printed: 22-Mar-06. 7:41
System
Manual
Oxford
Instruments
Plasma
Technology
WARNING
PlasmalabSystem100
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION
1·
HEALTH
AND
SAFETY.
6.7
94-100-S-12A
Cryo
He
lower
electrode
WARNING
BEFORE
ATTEMPTING
ANY
MAINTENANCE WORK ON
THE
PROCESS
CHAMBER,
IT
MUST
BE
SUBJECTED TO AT LEAST TWO VENT CYCLES SUBSEQUENT
TO
A
PROCESSING RUN.
6.7.1
Monthly
1)
Visually examine
the
substrate
table
for
contamination.
Any
necessary cleaning
should be carried
out
using a
lint-free
cloth
soaked in Isopropyl Alcohol (lPA).
WARNING
ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE).
DO
NOT
USE
IT
NEAR A NAKED FLAME
OR
ENERGISED ELECTRICAL EQUIPMENT.
Examine
the
table
and its
integral
heating
and/or
cooling
systems
for
signs
of
damage.
Printed: 22-Mar-06,
7:41
Maintenance
Page
6-11
of
22
UC
Davis 94-721001
Issue
1:
March 06
PlasmalabSystem
100
Oxford
Instruments Plasma Technology
WARNING
System Manual
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE
WORK, READ SECTION
1·
HEALTH
AND
SAFETY.
6.8
6.8.1
94-100-6-S00/200V
RIE
SOOW
RF
generator
/ OIPT
AMU
kit
Three-monthly
Ensure
that
the
RF/microwave
radiation
leakage tests, detailed in
Appendix
A are carried out.
For details
of
maintenance required, refer
to
the
manufacturer's
literature
in Volume 3
of
this
manual.
UC
Davis 94-721001
Issue
1:
March 06
Maintenance
Page 6-12
of
22
Printed: 22-Mar-06,
7:41