Oxford-100-Manual.pdf - 第335页
Plasma lab System 100 (ICP 180) Issue 2: November 02 Printed: 16-Jan-06,15:55 Oxford Instruments Plasma Technology EDWARDS VAC INTERLOCK SWITCH GNAC/SUN/032 Section 8 Page 5 of 6 Illustrated Parts Catalogue Pumping Pipew…
Plasmalab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
Item
No.
in
OIPT
Part
Number
Description
illustration
1 GVVOO012C
Nz
VENT VALVES
2
GIVAC/SU
N/032 EDWARDS VAC INTERLOCK SWITCH
3 GIVACIVL
V/125 PV25PK ISOLATION VALVE
4
M/MTR/MFMI003
MKS 100SCCM N2 FLOW METER SWAG
5 GIVACIVLV/245
200lS0
STEPGATE
VALVE.64046-PE52
6 GIVACIVLV/246 VAT APC CONTROLLER 641PM-16PM
7
GIVAC/PMP535 ALCATEL ATP900HPC TURBO IS0200
8 GIVAC/PMP/536 ALCATEL ACT100T TURBO CONTROLLER
9
GIVAC/GGE/004
ACT.INVERT.MAG.GGE.AIM-S-NW25 (PENNING UNIT)
10
GIVAC/GGE/625
100mT
MKS CAPACITIVE MANOMETER 628B.1T-D-E-1-B
11
G/SEUO-V/371 5.3 x 215.3
mm
VITON
'0'
RING
BS
371
12
GIV
AC/SEU025C
NW25
CENTRING RING ALI/VITON
12a
GIV
AC/CLP/025C
NW25
CLAMP RING
13
GIV
AC/SEU01
OC
NW10
CENTRING RING ALI/VITON
13a
GIVAC/CLP/01
OC
NW10
CLAMP RING
14
GIV
AC/SEU040C
NW40
CENTRING RING ALlIVITON
14a
GIVAC/CLPI040C
NW40
CLAMP RING
15
GIV
AC/SEU080
2001S0-K CENTRING RING ALI/VITON
16
GIVAC/FIT/280
ISO
200 - 200
TEE
17
GIVAC/FIT/240C
NW40TEE
18
GIVAC/FLX/325
NW25
0.5M
PIPE
19
GIVAC/FIT/004C
NW25/NW16
REDUCER
C105-14-447
20
GIVAC/FIT/005C
NW40/NW25
REDUCER
Pumping
Pipework
Section 8 Page 4
of
6
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Plasma
lab
System
100
(ICP
180)
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Oxford
Instruments
Plasma
Technology
EDWARDS
VAC
INTERLOCK
SWITCH
GNAC/SUN/032
Section 8 Page 5
of
6
Illustrated Parts Catalogue
Pumping Pipework
Plasmalab System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
8.3
Pumping
pipework
option
spares
OIPT
Part
No.
Qty
Description
200
mm
VAT APC
VACUUM
KIT
GIVACIVLV/245 1 200
ISO
STEPGATE
VALVE 640046-PE52
GIVACIVLV/246 1
VAT
CONTROLLER 641PM-16PM
GIVAC/SEU080
4 200
ISO
CENTERING RING
GIVAC/SEU025 2
NW25
CENTRING RING
GIVAC/SEU040 2
NW40
CENTRING RING
GIVAC/SELl010 2
NW10
CENTRING RING 08C10511395
GIVAC/SEU068 1 DN
250
ISO-K CENTRING RING
Pumping
Pipework
Section 8 Page 6
of
6
Issue
2:
November
02
Printed:
16-Jan-06,15:55