Oxford-100-Manual.pdf - 第220页
OIPT Systems CONTENTS Oxford Instruments Plasma Technology System Manual 1. Introduction 3 2. Cooling I Warming water 4 2.1 Recirculation water 5 2.1.1 Mandatory Specifications for recirculated water systems 6 2.2 Total …
Appendix
S
Qualitative
Specifications
for
all
of
Oxford
Instruments
Plasma
Technology's
Plasma
and
Ion
Beam
Systems
Issue 16:
Apri
I 05
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OIPT Systems
CONTENTS
Oxford
Instruments
Plasma
Technology
System
Manual
1.
Introduction
3
2.
Cooling
I
Warming
water
4
2.1 Recirculation
water
5
2.1.1
Mandatory
Specifications
for
recirculated
water
systems 6
2.2
Total
Loss
Cooling 7
2.2.1
Mandatory
Specifications
for
total
loss
cooling
systems 8
3. Electrical
supply
9
3.1 System
earthing
and
bonding
9
3.1.1
Earth connection 9
3.1.2 Neutral supply
bonding
10
3.1.3 Residual
Current
Circuit Breakers 10
3.2
Mandatory
Specifications
for
electrical installations 10
4. Compressed
air
11
4.1
Mandatory
Specifications
for
compressed
air
supplies
12
5.
Nitrogen
13
5.1
Mandatory
specifications
for
Nitrogen
supplies 13
6. Process gases
14
6.1
Mandatory
specifications
for
process gas supplies 14
6.1.1 Systems using Helium
wafer
cooling 14
6.1.2 Installation
of
low
vapour
pressure gases (e.g.
SiCI
4
•
BCI
3
•
C
4
F
s
)
15
7.
Liquid
Nitrogen
16
7.1
Mandatory
Requirements
for
Liquid
Nitrogen
systems 16
8.
Extraction
17
8.1
Mandatory
requirements
for
Rotary Pump
extraction
17
8.2
Mandatory
requirements
for
Gas
Pod extraction 17
8.3
Mandatory
requirements
for
Cryogenic
pump
extraction
18
9.
Environment
19
9.1
Mandatory
Specifications
for
the
system
environment..
19
10.
Change
Record
20
11.
OIPT
locations
worldwide
22
Fig 2.1: Recommended basic recirculation installation 6
Fig 2.2: Recommended basic
total
loss
installation
7
Fig 3.1: Recommended electrical installation 9
Fig 4.1: Recommended compressed air supply installation
11
Fig 5.1: Recommended
nitrogen
supply installation
13
Fig 6.1: Recommended process gas supply installation 14
Issue
16:
April
05
Services Specifications
Page 2
of
22
Printed: 6-Jan-06. 8:44
System
Manual
Oxford
Instruments Plasma Technology
OIPT Systems
1.
Introduction
This
document
gives
the
specifications
of
the
services
required
for
the
Plasma
lab
and
lonfab
systems. For details
of
cooling
flow
rates and electrical supply ratings,
see
the
relevant system
installation
data
sheets.
Customers
must
ensure
that
the
services
as
specified are available
at
the
time
of
delivery
to
reduce system commissioning
time
and
potential
problems.
Unless
other
arrangements
have
been
made
in
writing
with
Oxford Instruments
Plasma Technology (OIPT),
it
is
a
requirement
that
services
meet
the
following
specifications.
If
they
do
not
meet
these
specifications
then
the
system
warranty
and
process
guarantees
may
be
made
invalid.
If
you
suspect
that
you
may fail
to
meet
ANY
of
these specifications. please contact
Oxford
Instruments Plasma Technology
(OIPT)
immediately
so
that
we
can discuss
the
problem
with
you.
Oxford
Instruments Plasma Technology
(OIPT)
conducts a
programme
of
continual
product
development,
and reserves
the
right
to
change
the
design and/or specification
of
equipment
without
notice. The details
contained
in
this
document
were
correct
at
the
time
of
printing
but
should be
confirmed
immediately
prior
to
delivery.
WARNING
BEFORE
INSTALLING
THE
SERVICES
REQUIRED
FOR
OIPT SYSTEMS,
ENSURE
THAT
ALL
RELEVANT
ASPECTS
OF
HEALTH
AND
SAFETY
ARE
FULLY
UNDERSTOOD.
HEALTH
AND
SAFETY GUIDANCE
AND
INSTRUCTIONS
ARE
GIVEN IN SECTION 1
OF
ALL OUR SYSTEM
USER
MANUALS. THIS DOCUMENT
IS
AVAILABLE IN ENGLISH,
FRENCH, GERMAN
AND
JAPANESE.
Printed: 6-Jan-06, 8:44
Services Specifications
Page 3
of
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Issue
16:
April
05